A broadband quadruple helical circularly-polarized antenna for receiving GNSS signals comprises an excitation circuit and a set of quadruple spiral elements. Each quadruple spiral element consists of four conductors. Each conductor is a one spiral turn of the quadruple spiral element. Said conductors have equal winding angle. The winding angle of all conductors does not change in the same quadruple spiral element. Conductors of neighboring (longitudinally) quadruple spiral elements have different winding angles. The antenna provides a sharp drop in AP at angles near the horizon and a small AP level in the lower hemisphere.

A projector includes a wireless communication unit which wirelessly receives image data from a transmitting device, and a display unit which displays an image based on the image data received by the wireless communication unit. The wireless communication unit includes a first communication unit which has a first array antenna, and a second communication unit which has a second array antenna. The first communication unit transmits and receives wireless radio waves of a first frequency in a millimeter wave band via the first array antenna, and the second communication unit transmits and receives wireless radio waves of a second frequency in a millimeter wave band that is different from the first frequency via the second array antenna. A plane including the second array antenna is tilted at an angle of 10 degrees or more and 30 degrees or less to a plane including the first array antenna.

A flat antenna for satellite communication includes a radiating board. The radiating board includes at least one radiating line, and an adapter configured to modify the delay of the fields transmitted or received by the radiating line. The adapter includes a horn mobile in rotation between the two metal plates containing a sensor array. The horn is also mobile in rotation between at least one coaxial cable connected between at least one sensor of the network and the radiating line. The length of the coaxial cable is suitable for introducing a delay required to focus the wave radiated by the radiating line.

A flat antenna for satellite communication includes a radiating board. The radiating board includes at least one radiating line, and an adapter configured to modify the delay of the fields transmitted or received by the radiating line. The adapter includes a horn mobile in rotation between the two metal plates, and a multilayer power supply circuit. The first layer of the multilayer power supply circuit is formed at least one metal plate containing an array of slot sensors and the last layer of the multilayer power supply circuit is provided with at least one coupling slot connected to the radiating line. The first layer and the last layer is linked by at least one transmission line. The length of the transmission line is suitable for introducing a delay required to focus the wave radiated by the radiating line.

Disclosed herein is a method and system for using ferrite cores to suppress harmonic radiation with microstrip patch antennas. In certain embodiments, the ferrites cores exemplified herein significantly suppressed second and third harmonic radiation generated by RF components coupled to the microstrip patch antenna.

A folded planar antenna device for radio frequency identification (RFID) reading is provided. The folded planar antenna device includes an RFID chip, a conductor member comprising a binocular-shaped slot; and a substrate. The conductor member is mounted on the substrate and the substrate is connected to the RFID chip through the binocular-shaped slot. The folded planar antenna device can be mounted on different objects, such as metal, meat, or liquid container, without being completely de-tuned.

A waveguide device includes a first electrically conductive member having a first electrically conductive surface; a second electrically conductive member having a second electrically conductive surface which opposes the first electrically conductive surface; and a ridge-shaped waveguide member on the second electrically conductive member. The second electrically conductive member has a throughhole which splits the waveguide member into first and second ridges. The first and second ridges each have an electrically conductive end face, the end faces opposing each other via the throughhole. The opposing end faces and the throughhole together define a hollow waveguide. The hollow waveguide is connected to a first waveguide extending between the waveguide face of the first ridge and the first electrically conductive surface, and to a second waveguide extending between the waveguide face of the second ridge and the second electrically conductive surface.

A slot array antenna includes: a first conductive member having a first conductive surface and a plurality of slots therein, the slots being arrayed in a first direction and in a second direction which intersects the first direction; a second conductive member having a second conductive surface which opposes the first conductive surface; a plurality of waveguide members arrayed between the first and second conductive members along a direction which intersects the first direction, each waveguide member having an conductive waveguide face which extends along the first direction so as to oppose at least one of the slots; and an artificial magnetic conductor in a subregion which is within a region between the first and second conductive members but outside of a subregion containing the waveguide members. Neither an electric wall nor an artificial magnetic conductor exists in a space between two adjacent waveguide faces among the waveguide members.

A surface scattering antenna with a tightly-coupled or tightly-connected array of radiators provides an adjustable antenna with broadband instantaneous bandwidth.

