An improved building roof tile for a sloping roof including a polyurethane foam tile that includes outer coating layers that are made of a uniquely fire resistant or retardant layered system that includes a first outer fire resistant layer of 100% solid aliphatic polyurea material and a second inner layer of an 100% solid intumescent non-halogenated phosphate material, said inner layer forming a fire blocking partition and said outer layer offering UV protection, featherweight, category 5 hurricane proof, yields a high R-value, offer low thermal transference into attic space, will retrofit any sloped roof without structural build-up, can be molded into single or triple units, cannot break under foot or when extreme pressures are applied, can produce upgradable solar energy, is easy to transport and install and can molded to look like slate, wood, flat roll tile or most other historical tiles.

Disclosed is an operating-fixed-operating window with a common frame. The window frame includes a sill with a sill lock and sill tower upwardly extending from the sill. The window frame also includes a head disposed atop the window frame, at least one jamb and at least one operating window frame. The window also includes at least one fixed window frame with a sill cover disposed atop the sill, the sill cover engaged with the sill lock and the sill tower.

A method and device are presented that creates a channel adjacent a nailing flange of a window in between the window and the rough opening that receives the window. The channel is created by establishing a barrier that prevents foam insulation inserted into the space between the window and the rough opening from reaching the nailing flange. The channel then ensures proper drainage of water that enters the window cavity down to the window sill. A gasket is presented that can be attached to the window or the rough opening to create the barrier. Alternatively, a disintegrating object or a wicking object can be used to impede the flow of insulation foam and to create the appropriate channel. The present invention is equally applicable to doors or other framed objects received into the exterior shell of a building.

The window assembly uses a releasable press fit frame connection. The window assembly includes a window pane sandwiched between a pair of frame halves that are press fit together by the engagement of a plurality of corresponding male and female connectors integrally formed into the frame halves. The corresponding male and female connectors are spaced apart around the perimeter of frame halves and hold the window assembly within the window openings cut in the wall or door panels. The window assembly of this invention also includes a release key that allows the frame halves to be taken apart. The release key is manually inserted through thin slots formed in the frame halves to disengage the connection between corresponding male connectors and female connectors.

The present invention provides in one aspect for a bracket for use with insulated forms for concrete walls. The bracket has an attachment plate for overlying the exterior of the insulated form to provide for a means of attaching the header or rim joist to the bracket. The bracket is provided an anchoring plate extending from the attaching plate for insertion into the interior of the insulated form. The present invention also provides for a method of attaching a header or rim joist to a concrete wall formed using insulated forms. The method involves cutting a vertical slot in the insulated form and inserting a bracket into the slot. The bracket has an attachment plate for overlying the exterior surface of the insulated form and an anchoring plate extending from the attachment plate through the slot into the interior of the insulated form. Concrete is poured into the form and allowed to set, after which the header or rim joist is attached to the brackets.

A prefabricated wall panel includes molds for casting reinforced concrete (RC) elements. The prefabricated wall panel includes foam boards, foam glass panels fixed to the foam boards, fabric mesh fixed to the foam glass panels, wire mesh fixed to the fabric mesh, and an exterior wall finish fixed to the wire mesh. Spaces defined by the foam boards and the foam glass panels form the molds for casting RC columns and beams.

The invention relates to a prefabricated construction element (1) having a permanent form, such as a longitudinal beam or a panel, consisting of two parallel plates that are formed, through molding and spaced apart from each other, from a hydraulic mixture such as concrete and from a built-in metal reinforcement, said plates being separated by an insulating block and connected together by transverse spacers (not shown), characterized in that said construction element (1) comprises consecutive prepositioning and bottom (6, 7) and/or top (8, 9) linking means, said bottom means (6, 7) consisting of a metal male connector (6) secured to the metal reinforcement of a first element (1) and arranged at the end of the bottom portion of said first element, and a metal female connector (7) secured to said metal reinforcement of a consecutive second element and arranged at the end of the bottom portion of said second element, the relative positioning of the male connector (6) and female connector (7) being such that said connectors can be connected together when the two consecutive elements (1) are assembled.

A suspended ceiling system for a building structure includes a plurality of parallel struts for supporting a plurality of parallel vanes suspended from the struts in perpendicular relationship thereto. The vanes can be suspended in downwardly spaced relationship to the struts or in contiguous relationship therewith and occur in different forms including illuminated vanes, adjustable vanes and the like.

This specification describes a tray substrate for tile flooring that can be used in narrow grout line modular floating tile assemblies. The tray is preferably made of plastic and has vertical tray edges around the top of the tray substrate with upward and downward tabs protruding from the sides of the tray substrate wherein some of the tabs are at least partially recessed under the surface of the tray.

