ng

Substrate cleaning method and substrate cleaning device

A substrate rotates, and a liquid nozzle of a gas/liquid supply nozzle moves to a position above the center of the rotating substrate. In this state, a rinse liquid is discharged from the liquid nozzle onto the rotating substrate. The gas/liquid supply nozzle moves toward a position outside the substrate. A gas nozzle reaches the position above the center of the rotating substrate, so that the gas/liquid supply nozzle temporarily stops. With the gas/liquid supply nozzle stopping, an inert gas is discharged onto the center of the rotating substrate for a given period of time. After that, the gas/liquid supply nozzle again moves toward the position outside the substrate.




ng

Method and apparatus for cleaning a film seperating device

A method for cleaning a film separating device involves: a) performing positive-direction water cleaning when the ratio between the film filter resistance and the preliminary film filter resistance is less than 1.2; b) performing reverse water cleaning when the ratio between the film filter resistance and the preliminary film filter resistance is greater-than or equal-to 1.2; c) performing reverse chemical cleaning when the ratio between the film filter resistance and the preliminary film filter resistance is greater-than or equal-to 2; d) performing positive-direction chemical cleaning when the ratio between the film filter resistance and the preliminary film filter resistance is greater-than or equal-to 3.




ng

Surface treatment composition and surface treatment method using same

A surface treatment composition of the present invention contains a first surfactant, a second surfactant, a basic compound, and water. The surface treatment composition has a pH of 8 or more. The second surfactant has a weight-average molecular weight one-half or less that of the first surfactant. The sum of the content of the first surfactant and the content of the second surfactant is 0.00001 to 0.1% by mass.




ng

Corrosion and fouling mitigation using non-phosphorus based additives

Water treatment compositions are provided that are effective for mitigating corrosion or fouling of surfaces in contact with aqueous systems. The water treatment compositions can include one or more azole compounds, one or more transition metals, and one or more dispersants, in addition to various other additives. The water treatment compositions can exclude phosphorus and still be effective. Methods for mitigating corrosion or fouling of a surface in an aqueous system are also provided.




ng

Controlling temperature of a faraday shield

A method for controlling thermal cycling of a faraday shield in a plasma process chamber is provided. The method includes: performing a first plasma processing operation on a first wafer in the plasma process chamber; terminating the first plasma processing operation; performing a first wafer transfer operation to transfer the first wafer out of the chamber; and, during the first wafer transfer operation, applying power to a TCP coil under a plasma limiting condition.




ng

Fluid applicator and glass cleaning process

A fluid applicator (20), for cleaning particles from a glass sheet (2), including a conveyor (40) for supporting the glass sheet, a conveyance plane, and a nozzle (24). The conveyance plane is disposed adjacent the conveyor so that when the glass sheet is conveyed by the conveyor, a surface (6) of the glass sheet is disposed in the conveyance plane. The nozzle has a longitudinal axis (23), wherein the longitudinal axis is disposed at an angle of 30 to 90 degrees with respect to the conveyance plane, and the nozzle is disposed at a distance (21) of less than or equal to 100 mm from the conveyance plane. Also, there is disclosed a method for cleaning particles from a glass sheet, using the fluid applicator. The fluid may be delivered to the nozzle at a pressure of 10 to 80 kg/cm2 and a flow rate of from 1 to 20 l/min.




ng

Substrate processing method

A method for processing a plurality of substrates after forming a photosensitive film on each substrate includes carrying each substrate into a placement buffer including a plurality of supporters by a first transport mechanism; taking out each substrate from the placement buffer to an interface by a second transport mechanism; carrying each substrate into the exposure device; carrying each substrate out of the exposure device into the placement buffer by the second transport mechanism; taking out each substrate from the placement buffer to the processing section by the first transport mechanism; performing development processing on each substrate; making each substrate stand by at the placement buffer based on timing at which the exposure device can accept each substrate; and making each substrate stand by at the placement buffer based on timing at which the developing device can accept each substrate.




ng

Cleaning system having heated cleaning enclosure for cleaning heat exchanger tube bundles

An improved portable cleaning system for use in cleaning heat exchanger tube bundles, fin-fans, towers and other elongated components. The cleaning system comprises a cleaning unit having a cleaning enclosure that receives and cleans the component and a control unit that controls the operation of the system. The cleaning unit has a cleaning enclosure defining a chamber sized and configured to receive the component through a sealable lid. A roller assembly rotates the component while a spray assembly sprays cleaning fluid over and into the rotating component. The cleaning fluid is heated in the chamber using surface heating elements attached to heat transfer plates along sections of the chamber walls. A vapor recovery system captures and treats toxic vapors. In use, the cleaning system is transported to a facility to clean the components on-site using cleaning fluid supplied by the facility and discharging waste to the facility.