An antenna array includes a plurality of patch antennas including a plurality of layers. Each of the plurality of layers are separated by a distance and each support a portion of the plurality of patch antennas. A plurality of connectors are each associated with one of the plurality of layers and supply a signal for transmission by the associated layer. A feed network on each of the plurality of layers provides a connection between a connector associated with the layer and the portion of the patch antennas located on the layer. Each layer transmits a signal having a different orthogonal function applied thereto that multiplexes each of the signals having a different orthogonal function applied thereto onto a single transmission beam. A parabolic reflector reflects the single transmission beam from the plurality of layers of the antenna array.

A multiplexer structure includes a passive substrate. The multiplexer structure may also include a high band filter on the passive substrate. The high band filter may include a 2D planar spiral inductor(s) on the passive substrate. The multiplexer structure may further include a low band filter on the passive substrate. The low band filter may include a 3D through-substrate inductor and a first capacitor(s) on the passive substrate. The multiplexer structure may also include a through substrate via(s) coupling the high band filter and the low band filter.

A method of manufacturing a thin-film transistor includes forming an oxide semiconductor on a substrate, stacking an insulating layer and a metal layer on the substrate to cover the oxide semiconductor, forming a photosensitive pattern on the metal layer, forming a gate electrode by etching the metal layer using the photosensitive pattern as a mask, where a part of the gate electrode overlaps a first oxide semiconductor region of the oxide semiconductor, forming a gate insulating film by partially etching the insulating layer using the photosensitive pattern as a mask, where the gate insulating film includes a first insulating region with a first thickness under the photosensitive pattern and a second insulating region with a second thickness less than the first thickness, and performing plasma processing on the gate insulating film so that a second oxide semiconductor region of the oxide semiconductor under the second insulating region becomes conductive.

A polymerizable liquid crystal compound represented by Chemical Formula 1: wherein in Chemical Formula 1, groups and variables are the same as defined in the detailed description.

Provided is an optical laminate which has high absorption selectivity to short-wavelength visible light having wavelengths around 400 nm and hence high light fastness and can impart better display characteristics when used for a display device. The optical laminate comprises at least one polarizing plate and at least one pressure-sensitive adhesive layer and satisfying the following formulae (1) and (2): A(400)≧0.5 (1) A(420)/A(400)≦0.3 (2) where A(400) represents the absorbance of the optical laminate at a wavelength of 400 nm in the transmission direction of the polarizing plate and A(420) represents the absorbance of the optical laminate at a wavelength of 420 nm in the transmission direction of the polarizing plate.

Disclosed is a retardation film which shows a high light selective absorbency to visible rays having short wavelengths near 400 nm to have a high light resistance, and which can give, when used in a display device, good display properties to the display device. This film is a retardation film, satisfying all of the following formulae (1) to (4): 2≦A(380) (1), 0.5≦A(400) (2), 0.4≧A(420)/A(400) (3), and 100 nm≦Re(550)≦170 nm (4), in which each A(λ) represents the absorbance of the film at a wavelength λ nm, and Re (550) represents the in-plane retardation value of the film to a light ray having a wavelength of 550 nm.

A compensation film includes an elongation film having an elongation rate of greater than or equal to about 200% in a uniaxial direction and having a surface energy of about 40 mJ/m2 to about 65 mJ/m2 and a liquid crystal layer disposed on one side of the elongation film and including liquid crystals.

This disclosure relates to the technical field of display apparatus, and in particular to a display apparatus and a vehicle utilizing the same. The display apparatus comprises a transmitting device for forming privacy images on a front windshield of a vehicle body and polarized glasses for viewing the privacy images. In the above technical solutions, privacy images are formed on the front windshield of the vehicle body by the transmitting device, such that the formed images will not interfere with the driver's driving. Meanwhile, the passengers can view the images on the front windshield by wearing the polarized glasses. By using the above transmitting device to form privacy images on the front windshield, an area of display is enlarged to facilitate the passengers' viewing. Passengers sitting in the rear portion of the vehicle can clearly view the images, and the visual effect during the passengers' viewing is improved.

A liquid crystal display (LCD) panel, a display device and a fabrication method of the LCD panel are provided. The LCD panel comprises a first substrate, a second substrate opposite to the first substrate, a liquid crystal (LC) layer sandwiched between the first substrate and the second substrate, a first alignment layer disposed on the first substrate, and a second alignment layer disposed on the second substrate. The first alignment layer is in contact with the LC layer and provides a first pre-tilt angle α to LC molecules in the LC layer, and the second alignment layer is in contact with the LC layer and provides a second pre-tilt angle β to the LC molecules in the LC layer, where α>β.

