A dry etching apparatus includes a process chamber, a stage, a gas supply device and a plasma generating device. The stage is in the process chamber and is configured to support a wafer, wherein the wafer has a center region and a periphery region surrounding the center region. The gas supply device is configured to supply a first flow of an etching gas to the center region and supply a second flow of the etching gas to the periphery region. The plasma generating device is configured to generate plasma from the etching gas.

The present invention provides a temperature adjusting apparatus for a focus ring, wherein heat radiated from the plasma onto the focus ring is transferred downward to a base through the first heat conducting pad contacting a lower surface of the focus ring, an insulating ring contacting a lower surface of the first heat conducting pad, and the second heat conducting pad contacting a lower surface of the insulating ring, so as to be cooled by a cooling system provided at the base; turning on a heater disposed in a grounded shielding ring to generate a controllable external heating source, heat from the heater being transferred to the focus ring through the shielding ring, a third heat conducting pad contacting the shielding ring, the insulating ring contacting the third heat conducting pad, and the first heat conducting pad, so as to perform controllable warming to the focus ring. By providing a good heat conduction path in conjunction with controllable heating power, the present invention achieves a fine control of the working temperature of the focus ring such that it is tunable in processing such as etching, thereby satisfying processing demands.

The present invention discloses a multi-zone active-matrix temperature control system, the control system having a temperature control matrix and a gate driver; the temperature control matrix comprising: N*M temperature control modules forming a N-row M-column matrix, a power supply line, and a power return line; each temperature control module comprising: a temperature control unit adapts to be heated up by electrical power for temperature controlling; a semiconductor switch provided with a gate electrode connected with the gate driver, two ends of the gate, which turn on or off, being connected with the power supply line, and with the power return line through the temperature control unit, respectively. In the temperature control matrix, one ends, which are connected with a power return line, of the temperature control units of temperature control modules in a same row or same column are serially connected, and connected with the power supply line; one ends, which are connected with the power supply line, of the semiconductor switches of the temperature control modules at a same row or a same column are serially connected, and connected with the power supply line. The present invention may precisely perform temperature control to each zone of the electrostatic chuck and significantly reduces the number of electrostatic chuck lead-out lines.

Embodiments using immersion de-taping are described. A substrate having a substrate tape attached thereto is provided. The substrate includes electrically conductive connectors attached to the substrate tape. A fluid is provided between the substrate and the substrate tape. While the fluid is between the substrate and the substrate tape, the substrate tape is removed from the substrate. Another embodiment is an apparatus comprising an immersion tank, a substrate chuck, first and second fixed rollers, and a moveable roller. The substrate chuck is configured to secure a substrate and to place the substrate into the immersion tank. The first fixed roller is operable to dispense a clamp tape. The second fixed roller is operable to roll the clamp tape. The moveable roller is operable to extend into the immersion tank and to adhere the clamp tape to a substrate tape on the substrate.

A substrate processing apparatus, including: a process chamber configured to process a substrate, a transfer chamber adjoining the process chamber, a shaft installed in the transfer chamber, a substrate mounting stand connected to the shaft and including a heating part, a first thermal insulation part installed in a wall of the transfer chamber at a side of the process chamber, and a second thermal insulation part installed in the shaft at a side of the substrate mounting stand.

A heat exchange apparatus includes a first heat exchanger configured to transfer heat between a refrigerant and another medium, a plurality of second heat exchangers configured to transfer heat between the refrigerant and the liquid, a compressor configured to pressurize the refrigerant and a plurality of expansion devices for each of the plurality of second heat exchangers and configured to expand the refrigerant pressurized by the compressor, wherein the refrigerant flows through the plurality of second heat exchangers in parallel, and the liquid flows through the plurality of second heat exchangers in series.