ng

Dishwasher comprising at least one rotatable spray arm

A dishwasher includes a dishwashing compartment and a rack provided in the dishwashing compartment for holding items to be cleaned. A rotatable spray arm is associated with the rack for applying water or wash liquor liquid upon the items. Water or wash liquor liquid is supplied to the spray arm via an upright supply tube having at least one region which flares in a direction of the spray arm and a peripheral terminal end facing the spray arm. The terminal end of the supply tube is configured to project into the cavity and thereby is extended into the spray arm.




ng

Painting implement cleaning and support apparatus

A painting implement cleaning and storage apparatus 10 is provided. The apparatus facilitates the cleaning and storage of painting implements such as a roller 12, a brush 14 and a roller pan 16. The apparatus includes a base 18 and a bracket 32 coupled to the base. The roller 12 is supported on the bracket 32 in an upwardly extending diagonal position between shields 45 and 54 for containing paint spreads from the roller. The brush 14 is supported on bracket 32 in a upwardly projecting position. A roller pan 16 is coupable to shield 45 and supported thereon in a descending position. Once the painting implements 12, 14 and 16 are supported on the apparatus 10, cleaning can be accomplished by the application of a stream of water thereto after which the implements can be left until they are needed.




ng

Cleaning compositions for use in closed loop cleaning machines

Embodiments of the present disclosure include cleaning processes, closed loop cleaning machines, and methods of cleaning an article. The cleaning process includes contacting a surface of an article with a cleaning composition in a cleaning chamber, where the cleaning composition includes at least about 85 percent by weight organic solvents, based on total weight of the cleaning composition, and where at least about 5 percent by weight of the organic solvents is propylene glycol, based on total weight of the organic solvents, to clean the surface of the article, collecting the cleaning composition including contaminants, and recovering the cleaning composition via distillation, where a distillation apparatus removes the contaminants from the cleaning composition and is connected to the cleaning chamber by a process stream.




ng

Method of cleaning tubes

A method for grit blasting tubes and for blowing swabs through tubes, automatically sensing that the swab has passed through the tube, and logging the event. Also, various methods are used for inserting the swabs into the tubes efficiently.




ng

Engine wash system and method

An engine wash system includes a manifold to secure to a nose cone of an engine; a feeder pipe connecting to the manifold to deliver wash liquid to the manifold; a plurality of nozzles connected to the manifold to direct the wash liquid into the engine; a hook connected to the manifold to connect to a slot on the nose cone; and a guide connected to the feeder to align the manifold relative to the engine.




ng

Dishwasher machine comprising a sorption drying device

A dishwasher having a washing compartment; an air-guiding channel to generate an airflow; and a sorption drying system to dry items to be washed. The sorption drying system has a sorption compartment with reversibly dehydratable sorption material and the sorption compartment is connected to the washing compartment by the air-guiding channel. The reversibly dehydratable sorption material in the sorption compartment is layered in form of a sorption unit that has an inlet cross-sectional area such that the substantially identical respective air volume flow value that is applied to each entry point of the inlet cross-sectional area.




ng

High performance low viscoelasticity foaming detergent compositions employing extended chain anionic surfactants

The invention meets the needs above by providing a surfactant system, mixture or blend that can be used as a part of a soaking composition. The surfactant system is capable of forming emulsions with, and thus removing, oily and greasy stains. In a preferred embodiment the surfactant compositions of the invention can remove non-trans fat and fatty acid stains. The invention involves foaming soaking compositions that have some or part of the anionic surfactant present in the same replaced with an extended chain anionic surfactant.




ng

Cleaning machine

A cleaning machine for containers, containing a housing in which various treatment stations, including a feed station and a discharge station, are accommodated, whereby the housing has two side walls located opposite each other. In order to simplify the installation of the cleaning machine, a modular construction is used, whereby at least the discharge station is formed as a module.




