A transistor device includes a compound semiconductor body having a first surface and a two-dimensional charge carrier gas disposed below the first surface in the compound semiconductor body. The transistor device further includes a source in contact with the two-dimensional charge carrier gas and a drain spaced apart from the source and in contact with the two-dimensional charge carrier gas. A first passivation layer is in contact with the first surface of the compound semiconductor body, and a second passivation layer is disposed on the first passivation layer. The second passivation layer has a different etch rate selectivity than the first passivation layer. A gate extends through the second passivation layer into the first passivation layer.

A deployment guiding cloth is wound from an outside in the vehicle width direction, on an outer peripheral portion of a folded side airbag. This deployment guiding cloth extends toward a vehicle front side and is interposed between the side airbag that is partially deployed and a vehicle cabin side portion (a center pillar garnish and a door trim) before the side airbag is fully deployed.

A vehicle collision damage mitigation system includes: a vehicle having a crashable zone on a front side of a dash panel in a vehicle longitudinal direction; a body airbag device that inflates a body airbag that is provided on a front surface of the dash panel by a pressure of gas generated by a gas generating device; a detector that detects whether a mode of a frontal collision of the vehicle is a full-overlap collision or another collision; and a control unit that operates the gas generating device when detecting a collision other than the full-overlap collision on the basis of a detection result of the detector and that does not operate the gas generating device when detecting the full-overlap collision.

A retractor includes a spool configured to selectively wind and unwind the webbing, a lock base configured to operate in a free position and a locked position, a first energy absorbing member coupled to the spool and the lock base, and a second energy absorbing member coupled to the spool and the lock base. When the lock base is in the free position, the spool and lock base freely rotate together when a force is applied on the spool through the webbing. When the lock base is in the locked position and a force is applied on the spool through the webbing, rotation of the spool is permitted while rotation of the lock base is prevented, such that the first energy absorbing member absorbs a first energy and the second energy absorbing member is configured to absorb a second energy after a predetermined rotation of the spool.

A gliding apparatus includes a gliding board, a first front boot-retaining device for ascending a slope and a second front boot-retaining device for the descent. The first front retaining device comprises a first boot-fastening mechanism, defining a boot pivot axis during the ascent. The second front retaining device comprises a second boot-fastening mechanism, including a movable element incorporating an interface surface capable of contacting a front portion of the boot, the movable element being separate from the first fastening mechanism. The second front retaining device is configurable in a first “inactive” configuration for which the interface surface is away from the boot front portion, and a second “active” configuration for which the interface surface contacts the boot front portion. The first boot-fastening mechanism is capable of cooperating with the movable element of the second front retaining device so as to maintain the second front retaining device in its active configuration.

A suspension system for a vehicle includes a frame mounting bracket for mounting to the vehicle. The suspension includes front and rear rubber torsion axle assemblies. Front and rear lever assemblies are respectively pivotally attached to the vehicle at front and rear lever pivot points. Outer housings of the rubber torsion axle assemblies are each respectively rigidly mounted to the front and rear lever assemblies. A rigid control arm is pivotally connected at one end to the front lever assembly at a front control arm pivot point and its other end is pivotally connected to the rear lever assembly at a rear control arm pivot point. When the suspension assembly encounters a force causing the front lever assembly to rotate in one direction about the front lever pivot point the rigid control arm causes the rear lever assembly to rotate about the rear lever pivot in an opposite direction.

Interior panels having integrated airbag doors for motor vehicles and methods for making such interior panels are provided herein. In one example, an interior panel comprises a substrate having outer and inner surfaces and an opening extending therethrough. A multi-shot injection molded airbag chute-door assembly is mounted to the substrate and comprises a chute wall that at least partially surrounds an interior space. A door flap portion is pivotally connected to the chute wall and at least partially covers the opening. A perimeter flange extends from the chute wall and has a flange section that overlies the outer surface of the substrate. A molded-in lip feature extends from the flange section and contacts the outer surface to form a seal between the flange section and the substrate. A skin covering extends over the substrate and a foam is disposed between the skin covering and the substrate.

The present invention relates to a trolley, and more particularly to a lifting trolley capable of raising and lowering goods. The lifting trolley includes a trolley frame, a drive mechanism, and a bearing mechanism. The bearing mechanism is vertically slidably connected to the trolley frame, and the drive mechanism is disposed on the trolley frame and drives the bearing mechanism to slide vertically. Compared with the prior art, the lifting trolley provided by the present invention saves time and effort, is accurate in positioning, and facilitates conveying of goods.