The disclosure provides a liquid crystal display panel, an array substrate and a manufacturing method thereof. In the method, controllable resistance spacer layers are formed on at least one of a source doped region and a drain doped region of a low temperature polysilicon active layer, wherein when a turn-on signal is not applied to the gate layer, the controllable resistance spacer layers serve as a blocking action for a flowing current, and when the turn-on signal is applied to the gate layer, the controllable resistance spacer layers serve as a conducting action for the flowing current, such that a contact region formed of the controllable resistance spacer layers is connected the corresponding source layer and the corresponding drain through the controllable resistance spacer layers. Therefore, the disclosure is capable of effectively decreasing a leakage of a thin film transistor.

A semiconductor device includes a substrate, a first thin film transistor supported on the substrate and having a first active layer that primarily contains a first oxide semiconductor, and second thin film transistor supported on the substrate and having a second active layer that primarily contains a second oxide semiconductor with a higher mobility than the first oxide semiconductor. The first active layer and the second active layer are positioned on the same insulating layer and contact the same insulating layer.

A display apparatus may include a display panel, a touch electrode, a connecting pad, a first inorganic insulation layer, and a second inorganic insulation layer. The display panel may display an image according to image data. The touch electrode and the connecting pad may be formed of the same conductive material and may be spaced from each other. The first inorganic insulation layer may be positioned between the display panel and the touch electrode and may directly contact each of the touch electrode and the connecting pad. The second inorganic insulation layer may directly contact each of the first inorganic insulation layer and the touch electrode. The touch electrode may be covered by the second inorganic insulation layer. The connecting pad may be positioned between two portions of the second inorganic insulation layer and have a side not covered by the second inorganic insulation layer.

Disclosed herein is a display panel in which a space between a color filter substrate and an array substrate is filled with liquid crystals. The cell gap between the color filter substrate and the array substrate is maintained by a column spacer and a filling pattern with which a contact hole is filled. Accordingly, it is possible to stress damage to an alignment film by the movement of the column spacer even if the display panel is deformed by external force. In addition, the contact hole is filled with the filling pattern, thereby suppressing overcoming the problem of insufficient or excessive amount of liquid crystals.

A fixture for preventing deformation of a glass panel of a display module, for receiving and fixing a light guide plate and a glass panel. It comprises an array cell and a color filter cell. The array cell is provided with a metal routing layer. The color filter cell is provided with a color resist layer. The fixture consists and a lower fixing end, with upper ends, the array cell and the color filter cell received in the upper fixing end, while lower ends thereof received in the lower fixing end, so the color resist layer in the color filter cell and the metal routing layer in the array cell are aligned in parallel. By a gap between the glass panel and the inner side face and bottom surface, the glass panel fine tunes properly for quick recovery by virtue of its gravity when deformation occurs.

A back plate of a liquid crystal display (LCD) device includes a first region as an appearance of the entire LCD device, in which a plurality of first and second reinforcing ribs crossing each other are disposed, the plurality of first reinforcing ribs are arranged to be spaced apart from each other in a horizontal direction, and an angle α between the first reinforcing rib and a vertical direction ranges from 40° to 50°. The plurality of second reinforcing ribs are arranged to be spaced apart from each other in the horizontal direction, and an angle β between the second reinforcing rib and the vertical direction ranges from 40° to 50°. Each of the first reinforcing ribs at least crosses one of the second reinforcing ribs. A liquid crystal display device including the back plate as described above is also disclosed.

To provide a liquid crystal display device, in which the vertical alignment property of the liquid crystal is high, favorable transparency when no voltage is applied and favorable scattering property when a voltage is applied are achieved, and the adhesion between the liquid crystal layer and the vertical liquid crystal alignment film is high. A liquid crystal display device, which comprises a liquid crystal layer formed by disposing a liquid crystal composition containing a polymerizable compound which undergoes a polymerization reaction by ultraviolet rays, between a pair of substrates provided with an electrode, and irradiating the liquid crystal composition with ultraviolet rays and curing it in such a state that the liquid crystal composition partly or entirely shows liquid crystallinity, and at least one of the substrates being provided with a liquid crystal alignment film to vertically align a liquid crystal, wherein the liquid crystal alignment film is a liquid crystal alignment film obtained from a liquid crystal aligning agent containing a polymer having a first side chain structure and a second side chain structure.