ng

Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation

Strategies for tool designs and their uses wherein the tools can operate in either closed or open modes of operation. The tools easily transition between open and closed modes on demand. According to one general strategy, environmentally controlled pathway(s) couple the ambient to one or more process chambers. Air amplification capabilities upstream from the process chamber(s) allow substantial flows of air to be introduced into the process chamber(s) on demand. Alternatively, the fluid pathways are easily closed, such as by simple valve actuation, to block egress to the ambient through these pathways. Alternative flows of nonambient fluids can then be introduced into the process chamber(s) via pathways that are at least partially in common with the pathways used for ambient air introduction. In other strategies, gap(s) between moveable components are sealed at least with flowing gas curtains rather than by relying only upon direct physical contact for sealing.




ng

Cleaning and/or unblocking of process equipment

A method of cleaning an internal component (14) of a process vessel (10) includes opening a guide (42) extending at least from a vessel access port or entry nozzle (38) to the internal component (14), guiding a cleaning agent/device by means of the guide (42) to the internal component (14), cleaning the internal component (14) with the cleaning agent/device, and closing the guide (42). The process vessel (10) is then operated with the guide (42) remaining in the process vessel (10).




ng

Moving handrail sanitizing device

A device for cleaning and sanitizing a moving handrail, such as those found on escalators and moving walkways. The device can automatically and continuously sanitize a handrail as it moves past or through the device, thereby preventing the spread of germs and viruses and encouraging users to make contact with the handrail for safety reasons without worrying about disease transmission.




ng

Cleaning system for a beverage machine, preferably a coffee machine

The invention relates to a cleaning system for coffee machines, comprising a cleaning device for periodically cleaning the coffee- and/or milk-carrying components using a cleaning liquid, which contains cleaning agent in the form of balls or tablets dissolved therein, wherein the cleaning device is provided with a time- and/or product-cycle-dependent controller and a metering apparatus (1) for the cleaning agent (10) that interacts with the controller. Thus, it is possible to program the cleaning process in a customized manner according to the mode of operation and to carry out the cleaning process fully automatically according to the program. The metering of the cleaning agent (10) according to the program ensures an always optimal cleaning effect together with sparing use of cleaning agents. Simple and safe handling is achieved by using ball- or tablet-shaped cleaning agents.




ng

Steam cleaning apparatus

A steam cleaning apparatus including a main body having a main switch, a steam cleaning head coupled to the main body, and a position sensitive switch having a first state when the steam apparatus is in a substantially vertical storage position and a second state when the steam cleaning apparatus is in a tilted, cleaning position, the position sensitive switch being connected in electrical series with the main switch such that when the position-sensitive switch is in the first state the position-sensitive switch interrupts the flow of electrical current from the main switch and when the position-sensitive switch is in the second state, electrical power is supplied by the main switch.




ng

Antiseptic applicators and packaging techniques

This disclosure describes example antiseptic applicators that may be used in combination with one or more cleansing, antimicrobial and/or antiseptic agents to reduce or eliminate contaminates on a surface. According to some embodiments, the disclosure describes that the applicators may contain an impermeable layer and a permeable layer, where the impermeable layer prevents contaminates for transferring from a user's hand to the permeable layer and the surface.




ng

Low foam media cleaning detergent with nonionic surfactants

A detergent for cleaning media is provided. The detergent comprises deionized water, between about 1% and about 5% by weight of a nonionic surfactant having an hydrophile/lipophile balance (HLB) value between about 10 and about 20, and an ethoxylation level between about 5 and about 20, between about 1% and about 5% by weight of a dispersing agent, between about 3% and about 10% by weight of a chelating agent comprising phosphonic acid, and between about 2% and about 6% by weight of an inorganic salt.




ng

Method and apparatus for multiple cutoff machining of rare earth magnet block, cutting fluid feed nozzle, and magnet block securing jig

In a method for multiple cutoff machining a rare earth magnet block, a cutting fluid feed nozzle having a plurality of slits is combined with a plurality of cutoff abrasive blades coaxially mounted on a rotating shaft, each said blade comprising a base disk and a peripheral cutting part. The slits in the feed nozzle into which the outer peripheral portions of cutoff abrasive blades are inserted serve to restrict any axial run-out of the cutoff abrasive blades during rotation. Cutting fluid is fed from the feed nozzle through slits to the rotating cutoff abrasive blades and eventually to points of cutoff machining on the magnet block.




ng

Body comprising hard face structure and method for making same

A body, such as a pick tool for cutting coal, includes a steel substrate and a hard face structure fused to the steel substrate. The hard face structure includes at least 1 weight percent Si, at least 5 weight percent Cr and at least 40 weight percent W. Substantially the balance of the hard face structure includes carbon and an iron group metal M selected from Fe, Co, Ni and alloy combinations of these elements. The hard face structure includes a plurality of elongate or platelike micro-structures having a mean length of at least 1 micron, a plurality of nano-particles having a mean size of less than 200 nanometers, and a binder material.