A lightweight folding motorized chair with mechanical traction steering and braking. A folding frame supports the traction wheels and the drive system with hinged frame members configured to mechanically fold the control levers, wheels and periphery components into a substantially flat configuration for easy storage in small spaces. A mix of weight saving choices including: structural materials; mechanical traction control system; lithium ion battery; and overall lightweight design keeps the folding motorized chair at a size and weight that a person can lift into the trunk of a car.

A pre-weakened cover of an airbag module is provided including a layer having an outer show surface and an opposing inner surface. A plurality of first cuts is arranged at a first angle on the inner surface. A plurality of second cuts is arranged at a second angle on the inner surface. Each of the second cuts intersects two adjacent first cuts to form a generally V-shaped pattern.

A cutting tool cutting tool may include a tool body having a plurality of blades extending radially therefrom; and a plurality of rotatable cutting elements mounted on at least one of the plurality of blades, wherein the plurality of rotatable cutting elements are mounted on the at least one blade in a nose and/or shoulder region of the cutting tool at a side rake angle ranging from about 10 to about 30 degrees or −10 to about −30 degrees.

A tubular string is advanced with a bottom hole assembly as the hole is drilled and reamed in a desired direction with the aid of directional drilling equipment adjacent the bit. When the advanced tubular forms the desired lap to the existing tubular, the assembly can be configured to cement the tubular and expansion can then be accomplished to fill the annular space and enhance the cement bonding. The expansion equipment can create a bottom bell on the expanded tubular and expand the top end into a bell of the existing tubular so that a monobore is created as the process is repeated with each added string. Numerous variations are contemplated for each single trip including but not limited to the direction of expansion, whether cementing or expansion occurs first, reforming folded tubing in the hole as well as the nature of the expansion tool and pressure control when drilling.

A drilling apparatus for drilling boreholes in an underground formation includes a tool body that can be positioned in a borehole where drilling is to take place. The apparatus further includes a gas cutting torch having a nozzle, a supply of a cutting gas connected to the gas cutting torch. In some embodiments, the gas cutting torch and supply of cutting gas may be connected by an umbilical link. The tool body may be advanced through the borehole as drilling takes place. In some embodiments, the tool body may be advanced via a tractor device that forms part of the tool body or attached to the tool body.

Methods and systems are described for improved drilling operations through the use of real-time drilling data to predict bit wear, lithology, pore pressure, a rotating friction coefficient, permeability, and cost in real-time and to adjust drilling parameters in real-time based on the predictions. The real-time lithology prediction is made by processing the real-time drilling data through a multilayer neural network. The real-time bit wear prediction is made by using the real-time drilling data to predict a bit efficiency factor and to detect changes in the bit efficiency factor over time. These predictions may be used to adjust drilling parameters in the drilling operation in real-time, subject to override by the operator. The methods and systems may also include determining various downhole hydraulics parameters and a rotary friction factor. Historical data may be used in combination with real-time data to provide expert system assistance and to identify safety concerns.

An attitude hold controller method includes receiving at a navigable apparatus a demand inclination and a demand azimuth with respect to a global coordinate system and determining at the navigable apparatus a demand attitude vector according to the received demand inclination and the demand azimuth. Determining at the navigable apparatus a current navigable apparatus attitude vector. Evaluating a control law using the current navigable apparatus vector and the navigable apparatus demand attitude to derive a control law tool face, converting the control law tool face to an equivalent tool face, and applying the equivalent tool face with the navigable apparatus to control the navigable apparatus attitude.

The invention relates to a method and apparatus for opening threaded joints of drilling equipment (6) by striking the drilling equipment (6) with the percussion device of a rock drilling rig (1) and by measuring vibration originating from the drilling equipment (6) during striking. In addition to vibration, measuring means (9) measure a parameter defining at least one additional condition, on the basis of which the decision to stop striking is made.