A display apparatus includes a liquid crystal layer between first and second substrates. The first and second scan lines along a first direction are disposed adjacently above the first substrate. A first region defined by the first and second data/scan lines includes the first and second sub-pixel regions. The first sub-pixel region includes a first TFT (connected to the first scan line and the first data line) and a first electrode electrically connected to the first TFT. A first common electrode disposed above the first substrate includes the first and second portions connected to each other. The first portion is positioned between the first electrode and the first data line, and the second portion is positioned between the second electrode and the first data line, wherein a width of the first portion in the first direction is greater than a width of the second portion in the first direction.

An array substrate and a method of fabricating the same are disclosed. The method has the following steps of: fabricating a switch array layer on a substrate; forming a color resist layer having a red color filter, a green color filter and a blue color filter on the switch array layer, and a through hole in the color resist layer; forming a transparent conductive layer on the color resist layer; and forming a light shield layer on the transparent conductive layer.

Carbon allotropes, a thin-film transistor array substrate comprising the same, and a display device comprising the same are disclosed. The thin-film transistor array substrate comprising a substrate, a gate electrode on the substrate, a gate insulating film on the gate electrode, an active layer positioned on the gate insulating film and comprising a semiconductor material and a plurality of carbon allotropes, and a source electrode and a drain electrode that make contact with the active layer.

A liquid-crystal display (LCD) device includes: an array substrate on which a sub-pixel is disposed; a color filter substrate on which a color filter corresponding to the sub-pixel is disposed; and a liquid-crystal layer between the array substrate and the color filter substrate. The array substrate comprises a lens hole, the color filter substrate comprises a lens hole guide, and a diameter of the lens hole is smaller than an inner diameter of the lens hole guide.

According to one embodiment, a laminated film includes a first adhesive layer, a first insulating layer which faces the first adhesive layer, a first metal layer which is located between the first adhesive layer and the first insulating layer, and a first porous layer which is located between the first adhesive layer and the first insulating layer and faces the first metal layer.

A process train for a floating production storage and offloading installation includes a crude oil storage tank that is equipped with at least one set of electrostatic internals arranged to provide a treatment flow path isolated from a surrounding volume of the electrostatic separator section of the tank. An oil-and-water stream or mixture entering the set of electrostatic internals travels along the treatment flow path and is subjected to an electric field. The treatment flow path is in an upwardly direction toward the oil outlet section and in a downwardly opposite direction toward the water outlet section of the tank. Employing electrostatic internals within the tank permits an allowable inlet water content into the tank of up to 80%, significantly reducing the required topside processing equipment.

Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, a method for treating an exhaust gas in an exhaust conduit of a substrate processing system includes: flowing an exhaust gas and a reagent gas into an exhaust conduit of a substrate processing system; injecting a non-reactive gas into the exhaust conduit to maintain a desired pressure in the exhaust conduit for conversion of the exhaust gas; and forming a plasma from the exhaust gas and reagent gas, subsequent to injecting the non-reactive gas, to convert the exhaust gas to abatable byproduct gases.

The present application discloses methods and apparatus for conversion of quantized vibrational energy. The present application discloses, by driving a medium that comprises arranged nuclei with one or more selected driving frequencies, the arranged nuclei in the medium are induced to oscillate coherently at one or more oscillating frequencies. The mechanical vibrational energy of the oscillating nuclei interacts with the oscillating medium. The interaction between the vibrational energy and the oscillating medium effectuates up-conversion or down-conversion of quantized vibrational energy.

The invention discloses a composite material used for catalyzing and degrading nitrogen oxide and its preparation method and application thereof. The invention of the hollow g-C3N4 nanospheres/reduced graphene oxide composite-polymer carbonized nanofiber material is prepared as follow: 1) the preparation of silica nanospheres; 2) the preparation of hollow g-C3N4 nanospheres; 3) the preparation of graphene oxide; 4) the preparation of surface modified hollow g-C3N4 nanoparticles preparation; 5) the preparation of composites; 6) the preparation of composite-polymer carbon nanofiber material. The raw materials used in the process is low cost and easy to get; the operation of the invention is simple and convenient without the use of expensive equipment in the whole process; the composite has high adsorption efficiency of ppb level nitrogen oxide with good repeatability.