A corner block has spaced-apart front and rear sections interconnected by two spaced-apart side sections that jointly define an internal cavity. Upper protrusions are provided on the top face of the block, and inner protrusions are provided inside the cavity at the bottom of the block. The upper and inner protrusions are configured and arranged relative to one another so that when two corner blocks are stacked one atop another with one block rotated 90° relative to the other, the upper protrusions of the lower block interlock with the inner protrusions of the upper block to interlock the two blocks. The corner blocks are constructed in two variants, a corner block A and a corner block B, which are mirror images of each other. The corner blocks A and B are alternately stacked upon one another to construct a 90° corner of a segmental wall structure.

The present subject matter is directed to a lattice tower covering and/or assembly for a wind turbine. The lattice tower assembly includes a plurality of structural members connected together to define an open lattice tower. The structural members include a plurality of supports, a plurality of inner cross-support members, and a plurality of outer cross-support members. The inner and outer cross-support members are connected between the supports so as to define one or more openings. The lattice tower covering includes one or more panel elements. Each of the panel elements are retained in position between the supports and cover at least a portion of one or more of the openings. Further, the lattice tower covering has a surface area defined by the plurality of supports and the one or more panel elements.

A dovetail anchoring system for cavity walls is disclosed and includes a sheetmetal dovetail anchor and one-piece sheetmetal dovetail veneer tie. The anchoring system is used in conjunction with building structures that have a masonry outer wythe anchored to a poured masonry inner wythe. A thermally-isolating coating is optionally applied to the high-strength veneer tie, which is interconnected with the wall anchor. The thermally-isolating coating is selected from a distinct grouping of materials, that are applied using a specific variety of methods, in one or more layers and cured and cross-linked to provide high-strength adhesion. The thermally-coated veneer ties provide an in-cavity thermal break that severs the thermal threads running throughout the cavity wall structure, reducing the U- and K-values of the anchoring system by thermally-isolating the metal components.

Thermally-isolating wall anchors and reinforcement devices and anchoring systems employing the same are disclosed for use in masonry cavity walls. A thermally-isolating coating is applied to the wall anchor, which is interconnected with a wire formative veneer tie. The thermally-isolating coating is selected from a distinct grouping of materials, that are applied using a specific variety of methods, in one or more layers and cured and cross-linked to provide high-strength adhesion. The thermally-coated wall anchors provide an in-cavity thermal break that severs the thermal threads running throughout the cavity wall structure, reducing the U- and K-values of the anchoring system by thermally-isolating the metal components.

The invention concerns a half shell element (10) for the production of a hollow body with an identical further half shell element (10), with at least one guide (20 . . . 20'″) for the further element (10), which is constructed in the region of a first half periphery (11) of its encircling edge (12), so that the further element (10) can be pushed onto the half shell element (10) from the second half periphery (11') of the edge (12) lying opposite this first half periphery (11) and guided on the edge (12) and held in a final position. The hollow bodies which are thus produced can be both inserted into steel cages and also connected with each other via bars and built into concrete layers.

The present invention relates to the administration of warm humidified oxygen to patients suffering with breathing problems. The present invention more specifically relates to the high flow of warm humidified oxygen to patients suffering with breathing problems or suffering with asthma.

The present disclosure provides devices for preventing or absorbing fluid (e.g., sweat) and/or odors from the intergluteal cleft of a subject. In some embodiments, the present disclosure provides devices for treating or preventing hemorrhoids and methods of using same.

A method of forming oral orthotic systems includes providing an upper dental member adapted to be placed in connection with upper dentition of the patient, providing a lower dental member adapted to be placed in connection with lower dentition of the patient and providing a plurality of posterior mounting structures. Each of the posterior mounting structure is configured to be attached to one of the upper dental member or the lower dental member at a posterior, buccal position thereon. Force may be applied to the mandible of the patient via at least one of a plurality of different types mechanisms via attachment of a component of a selected type mechanism to at least one of the posterior mounting structures.

In certain example embodiments, a system and/or method of guiding transitions between therapy modes in connection with the treatment and/or diagnosis of a patient for a respiratory disorder is/are provided. Respiratory disorder treatment according to a first therapy mode is provided. Input indicating a second therapy mode to be transitioned to following provision of the first therapy mode is received, with the second therapy mode being different from the first therapy mode. At least one default treatment parameter suitable for the second therapy mode is assigned or calculated. Each default treatment parameter of the second therapy mode is presented, with each default treatment parameter being adjustable by an operator during the presenting. Transitioning from the first therapy mode to the second therapy mode is performed by providing respiratory disorder treatment in accordance with the second therapy mode and each default treatment parameter and any adjustments made thereto prior to the transitioning. Advantageously, the chances of a patient being disturbed by transitioning from mode-to-mode are reduced.