Described herein is a wear indicator (100) for use in a drill bit or a core head. The wear indicator (100) comprises an elongate element that forms part of the drill bit. The elongate element has a plurality of numbers (110, 120, 130, 140, 150, 160, 170, 180) formed along its length, each number (110, 120, 130, 140, 150, 160, 170, 180) being formed as a void and corresponds to a level of wear in accordance with the IADC dull grading system. As the drill becomes worn, the wear indicator (100) wears at the same rate to reveal one of the numbers (110, 120, 130, 140, 150, 160, 170, 180). The numbers range from “1” to “8” where the number “1” illustrates the least wear and the number “8” indicates the most wear. When unworn, none of the numbers are visible.

According to an embodiment, a drilling fluid comprises: water and a set accelerator, wherein the drilling fluid has a 10 minute gel strength of less than 20 lb*ft/100 sq ft, wherein the drilling fluid has a density in the range of about 9 to about 14 pounds per gallon, wherein the drilling fluid remains pourable for at least 5 days, and wherein when at least one part of the drilling fluid mixes with three parts of a cement composition consisting of water and cement, the drilling fluid cement composition mixture develops a compressive strength of at least 1,200 psi. According to another embodiment, a method of using the drilling fluid comprises the steps of: introducing the drilling fluid into at least a portion of a subterranean formation, wherein at least a portion of the drilling fluid is capable of mixing with a cement composition.

Diamond bonded constructions comprise a diamond body attached to a substrate, wherein the body includes a first diamond bonded volume, and a second diamond bonded volume attached thereto. The second volume may be provided in the form of a powder or a presintered mass prior to attachment, and the first volume may be provided in the form of presintered pieces when combined with the second volume. The first volume diamond volume content is greater than about 94 percent, and is the same or greater than that of the second volume. The first volume is sintered during a first HPHT process, and the second volume is sintered and/or attached to the first volume during a second HPHT process. The first HPHT pressure is greater than the second HPHT pressure. The substrate is not an infiltration substrate used to form the first diamond volume. The diamond body may be thermally stable.

Systems and methods for processing drilling data. One embodiment provides a method comprising building user-designed contexts (which can be designated as built-in contexts) for drilling structures. The method also comprises orchestrating module execution within the user-designed contexts. The method further comprises providing data from the user-designed contexts to such modules via an interface. Some methods include monitoring drilling data to detect events (for instance departure from a pseudolog) and orchestrating module execution responsive thereto. The method can include exposing the orchestration of the execution of the module instances as a service. Moreover, some embodiments provide extra-contextual application program interfaces. In addition, or in the alternative, some embodiments schedule the orchestration of the modules based on declarations related to the inputs and/or outputs of the modules.

A control and monitoring system controls and monitors a high power laser system for performing high power laser operations. The control and monitoring system is configured to perform high power laser operation on, and in, remote and difficult to access locations.

In at least some embodiments, a pulsed-electric drilling system includes a bit that extends a borehole by detaching formation material with pulses of electric current, and a drillstring that defines at least one path for a fluid flow to the bit to flush detached formation material from the borehole. A feed pipe transports at least a part of said fluid flow to said path, and the feed pipe is equipped with a cooling mechanism to cool the fluid flow. The use of a cooled fluid flow may enhance the performance of the pulsed-electric drilling process.

A method for managing a drilling operation, including generating, by a first sensor and a second sensor of a bottom hole assembly (BHA), a first time based data log and a second time based data log, respectively, representing a borehole parameter along a drilling trajectory, determining, by a computer processor of the BHA and during the drilling operation, a time shift by comparing the first time based data log and the second time based data log, where offsetting the first and second time based data logs by the time shift maximizes a correlation factor of the first and second time based data logs, and determining, within a pre-determined time period from generating the first and second time based data logs, a drilling speed based on the time shift and a pre-determined distance between the first sensor and the second sensor.

Apparatus and method for automated drilling of a borehole in a subsurface formation. In one embodiment, a method includes selecting at least one control variable. A drilling performance objective having a value that is influenced by drilling of the borehole using the at least one control variable is defined. A first interval of the borehole is drilled maintaining the at least one control variable at a first value. A second interval of the borehole is drilled maintaining the at least one control variable at a second value. A third interval of the borehole is drilled maintaining the at least one control variable at a third value. The third value is selected based on a comparison of the values of the drilling performance objective while drilling the first interval and second interval to a predetermined optimal value of the drilling performance objective.