Microfluidic devices having an electrowetting configuration and an optimized droplet actuation surface are provided. The devices include a conductive substrate having a dielectric layer, a hydrophobic layer covalently bonded to the dielectric layer, and a first electrode electrically coupled to the dielectric layer and configured to be connected to a voltage source. The microfluidic devices also include a second electrode, optionally included in a cover, configured to be connected to the voltage source. The hydrophobic layer features self-associating molecules covalently bonded to a surface of the dielectric layer in a manner that produces a densely-packed monolayer that resists intercalation and or penetration by polar molecules or species. Also provided are microfluidic devices having an electrowetting configuration that further include a section or module having a dielectrophoresis configuration; systems that include any of the microfluidic devices in combination with an aqueous droplet and a fluidic medium immiscible with the medium of the aqueous droplet; related kits; and methods of manipulating droplets, optionally containing micro-objects such as biological cells, within the microfluidic devices.

Certain exemplary aspects of the present disclosure are directed towards an apparatus for electrostatic fluid filtration. The apparatus utilizing alternating positive and negative electrodes in conjunction with filter media there between to filter contaminants from a fluid flow.

Electrolytic liquid generating device (1) includes laminated body (41) in which conductive film (46) is laminated to be interposed between mutually adjacent electrodes (44, 45), and electrolytic part (40) which electrolyzes liquid. Furthermore, electrolytic liquid generating device (1) includes a passage having inflow port (71) in which liquid to be provided to electrolytic part (40) flows and outflow port (72) from which electrolytic liquid generated in electrolytic part (40) flows out. The passage is formed such that liquid flowing direction (X) crosses laminated direction (Z) of laminated body (41).

A process train for a floating production storage and offloading installation includes a crude oil storage tank equipped with at least one set of electrostatic internals. The set of electrostatic internals are arranged to provide a treatment flow path within the crude oil storage tank oblique to a longitudinal centerline of the crude oil storage tank and through an electric field provided by the set of electrostatic internals. Employing these electrostatic internals within the tank permits an allowable inlet water content into the tank of up to 80%, significantly reducing the required topside processing equipment. The process and system also includes, upstream of the tank, two separator vessels arranged in parallel so each receives a portion of an incoming oil-and-water stream, a flash vessel arranged downstream of the two separator vessels, and a degasser vessel. Downstream of the crude oil storage tank is an electrostatic treater.

For coating substrates (S) having along their surfaces to be coated high aspect ratio vias, a sputtering system has a sputtering source arrangement, which includes a first DC pulse operated magnetron sub-source (1203) and a second frame-shaped magnetron sub-source (1213) which latter is arranged, in the system, between the substrate (S) and the first magnetron sub-source (1203). The second magnetron sub-source (1213) may be operated in DC, pulsed DC, thereby also HIPIMS mode. The first magnetron sub-source (1203) is advantageously also operated in HIPIMS mode. The substrate (S) is biased by an Rf power source (1253).

A magnetically enhanced low temperature high density plasma chemical vapor deposition (LT-HDP-CVD) source has a hollow cathode target and an anode, which form a gap. A cathode target magnet assembly forms magnetic field lines substantially perpendicular to the cathode surface. A gap magnet assembly forms a magnetic field in the gap that is coupled with the cathode target magnetic field. The magnetic field lines cross the pole piece electrode positioned in the gap. The pole piece is isolated from ground and can be connected to a voltage power supply. The pole piece can have negative, positive, floating, or RF electrical potentials. By controlling the duration, value, and sign of the electric potential on the pole piece, plasma ionization can be controlled. Feed gas flows through the gap between the hollow cathode and anode. The cathode can be connected to a pulse power or RF power supply, or cathode can be connected to both power supplies. The cathode target and substrate can be inductively grounded.

A film is sputter-deposited on an essentially plane, extended surface of a substrate which has recesses therein, namely at least one of grooves, of holes, of bores, of vias, of trenches. So as to establish on one hand a homogeneous thickness distribution of the film along the addressed surface of the substrate and, on the other hand, a thick film deposition within the recesses, sputter deposition is performed first at a large distance between a sputter surface of a target and the addressed surface of the substrate and then at a reduced distance between the addressed surfaces.