ng

Wafer dicing blade and wafer dicing apparatus including the same

A wafer dicing blade includes a cutting part including a protrusion, the protrusion having a uniform region with a substantially uniform width, and a support covering at least one sidewall of the cutting part, the protrusion of the cutting part extending beyond an edge of the support.




ng

Splitting wedge

A splitting wedge includes at least a wedge (1), an external sleeve (3), and a wedge sleeve (2). The wedge sleeve (2) and the external sleeve (3) are connected to one another by providing one with a flange (8, 10) and the other with a groove (7, 9), the flange (8, 10) and the groove (7, 9) being substantially perpendicular with respect to a direction of motion (B) of the wedge (1), and by arranging the flange (8, 10) in the groove (7, 9).




ng

Masonry block multi-splitting apparatus and method

An apparatus for splitting a plurality of masonry blocks is provided. The apparatus includes a plurality of first splitting blades that are configured to simultaneously move in a first direction, so as to split one of each of the plurality of masonry blocks into two or more sections during a single splitting operation. Each section has a first split surface. A plurality of second splitting blades is provided, where each is perpendicular and adjacent to one of the first splitting blades. Each of the second splitting blades is configured to form a second split surface on one of the masonry block sections that is perpendicular to at least one of the first split surfaces.




ng

Tile saw with free-rolling wheels

A saw system in one embodiment includes a base, a work support surface member supported by the base and including a work piece support surface defining a horizontal work piece support plane, and a plurality of wheels, each of the plurality of wheels engaged with at least one of the base and the work support surface member, wherein none of the plurality of wheels is attached to either the base or the work support surface member.




ng

Saw for construction cutting work

A saw (1) being portable and/or wheeled, such as a wall saw, floor saw or masonry saw, comprising a rotatable circular saw blade (3), a drive motor (5) with an motor output shaft (9) for rotating the saw blade (3), and a transmission (20) for interconnecting the motor output shaft (9) to the rotatable saw blade (3) in order to change an unsuitable high speed and low torque combination of the motor output shaft (9) into a more useable lower speed and higher torque combination at the rotatable tool (3), wherein the transmission (20) comprises two adjustable friction saw protective clutches in parallel, which can be set at a desired predetermined value, so as to limit the maximum size of the forces that the teeth and gears of the transmission (20) are exposed to. No over dimensioning is necessary, and the transmission (20) will make out fine in rough environments. The transmission may be of single-speed or two-speed type.




ng

Brazed diamond dressing tool

A dressing blade for finishing and reconditioning new and used abrasive grinding and cutting tools has a slab-shaped shank with an extension protruding longitudinally from the shank. Superabrasive grains are disposed on the surface of the extension and held in place by a brazed metal composition. This composition is formed by brazing a powdered mixture of brazing metal components and active metal components. Specific extension configurations are provided which allow aligning the superabrasive grains in single layer arrangement for precise dressing and simple fabrication of the tool. The novel dressing tool exhibits excellent wear characteristics.




ng

Sawing rope

A sawing rope (270) with abrasive elements (506) fixed on a steel rope (502) with a polymer jacket (504) is described and claimed. The abrasive elements (506) are made of a metallic sleeve on which an abrasive layer is deposited by means of electrolytic deposition, by means of sintering or by means of cladding for example laser cladding. Characteristic about this sawing rope (270) in view of the prior known sawing ropes is that each sleeve shows a connection or closure. Such a connection makes it possible to attach abrasive elements (506) on the rope without having to thread them on the rope (270) as is needed when making prior-art sawing ropes. The inventive sawing rope (270) can therefore be made in long lengths in a very efficient way.