Methods and apparatus are described to drill and complete wellbores. Such wellbores include extended reach horizontal wellbores, for example in shales, deep subsea extended reach wellbores, and multilateral wellbores. Specifically, the invention provides simple threaded subassemblies that are added to existing threaded tubular drilling and completion equipment which are used to dramatically increase the lateral reach using that existing on-site equipment. These subassemblies extract power from downward flowing clean mud, or other fluids, in an annulus to provide additional force or torque on tubular elements within the wellbore, while maintaining circulation, to extend the lateral reach of the drilling equipment and completion equipment. These added elements include combinations of The Leaky Seal™, a Cross-Over, The Force Sub™ and The Torque Sub™. The use of such additional simple elements allow lighter drilling equipment to be used to reach a given lateral distance, therefore reducing drilling costs.

Embodiments of the invention relate to polycrystalline diamond compacts (“PDCs”) comprising a polycrystalline diamond (“PCD”) table including at least a portion having aluminum carbide disposed interstitially between bonded-together diamond grains thereof, and methods of fabricating such PDCs. In an embodiment, a PDC includes a substrate, and a PCD table bonded to the substrate. The PCD table includes a plurality of bonded-together diamond grains defining a plurality of interstitial regions. The PCD table further includes aluminum carbide disposed in at least a portion of the plurality of interstitial regions.

Disclosed herein is a method of delineating a second wellbore from a first wellbore. The method includes, emitting acoustic waves from a tool in the first wellbore, receiving acoustic waves at the tool reflected from the second wellbore, and determining orientation and distance of at least a portion of the second wellbore relative to the tool.

Method and apparatus for controlling rock drilling with a percussion device belonging to a rock drill to deliver stress waves to rock through a tool by pushing the tool against the rock by means of a feed motor and rotating simultaneously the tool by means of a rotation motor, whereby the maximum feed force is determined, pressure medium is supplied to the feed motor and to the rotation motor and the feed force is controlled according to the drilling conditions. The feed force is controlled on the basis of the feed speed and the rotation torque. The apparatus has a load control valve which controls the feed.

Nozzles for drilling tools, such as rotary-type drag bits and roller cone bits, a drilling tool and drilling assembly comprising nozzles, and methods of conveying drilling fluid through a nozzle for use in drilling subterranean formations are provided. A nozzle may include a substantially cylindrical nozzle body having an axis and an inlet port with a primary passage extending therethrough, and at least one secondary passage that diverges from the primary passage at an exit port.

A cutting element for a drill bit includes an outer support element and an inner rotatable cutting element, a portion of which is disposed in the outer support element, where the inner rotatable cutting element has a body with a non-planar cutting face.

An adjustable bent drilling tool capable of changing in situ drilling direction to facilitate horizontal drilling. The drilling tool may be controlled from the surface and eliminates the need to bring the tool to the surface for reconfiguration. In one embodiment, the drilling tool utilizes a communications module to communicate with upstream sections of the tool. The communications module is connected to a programmable electronic control module which controls an electric motor. A hydraulic valve assembly follows the control module, which receives input signals and controls a pilot piston between two fixed points of a mid-assembly typically located adjacent to and downstream of the hydraulic valve assembly on the drill tool. A lower assembly is attached to the drill tool immediately following the mid-assembly, and provides both a safety release sub-assembly as well as a bendable sub-assembly which directs the adjustable drill tool to change drilling angle and direction.

A rotary joint for use in directional control of a subterranean rotary steerable drilling apparatus. The rotary joint is formed by mated spherical-shaped sockets, each of which is connected with a hollow rod. By virtue of this arrangement, a continuous passageway is provided for fluid to flow through the rotary joint, which fluid may be used for cooling the rotary joint during operation of the rotary steerable drilling system.

Controlling electromagnetic (‘EM’) radiation in a data center having a number EM sections, including: receiving, by an EM controller, a specification of preferred EM radiation characteristics for the data center; and setting, by the EM controller, a state of each EM section in accordance with the specification, where the state of each EM section may be one of: an absorption state in which the EM section absorbs EM radiation or a reflection state in which the EM section reflects EM radiation.

One embodiment relates to an apparatus for electron beam lithography which includes a linear array of reflection electron beam lithography columns and a rotary stage. Each column is separately controllable to write a portion of a lithographic pattern onto a substrate. The rotary stage is configured to hold multiple substrates and to be rotated under the linear array of reflection electron beam lithography columns. Another embodiment relates to a method of electron beam lithography which includes simultaneously rotating and linearly translating a stage holding a plurality of wafers, and writing a lithography pattern using a linear array of reflection electron beam lithography columns over the stage. Each said column traverses a spiral path over the stage as the stage is rotated and linearly translated. Other embodiments, aspects and feature are also disclosed.