A plating apparatus is described. The apparatus includes: a substrate holder configured to hold a substrate in a vertical position; at least one processing bath configured to process the substrate held by the substrate holder; a transporter configured to grip and horizontally transport the substrate holder; at least one lifter configured to receive the substrate holder from the transporter, lower the substrate holder to place the substrate holder in the processing bath, elevate the substrate holder from the processing bath after processing of the substrate, and transfer the substrate holder to the transporter; and a controller configured to control operations of the transporter and the lifter.

An electrochemical polishing apparatus is provided for polishing a workpiece having at least one sharp object. According to the present invention, the electrolyte is driven to flow to the sharp object and the electrochemical processing is performed for polishing the sharp object.

The concentration measurement method includes: introducing a predetermined amount of the biological sample into the capillary; measuring a temperature of the biological sample by applying a first voltage to the electrode unit when the temperature of the biological sample is measured, the first voltage allowing the temperature measurement to be less affected by increase and reduction in an amount of the analyte contained in the biological sample; measuring the concentration of the analyte contained in the biological sample by applying a second voltage to the electrode unit; measuring an environmental temperature in a surrounding of the biological sample; and correcting the concentration of the measured analyte based on the measured temperature of the biological sample and the measured environmental temperature.

In one aspect, a biological sequencing device comprising a cartridge configured to be removed from the instrument is disclosed. In various embodiments the cartridge can include one or more capillaries suitable for capillary electrophoresis, a reservoir and a pump. In various embodiments the reservoir can contain a separation matrix. In various embodiments the pump can load a capillary with separation matrix. In another aspect the biological sequencing device can include one or more capillaries and an integrated valve assembly. In various embodiments the integrated valve assembly can provide a polymer to the one or more capillaries.

There is provided an insulator target which, when mounted on a sputtering apparatus and supplied with AC power, is capable of preventing the discharging from occurring in a clearance between a shield and the target. The insulator target for the sputtering apparatus according to this invention, around which is disposed a shield at the time of assembling the insulator target on the sputtering apparatus, is made up of: a plate-shaped target material to be enclosed by the shield; and, suppose that one surface of the target material is defined as a sputtering surface to be subjected to sputtering, an annular supporting material coupled to an outer peripheral portion of the opposite surface of the target material. The supporting material has an extended portion which is extended outward from a peripheral surface of the target material and which keeps a predetermined clearance to the shield.

Methods and apparatus for processing a substrate are disclosed herein. In some embodiments, a process chamber includes: a chamber body defining an interior volume; a substrate support to support a substrate within the interior volume; a plurality of cathodes coupled to the chamber body and having a corresponding plurality of targets to be sputtered onto the substrate; and a shield rotatably coupled to an upper portion of the chamber body and having at least one hole to expose at least one of the plurality of targets to be sputtered and at least one pocket disposed in a backside of the shield to accommodate and cover at least another one of the plurality of targets not to be sputtered, wherein the shield is configured to rotate about and linearly move along a central axis of the process chamber.

In an ozone generating system which performs intermittent operation, that is, an operation in an ozone generating operation period in which ozone is generated by discharging gas including oxygen at a discharge electrode part and an operation in an ozone generating operation standby period in which ozone is not generated by stopping discharge are alternately repeated, a gas circulating device which circulates gas in the ozone generating apparatus and removes at least nitric acid from the gas which is circulated is connected to the ozone generating apparatus.

Methods and apparatus for processing substrates are provided herein. In some embodiments, a physical vapor deposition chamber includes a first RF power supply having a first base frequency and coupled to one of a target or a substrate support; and a second RF power supply having a second base frequency and coupled to one of the target or the substrate support, wherein the first and second base frequencies are integral multiples of each other, wherein the second base frequency is modified to an offset second base frequency that is not an integral multiple of the first base frequency.

A film formation apparatus and a film-formed workpiece manufacturing method which are capable of forming a film with a uniform thickness on a workpiece like a three-dimensional object that includes a plurality of surfaces by a simple structure are provided. A film formation apparatus includes a target 21 that is a film formation material including a plane SU3, a power supply unit 3 applying power to the target 21, a rotating unit 4 rotating a workpiece W that is a film formation object around a rotation axis AX1, and a revolving unit 5 revolving the rotating unit 4 around a revolution axis AX2 separate from the rotation axis AX1 to repeatedly make the workpiece W to come close to and move apart from the target 21.