An evaporator and methods of using the same are described herein. A vapor-compression refrigeration apparatus in accordance with an embodiment of the present technology utilizes a fluid refrigerant and can include a compressor, a condenser, an expansion device and an evaporator arranged in succession and in fluid communication within a closed loop in order to circulate the fluid refrigerant. The apparatus can include at least one line within the closed loop in operable communication with the condenser for reducing temperature of at least a portion of the fluid refrigerant coming from the condenser prior to the fluid refrigerant entering the expansion device.

Apparatus for and method of rapidly chilling a beverage in which a vessel having high thermal mass relative to the amount of beverage to be introduced into the vessel is cooled through contact with a cooling module to a temperature low enough that a volume of beverage introduced into the vessel is rapidly cooled.

The disclosed apparatus cools a drinking liquid utilizing the Peltier effect, and optionally includes a system of gasification for gasifying the drinking liquid, once cooled. The cooling system in turn includes: a first cooling circuit, in which an operating fluid circulates, associated with a hot side of a Peltier cell; and a second cooling circuit, in which the drinking liquid circulates, associated with a cold side of the Peltier cell. The Peltier cell is integrated in a cooling unit exhibiting a special sandwich structure which integrates, as well as the Peltier cell, a first and a second heat exchanger, apt respectively to exchange directly the heat between the operating fluid which circulates in the first cooling circuit and the hot side of the Peltier cell and between the drinking liquid which circulates in the second cooling circuit and the cold side of the Peltier cell to cool the drinking liquid.

Disclosed herein is a powered air cooling device contained within a single portable unit and a method of using said device. The portable solar powered cooling unit can include some or all of the following: solar panels, a rechargeable power source, a thermostat unit, a thermoelectric (TE) cooling unit, a heat dissipation unit, a cooling unit resembling a heat sink or an actual heat sink, an air distribution device, for example in one preferred embodiment, a low power high volume fan, and a structure that directs air intake and outflow. The unit features the ability to maintain a stable ambient air temperature via heating, cooling, humidity control, or all of the above. The unit may also feature a form factor which allows the dissipation of the desired cooling or heating to occur at a faster rate. The unit itself although portable, may be fixed in place for more permanent applications. The unit can be used to provide temperature and humidity control.

A device includes a substrate, a micro-electro-mechanical system (MEMS) device disposed on the substrate, a controller disposed on the substrate, a heating element, and an enclosure. The heating element is configured to generate heat in response to a signal generated by the controller. The enclosure encloses the MEMS sensor device, the controller, and the heating element. The controller is configured to generate the signal responsive to temperature measurements within the enclosure. The signal causes the heating element to generate heat and maintain a predetermined temperature within the enclosure.

Embodiments of the present disclosure relate to a vapor compression system that includes a refrigerant loop, a compressor disposed along the refrigerant loop and configured to circulate refrigerant through the refrigerant loop, a condenser disposed downstream of the compressor along the refrigerant loop, where the condenser includes a plurality of tubes disposed in a shell and a diffusion area configured to enhance thermal energy transfer within the condenser, where the diffusion area is defined by a cavity of the condenser without a tube of the plurality of tubes, and an evaporator disposed downstream of the condenser along the refrigerant loop.

Embodiments of the present disclosure relate to a vapor compression system that includes a refrigerant loop, a compressor disposed along the refrigerant loop and configured to circulate refrigerant through the refrigerant loop, and a heat exchanger disposed along the refrigerant loop and configured to place the refrigerant in a heat exchange relationship with a cooling fluid. The heat exchanger includes a water box portion having a first length, a shell having a second length, a plurality of tubes disposed in the shell and configured to flow the cooling fluid, and a cooling fluid portion having a third length, where the water box portion and the cooling fluid portion are coupled to the shell, such that the first length, the second length, and the third length form a combined length of the heat exchanger that is substantially equal to a target length.