A chamber used in an extreme ultraviolet light generation apparatus that generates extreme ultraviolet light by irradiating a target material with a laser beam may include a chamber receptacle, a heat shield that is disposed within the chamber receptacle between a predetermined region where the target material turns into plasma and the chamber receptacle and that is configured to absorb heat produced at the predetermined region when the target material turns into plasma, and a support portion configured to attach the heat shield to the chamber receptacle, and further, the support portion may include an absorbing portion configured to absorb stress produced in the heat shield deforming due to the heat, by expanding/contracting in response to the thermal deformation of the heat shield.

Apparatus for performing electron radiation therapy on a breast cancer patient preferably includes an intraoperative electron radiation therapy machine, an intraoperative electron radiation therapy collimator tube connected to the intraoperative electron radiation therapy machine, and a plurality of filters made of a material having substantially the same density as human breast tissue for placement between the machine and the patient to change the energy of a monoenergetic beam after the beam has left the machine, allowing a filter to be chosen to reduce the energy traveling through the tube to a desired amount of energy to treat the patient. A method of controlling the amount of energy to reach a breast cancer patient undergoing electron radiation therapy includes selecting a filter made of a material having substantially the same density as human tissue and placing the filter between an intraoperative electron radiation therapy machine and a breast cancer patient to change the energy of a monoenergetic beam after it has left the machine, the filter being chosen to reduce the energy traveling from the machine to a desired amount of energy to treat the patient.

A coupling and various methods of use of the coupling. In one embodiment a coupling is provided for use with an appliance operated by a power supply, which coupling allows mounting/dismounting of the appliance without electrical isolation from the supply, said coupling comprising: a) a mounting member having a first encapsulated transformer element and suitable controls connectable to the power supply, said member being suitable for fixing to a structure; and b) a holder member engageable with said mounting member and suitable for holding or for connecting thereto an appliance, said holder member including a second encapsulated transformer element able to conduct power to an appliance.

An apparatus comprises a plasma flood gun for neutralizing a positive charge buildup on a semiconductor wafer during a process of ion implantation using an ion beam. The plasma flood gun comprises more than two arc chambers, wherein each arc chamber is configured to generate and release electrons into the ion beam in a respective zone adjacent to the semiconductor wafer.

Provided is an A/D converter including an input terminal, a reference signal line for supplying a reference signal which changes temporally, a comparator, a correction capacitor connected to an inverting input terminal of the comparator; and an output circuit which outputs digital data corresponding to an analog signal input to the input terminal. In a first state in which a total voltage of a first analog signal and an offset voltage of the comparator is held in the correction capacitor, a second analog signal input to the input terminal is supplied to a non-inverting input terminal of the comparator, and the second analog signal or the total voltage is changed using the reference signal, thereby outputting, from the output circuit, digital data.

According to one embodiment, a solid state imaging device includes a sensor substrate having a plurality of pixels formed on an upper face, a microlens array substrate having a plurality of microlenses formed and a connection post with one end bonded to a region between the microlenses on the microlens array substrate and with the other end bonded to the upper face.

In one aspect, an optical device comprises a monolithic optical module which includes a first total internal reflection (TIR) surface, a second TIR surface adjacent the first TIR surface, and a first optical port aligned with the first internal optical beam dividing interface. An interface between the first TIR surface and the second TIR surface forms a first internal optical beam dividing interface. An exterior surface of the first TIR surface and an exterior surface of the second TIR surface form a generally V-shaped notch on the monolithic optical module. A first optical beam entering the monolithic optical module through the first optical port and incident on the first internal optical beam dividing interface is partially reflected by the first TIR surface to travel in a first direction as a second optical beam and partially reflected by the second TIR surface to travel in a second direction as a third optical beam. The second direction is generally opposite to the first direction.

Apparatus for separating ash particles from a flue gas. The apparatus includes a screen that has a plurality of semi-elliptical cylinder surfaces. The semi-elliptical cylinder surfaces having holes through which said flue gas flows and through which the ash particles will not pass. The screen has a single layer for performing the separation in a manner such that the ash particles fall away from the screen and collect outside of the screen. A method of reducing velocity of a flue gas passing through screening apparatus for separating flue gas from ash particles. The method includes replacing a first screen of the screening apparatus with a second screen that has a plurality of semi-elliptical cylinder surfaces.