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Methods, wires, and apparatus for slicing hard materials

Methods, wires, and apparatus for use in cutting (e.g., slicing) hard, brittle materials is provided. The wire can be a super-abrasive wire that includes a wire core and super-abrasive particles bonded to the wire core via a metal bonding layer. This wire, or another type of wire, can be used to slice workpieces useful for producing wafers. The workpieces can be aligned within a holder to produce wafers using the device and methods presently provided. The holder rotates about its central axis, which translates to workpieces moving in orbit around this axis. A single abrasive wire, or multiple turns of wire stretched tightly between wire guides, is then contacted with the rotating holder to slice the workpieces.




ng

Methods, wires, and apparatus for slicing hard materials

Methods, wires, and apparatus for use in cutting (e.g., slicing) hard, brittle materials is provided. The wire can be a super-abrasive wire that includes a wire core and super-abrasive particles bonded to the wire core via a metal bonding layer. This wire, or another type of wire, can be used to slice workpieces useful for producing wafers. The workpieces can be aligned within a holder to produce wafers using the device and methods presently provided. The holder rotates about its central axis, which translates to workpieces moving in orbit around this axis. A single abrasive wire, or multiple turns of wire stretched tightly between wire guides, is then contacted with the rotating holder to slice the workpieces.




ng

Device for adjusting the blade guard holder of a wall saw

A device (20) for adjusting the blade guard holder (17) arranged on the saw arm (3) of a wall saw (1), having a coupling element (25) is provided, whereby a first end of the coupling element (25) is joined to the blade guard holder (17), and, in a locked state, a second end is joined to the saw arm (3).




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Apparatus, system and method for using a diamond-impregnated wire to cut an object

An apparatus, a system and a method may use a diamond-impregnated wire loop to cut an underwater pipeline. The apparatus may have a frame, a carriage attached to the frame and/or pulleys connected to the carriage. The diamond-impregnated wire loop may be connected to the pulleys. The carriage may move relative to the frame to direct the diamond-impregnated wire loop in a forward direction relative to the frame and/or through the pipeline.




ng

Method for slicing a multiplicity of wafers from a crystal composed of semiconductor material

A method for slicing a plurality of wafers from a crystal includes providing a crystal of semiconductor material having a longitudinal axis, a cross section and at least one pulling edge. The crystal is fixed on a table and guided through a wire gang defined by sawing wire so as to form the wafers. The guiding is provided by a relative movement between the table and the wire gang such that entry sawing or exit sawing using the sawing wire occurs in a vicinity of the at least one pulling edge of the crystal.




ng

Slot wear indicator for a grinding tool

Wear indicators for abrasive articles are presented. Specifically, indicator marks that are parallel to a bonding edge of a grinding element are presented. Tools comprising a carrier element and one or more grinding elements comprising one or more indicators are also presented.




ng

Self-cleaning wiresaw apparatus and method

The present invention provides a self-cleaning wiresaw cutting apparatus including a cleaning mechanism adapted to clean the components of the wiresaw before, during, or after a cutting process or to humidify the cutting region of the apparatus. The apparatus contains at least one dispenser adapted to dispense an aqueous fluid onto various components of the wiresaw.




ng

Engine-driven cutter

A handheld engine-driven cutter is provided with a disk blade and a main body that drives the disk blade by an engine. A guard surface for repelling chips of a workpiece that scatter from the disk blade to below the main body is formed on the main body. The guard surface has an asymmetric shape with respect to a boundary that is a rotating plane of the disk blade.




ng

Hand-operated implement comprising a cutting chain for cutting mineral and metal materials

A hand-operated implement has a guide bar on which is fitted a cutting chain for cutting mineral and metal materials. The cutting chain is driven around the guide bar by a chain sprocket. The chain sprocket is arranged in a chain sprocket chamber which is delimited by a chain sprocket cover. A cutting element has an outer side facing a sidewall of the chain sprocket cover which lies in a first notional plane. The distance between the sidewall and the first notional plane measured perpendicular to the first notional plane and centrally between the top of the cutting element and the peripheral wall is less than approximately 0.8 cm over at least 30% of the section between a second notional plane containing the central axis of a fixing bolt on the guide bar and the exit opening at which the cutting chain leaves the chain sprocket chamber.




ng

Wire saw with tension detecting means and guide roller speed control

The present invention provides a wire saw which cuts a workpiece using a cutting wire and is capable of adjusting wire tension with high responsiveness. The wire saw includes first and second workpiece cutting units 1A and 1B. Each of the workpiece cutting units 1A and 1B includes a pair of guide rollers 10a and 10b around which a wire W is wound to form a workpiece-cutting wire group. The wire saw further includes a tension detector 18 which detects tension in the wire W between the workpiece cutting units 1A and 1B, and a control device 50. The control device 50 changes a rotational speed of the guide rollers 10a and 10b of at least one of the workpiece cutting units based on the tension detected by the tension detector 18 so as to keep the tension within an acceptable range.