A heat exchange device has a plate stack unit obtained by continuous stacking of a plurality of plates. This plate stack unit includes a condenser unit, an evaporator unit, and an internal heat exchange unit. The condenser unit is configured such that a passage for allowing a high pressure refrigerant to flow, and a passage for a heat medium for absorbing heat from the high pressure refrigerant are stacked between a set of plates among the plurality of plates. The evaporator unit is configured such that a passage for allowing a low pressure refrigerant to flow, and a passage for a heat medium for applying heat to the low pressure refrigerant are stacked between a set of plates among the plurality of plates. The internal heat exchange unit is configured such that a passage for allowing the high pressure refrigerant to flow, and a passage for allowing the low pressure refrigerant to flow are stacked between a set of plates among the plurality of plates.

An apparatus for separating and storing liquid refrigerant in a refrigerant circuit including a housing configured as a refrigerant collection container, the housing having a refrigerant outflow line disposed therein. The refrigerant outflow line extending from an inlet opening, which is disposed in a gas refrigerant region and above a level of the liquid refrigerant, via a liquid refrigerant region to the outside, and has a through-opening formed in the liquid refrigerant region. The housing includes a boiling element for liquid refrigerant disposed therein. The boiling element is connected to the refrigerant outflow line in the region of the through-opening, such that a liquid passing through the through-opening from the housing passes through the boiling element by suction of a gas refrigerant.

A container treatment installation having a refrigeration installation, and a method for starting the operation of a refrigeration installation of a container treatment installation, are provided. The refrigeration installation comprises a refrigerant vessel for receiving a refrigerant which can be used for cooling a component of the container treatment installation, and a control device for controlling an amount of the refrigerant in the refrigerant vessel such that, after operation of the refrigeration installation, only a predetermined residual amount of refrigerant remains in the refrigerant vessel for the transport of the refrigerant installation, and after the transport of the refrigeration installation, the predetermined residual amount is filled up with a predetermined replenishment amount of refrigerant.

A novel process for activating available compressors in multiple compressor air conditioning systems, using an Optimum Stage-Up Process. This process is programmed into a controller as an algorithm, to provide a process for fast compressor start. This process shortens the time to initiate operation of compressors in a multi-compressor air conditioning system required to meet the demand call under any load condition, and hence shortens the time required for the actual sensed interior region air temperature to reach the interior region temperature set point. The Optimum Stage-up Algorithm estimates the number of compressor stages or steps that must be initiated, based on sensed or measured values, to meet the demand at any load condition. These measured values include the sensed temperature of the interior region being cooled, which is compared to the temperature set point of this interior region as well as measured mixed air temperature and supply air temperature.

An evaporator assembly for an ice-making apparatus having a vertical, substantially flat freeze surface, a refrigerant circuit, and a freeze template. The freeze template is thermally coupled between the freeze surface and the refrigerant circuit, and is formed of a plurality of regions arranged in a plane and interconnected by strips having a smaller dimension in the plane than the regions. Interface locations between the freeze template and the freeze surface define where on the freeze surface ice is to be formed. During a freeze cycle, expanded refrigerant is passed through the refrigerant circuit, and water is run over the freeze surface. During a harvest cycle, compressed refrigerant is passed through the refrigerant circuit, wherein heat transfers from the refrigerant circuit to the freeze surface until the freeze surface is warmed to a temperature sufficient to allow ice formed on the freeze surface to fall from the freeze surface by a force of gravity.

An ice machine may include a compressor, a first heat exchanger, an expansion device, an evaporator, an ice tray, and a water pump. The first heat exchanger may receive compressed working fluid from the compressor. The expansion device may receive working fluid from the first heat exchanger. The evaporator may receive working fluid from the expansion device. The ice tray may be in a heat transfer relationship with the evaporator. The ice tray may include a plurality of ice molds. The water pump may be in fluid communication with the ice molds and may be configured to pump water from a water source to the ice molds.

Apparatus for and method of rapidly chilling a beverage in which a vessel having high thermal mass relative to the amount of beverage to be introduced into the vessel is cooled through contact with a cooling module to a temperature low enough that a volume of beverage introduced into the vessel is rapidly cooled.