The invention relates to an incineration plant with a furnace, a device for feeding back incineration residues into the furnace, a device for measuring at least one parameter of the incineration, and devices for controlling the incineration. Moreover, the invention relates to a method for controlling an incineration plant.

A wall lining of industrial ovens for protecting from corrosion, in particular, a heat-resistant wall made of concrete, steel, sheet metal, or the like. The lining of the wall is made of at least two layers, wherein a layer is pressurized as a blocking layer.

This invention provides a system and method for efficiently and completely combusting oil in mixture with particulate solids. A furnace (kiln) having a feed nozzle with a lead screw drives the mixture from a feed hopper. This nozzle includes forced-air jets/ports at its tip providing makeup air and allowing atomization of the mixture. The nozzle thereby directs the mixture into a rotating combustion chamber that is tilted downwardly from the front toward a solid waste outlet port at the rear. Uncombusted fuel and air backflow to an upper, secondary chamber near the primary chamber front, and are completely combusted at a high temperature. Gasses exit a flue that can include a heat exchanger. This heat exchanger can be operatively connected to a heating device or other mechanism that converts the heat into usable energy. The nozzle can include a cone with axially tilted air ports about its perimeter.

The present invention provides grain-drying facilities which can effectively use the heat energy of a biomass combustion hot-air that has been generated in a biomass combustion furnace. The grain-drying facilities adopt technical means of providing the grain-drying facilities 1 which include: a biomass combustion furnace 3 provided with a heat exchanger 24 for generating hot air on the basis of a combustion heat of a biomass fuel and an outside air which has been taken in from the outside; and a circulation type grain-drying apparatus 2 provided with a grain-drying portion 7 to which the hot air that has been generated in the biomass combustion furnace 3 is supplied through a pipe 15 for supplying the hot air, wherein the above described circulation type grain-drying apparatus 2 has a grain-heating portion 6 which has a plurality of heating pipes 6a for heating the grains in the above described grain storing/circulating tank 5, and also has an air-exhaust fan 14 that is communicated with an exhaust side opening 6c that is located in one end side of each of the heating pipes 6a, and has a pipe 11 for supplying an exhaust hot-air, which communicates the exhaust hot-air sent from the above described biomass combustion furnace 3 with a supply side opening 6b that is located in the other end side of the heating pipe 6a.

A carbon fuel combustion process, employing an air gas separation unit, a combustion unit operating either with air or with an oxidizer leaner in nitrogen than air, coming from the air gas separation unit, and a unit for compressing and/or purifying the CO2 coming from the combustion flue gas, wherein the power consumed by the air gas separation unit and/or the flow of oxygen produced by the air gas separation unit and/or the capture of the CO2 coming from the combustion flue gas are variable over time is presented.

A coal nozzle assembly for a pulverized coal burner includes a diffuser. A flow conditioner also may be used with the assembly. The assembly conditions the coal/air flow before the coal/air flow is introduced to the furnace. The flow conditioner directs the coal into the diffuser where it is swirled to form a fuel rich outer ring disposed about an air rich inner portion before the fuel is delivered to the coal nozzle.

The invention relates to solid fuel units having a fuel supply chamber wherein the fuel to be sent for combustion to the combustion region found in the body is placed and the feed mechanism carrying the solid fuel found in the chamber forward. It is characterized in that it includes a main burning block having a fuel and air cell connected to the solid fuel supply chamber and air outlet vents formed on the external wall surface. A preventive surface is positioned on the main burning block external wall surface in a way that it would form a closed volume in a certain distance.

Improved silicon solar cells, silicon image sensors and like photosensitive devices are made to include strained silicon at or sufficiently near the junctions or other active regions of the devices to provide increased sensitivity to longer wavelength light. Strained silicon has a lower band gap than conventional silicon. One method of making a solar cell that contains tensile strained silicon etches a set of parallel trenches into a silicon wafer and induces tensile strain in the silicon fins between the trenches. The method may induce tensile strain in the silicon fins by filling the trenches with compressively strained silicon nitride or silicon oxide. A deposited layer of compressively strained silicon nitride adheres to the walls of the trenches and generates biaxial tensile strain in the plane of adjacent silicon fins.