ng

Gear grinding machine

Provided is a gear grinding machine the maintainability of which can be improved and which is capable of being miniaturized. More specifically, provided is a gear grinding machine wherein a threaded grinding stone (17) and a workpiece (W) are engaged with each other and are rotated in this state, resulting in the workpiece (W) being ground, and wherein between a dressing position (P2) where the threaded grinding stone (17) can be dressed and a retreat position (P1) to which a retreat is made from the dressing position (P2) during grinding, a disk dresser (66) which, by being driven into rotation, dresses the threaded grinding stone (17) is swung about an axis (C2) which is parallel to an axis (C1) that is the rotational axis for the workpiece (W) and which intersects, at right angles, the direction in which the threaded grinding stone (17) is fed toward the workpiece (W).




ng

Ductile mode machining methods for hard and brittle components of plasma processing apparatuses

A method of ductile mode machining a component of a plasma processing apparatus wherein the component is made of nonmetallic hard and brittle material wherein the method comprises single point turning the component with a diamond cutting tool causing a portion of the nonmetallic hard and brittle material to undergo a high pressure phase transformation to form a ductile phase portion of the hard and brittle material during chip formation wherein a turned surface is formed from a phase changed material and the turned surface is a grooved textured surface of phase changed material.




ng

Masonry circular saw stabilizing and supporting shoe

A supporting and stabilizing shoe used with a masonry circular power saw. A shoe frame rigidly mounts to the saw's motor frame. A plate that is preferably substantially planar and bifurcated to form two substantially co-planar members with a gap therebetween pivotably mounts to the shoe frame. A spring biases the plate away from the blade, but can be overcome, and an adjustment knob tightens the plate in position relative to the blade. This provides for depth adjustment for the blade and keeps the blade at a desired angle, such as ninety degrees, to the workpiece surface. The plate extends longitudinally from the motor frame beneath the drive mechanism and the blade of the saw to provide a stable surface upon which the saw can rest during use or storage.




ng

Cutting tool with blade made of fine-crystalline diamond

The present invention relates to a cutting tool, in particular in the form of a razor blade, a scalpel, a knife, a machine knife, scissors etc., which has a synthetic diamond layer with a cutting edge. The diamond layer thereby consists of fine-crystalline diamond.




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Motorized cutter, motorized cutter with wheels, and cutting method

The motorized cutter with wheels (10) comprises a motorized cutter (20) and a carriage (30). The motorized cutter (20) is equipped with an engine (24), a blade (22) rotatably driven by the engine (24), and a light-emitting unit (50) that generates laser light (52) in the same plane as the plane of rotation of the blade (22). A roadbed (90) is then cut along a line (X) drawn on the roadbed (90) by operating the motorized cutter with wheels (10) so that the line (X) is irradiated with the laser light (52). It is possible to remove the motorized cutter (20) from the carriage (30) together with the light-emitting unit (50).




ng

Method of dressing an abrasive wheel using a polycrystalline CVD synthetic diamond dresser and method of fabricating the same

A method of dressing a wheel using a polycrystalline CVD synthetic diamond dresser, the method comprising: rotating the wheel; and contacting a working surface of the wheel with a working surface of the polycrystalline CVD synthetic diamond dresser, wherein the polycrystalline CVD synthetic diamond dresser is oriented such that a leading edge of the working surface of the polycrystalline CVD synthetic diamond dresser is formed of larger grains than a trailing edge of the working surface of the polycrystalline CVD synthetic diamond dresser.




ng

Method for shaping and slicing ingots using an aqueous phosphate solution

A method for slicing a workpiece into wafers in which a polyphosphate solution is applied to the workpiece during the slicing process. The method comprises the steps of positioning the workpiece, such as a silicon ingot, in the vicinity of a wire saw that can cut through the workpiece without the use of an abrasive slurry; causing an aqueous polyphosphate solution to contact the workpiece; and causing the wire saw to cut into the workpiece while the polyphosphate solution is in contact with the workpiece. After the workpiece has been cut into wafers, the polyphosphate solution is rinsed off of the wafers. Preferably, the wire saw used in this method is a diamond wire saw.




ng

Wiresaw cutting method

The present invention provides a wiresaw cutting method comprising cutting a workpiece with a wiresaw while applying an aqueous cutting fluid to the wiresaw from a recirculating reservoir of cutting fluid, monitoring at least one of a chemical property, a physical property, or both, and adjusting the chemical composition of the cutting fluid while cutting the workpiece to maintain the property being monitored. The present invention additionally provides an apparatus to perform the inventive method.