Systems and methods for recovering light hydrocarbons from refinery waste gas using a back-end turboexpander to generate a higher recovery of the light hydrocarbons for use as petrochemical feedstock and to remove the liquid light hydrocarbons before entering the turboexpander.

A multi-axis passenger-carrying aircraft comprises: an electrical system; a heat exchange system; a cabin; and an accommodating compartment arranged inside the cabin; wherein the electrical system is arranged inside the accommodating compartment, and wherein the heat exchange system comprises at least an air inlet communicated with the exterior of the cabin, an air outlet communicated with the accommodating compartment, and a cooler with an air inlet end communicated with the air inlet and an air outlet end communicated with the air outlet. In operation, air outside the aircraft may enter the heat exchange system via the air inlet and the cooler via the air inlet end to be cooled by the cooler. The cooled air may be discharged via the air outlet end and then enter the accommodating compartment via the air outlet, providing cool air to the accommodating compartment and dissipating heat from the electrical system.

Multi-axis passenger-carrying aircraft is provided, including: a heat exchange system; a cabin; and a passenger accommodating compartment arranged inside the cabin; wherein the electrical system is arranged inside the passenger accommodating compartment, and wherein the heat exchange system at least includes an air inlet in communication with the exterior of the cabin, an air outlet in communication with the passenger accommodating compartment, and a cooling and heating device with an air inlet end communicated with the air inlet and an air outlet end communicated with the air outlet. In operation, air outside the aircraft may enter the heat exchange system via the air inlet and the cooling and heating device via the air inlet end to be cooled or heated by the cooling and heating device. The air after heat exchange may be discharged via the air outlet end and enter the passenger accommodating compartment via the air outlet.

A beverage cooling system includes a main assembly having a refrigeration module, a pumping and control module, and a beverage cooling module. The refrigeration module has a refrigeration system cooling a cooling medium. The beverage cooling module has a cooling tank cooled by the refrigeration system. The pumping and control module has a pump to pump a beverage ingredient cooled by the refrigeration system. Each of the refrigeration module, the pumping and control module, and beverage cooling module are independently removable from and connectable to the remainder of the main assembly.

A charge air cooler for an internal combustion engine, includes a charge air inlet and a charge air outlet which are fluidly connected with each other via multiple charge air channels which are arranged parallel to each other and arranged parallel to each other and subjectable to a coolant flow; and at least one flow guide element arranged upstream of the charge air channels, wherein the flow guide element at least in one operating state of the internal combustion engine deflects charge air entering through the charge air inlet the direction of a condensate accumulation volume of the charge air cooler.

A desiccant air conditioning system for treating an air stream entering a building space, including a conditioner configured to expose the air stream to a liquid desiccant such that the liquid desiccant dehumidifies the air stream in the warm weather operation mode and humidifies the air stream in the cold weather operation mode. The conditioner includes multiple plate structures arranged in a vertical orientation and spaced apart to permit the air stream to flow between the plate structures. Each plate structure includes a passage through which a heat transfer fluid can flow. Each plate structure also has at least one surface across which the liquid desiccant can flow. The system includes a regenerator connected to the conditioner for causing the liquid desiccant to desorb water in the warm weather operation mode and to absorb water in the cold weather operation mode from a return air stream.

Provided is an hybrid solar heat absorption cooling system comprising: an absorption refrigerator; a solar heat steam generator configured to generate steam using solar heat; a daytime steam supplying unit configured to supply steam generated by the solar heat steam generator during the day as a heat source for the absorption refrigerator; a daytime hot water storage tank configured to store hot water discharged from the absorption refrigerator during the day; a nighttime hot water supplying unit configured to supply hot water stored in the daytime hot water storage tank during the night as a heat source for the absorption refrigerator; a nighttime hot water storage tank configured to store hot water discharged from the absorption refrigerator during the night; and a daytime hot water supplying unit configured to supply hot water stored in the nighttime hot water storage tank during the day to the solar heat steam generator.

The present invention provides for a system for calibrating operation of a compressor unit in a heating, ventilation, and air conditioning (HVAC) system. A measuring device measures an operating parameter of the HVAC system at a position where the measuring device is mounted on a refrigerant line of the HVAC system. The measuring device switches states when the value of the measured operating parameter reaches a switching value. A controller estimates a value of the first operating parameter at the position where the first measuring device is mounted on the refrigerant line, and the controller determines whether the estimated first operating parameter is within a threshold percentage of the switching value.

The present invention relates to a method, device and computer program for terminating a defrosting cycle within a refrigerated transport container. The container may include: a transport volume, a cooling unit comprising an evaporator arranged in a cooling space, a return air grid arranged to separate said cooling space from said transport volume, means for sensing temperature indicative of the return air temperature of air returning to said cooling space from said transport volume or the temperature of the return air grid, means for actively heating said evaporator during defrosting cycles, and a processor configured for controlling the duration of said defrosting cycles. The method includes: establishing an indicator(s) indicative of frost and/or ice build-up on said return air grid, and terminating a defrosting cycle when an indicator(s) of frost and/or ice build-up on said return air grid indicates that said return air grid is free of frost and/or ice.

A container for food or beverage which has a heat exchange unit secured internally thereof to be in contact with the food or beverage, the heat exchange unit is filled with liquid carbon dioxide and has a valve which when activated allows the liquid carbon dioxide to pass from the liquid state directly to the gaseous state through a restricted orifice which functions to maintain residual carbon dioxide in the heat exchange unit in the liquid state until all of the liquid carbon dioxide is exhausted from the heat exchange unit.

A system for adaptive cooling and energy harvesting comprising at least one thermoelectric device capable of acting as a thermoelectric cooler and as a thermoelectric generator, a hierarchical multiple-level control system, and electronics controlled by the control system and connected to the thermoelectric device. The electronics selectively configure the thermoelectric device in at least in a thermoelectric cooler operating mode and in a thermoelectric generation operating mode. The thermoelectric device can incorporate quantum-process and quantum-well materials for higher heat transfer and thermoelectric generation efficiencies. The invention provides for thermoelectric devices to additionally operate in temperature sensing mode. The hierarchical control system can comprise a plurality of control system, each of which can operate in isolation and can be interconnected with additional subsystems associated with other hierarchical levels. The hierarchical control system can comprise linear (additive) control, bilinear (additive and multiplicative) control, nonlinear control, and hysteresis.

As shocking fact is laid upon shocking fact, it becomes hard to judge SS Mendi- Dancing The Drill Of Death at NST City as a piece of theatre, such is one’s outrage at how the British behaved towards black people from the Empire a hundred years ago. But Isango Ensemble have created a powerful musical to tell the human story behind the appalling facts.

Brian Batchelor, once described by the Daily Echo as ‘the most versatile singer in the South’, has died at the age of 87.

Wiltshire becomes a metaphor for today's Britain in Barney Norris' retelling of Lorca's Blood Wedding at Salisbury Playhouse. The blood feud of the original is replaced by laddish drunkenness and Mediterranean passion by English reticence in which ‘Sorry’ is the most used word.

Despite a surge in support for independence in the last few weeks, the Better Together campaign came through with a majority sufficient to put to bed the question of independence for Scotland, at least for now.

News this week that fed-up residents in a Southampton street are threatening to blockade their own thoroughfare on the grounds that they have problems with poorly-parked vehicles, would seem to be a case of nose cutting to spite faces.

The end to the fluoride saga in the Southampton city region will put a big hole in the correspondence bag for this paper’s daily letters page.

IT had seemed a simple plan: to drive from Basingstoke to Ringwood, leaving the function I was attending around 10pm.

It is interesting that the Greek Prime Minister, Alexis Tsipras, summons the very real fact his nation invented democracy to bolster his government’s argument for a favourable solution to the debt crisis wracking its citizens.

Weddings and civil partnership ceremonies at Chewton Glen are something of a speciality.

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