A patient interface assembly having an improved support for use in securing a patient interface device to the head of a patient overcomes the shortcomings of conventional headgear. The improved support provides a self-adjusting anchor point situated anterior to the ear of the patient that provides enhanced stability in mounting the patient interface device to the patient.

An umbilical system for sourcing and delivering within a flexible protective covering, a plurality of different breathing gasses, safety tether, a plurality of ancillary lines for remotely distributable, documentable, multidirectional, multi-format data/communications acquisition and delivery, personal/situational awareness and ancillary power sources for tool, accessory or device enervation, to a plurality of Users in an adverse environment.

An oral-nasal cannula receives exhaled gases from the nose and mouth of a patient. The exhaled gases are transported to variable flow valves that can variably restrict the flow of the gases through the valves upon software generated signals. The exhaled gases pass through the variable flow valves and mix so that they can be measured by a single sensor such as a sensor of a capnometer. Based upon information gathered by the capnometer, the variable valves can be adjusted in real-time according to a software method in order to identify a variable valve flow configuration that maximizes the amount of CO2 received and measured by the capnometer. In this manner, the software can adapt a single capnometer to measure exhaled gases regardless of whether a patient breathes primarily through their nose or mouth or some proportion of the two.

A smart oronasal mask for a positive-airway-pressure device includes a mask body and a temperature sensor. The mask body has an air inlet and an air outlet. The temperature sensor is deposited in the mask body and located between the air inlet and the air outlet for sensing a temperature of a mixture formed by gas entering the mask body through the air inlet of the mask body and gas entering the mask body through the air outlet of the mask body. Then the positive airway pressure device adjusts air feed according to the temperature sensed by the temperature sensor in a real-time manner, so as to help keep a patient's respiratory tract clear.

Methods, systems, and apparatuses are described that indicate an amount at which various gas flow rates should be manually adjusted in order to achieve targeted total flow rates and concentration levels.

Systems, methods, and devices are disclosed for humidifying a breathing gas that reduces and/or eliminates the dangers and discomforts experienced by a patient. In one aspect, a system for humidifying gases includes a body, extending along a first axis from a first face to a second face, a first lumen at the first face, through which fluid enters the body, a second lumen at the first face through which fluid exits the body and a nonporous membrane located inside the body and extending from the first face to the second face wherein gas moving through the nonporous membrane is humidified by the fluid.

A method of manufacturing and an antenna having an upper and lower loop. Upper loop comprising a first conductive loop defined by an upper conductor and a first conductive blade tapering outwardly to form a flare portion adjacent a distal end of the upper conductor. Lower loop comprising a second conductive loop defined by a base conductor and a second conductive blade tapering outwardly forming a flare portion adjacent a distal end of the base conductor. First and second conductive blades defining, between their facing edges, a notch opening outwardly from a feed region. Upper loop further comprising an elongate conductive vane extending at an angle from a first location on the upper conductor to a second location on the first conductive blade defining a pair of loops within the upper loop.

A wide band antenna comprising a signal generator coupled to a feed region of at least one antenna element comprising upper and lower loops. Upper loop comprising a first conductive loop element defined by an upper conductor and a first conductive blade tapering outwardly forming a flare portion adjacent a distal end of the upper conductor. Lower loop comprising a second loop defined by a base conductor and a second conductive blade tapering outwardly forming a flare portion adjacent a distal end of the base conductor, first and second conductive blades defining, between their facing edges, a notch opening outwardly from feed region. The method comprising matching an antenna element impedance to the transmission line; selecting an antenna element cut-off frequency; selecting an upper conductor length, and subsequently selecting dimensions of the upper loop such that they are substantially equal to a wavelength corresponding to the selected cut-off frequency.

Aspects of the subject disclosure may include, for example, an antenna structure having a feed point for coupling to a dielectric core of a cable that propagates electromagnetic waves without an electrical return path, and a dielectric antenna, substantially or entirely devoid of conductive external surfaces, coupled to the feed point, the dielectric antenna facilitating receipt, at the feed point, the electromagnetic waves for propagating the electromagnetic waves to an aperture of the dielectric antenna for radiating a wireless signal. Other embodiments are disclosed.

Aspects of the subject disclosure may include, for example, a transmission device that includes a transmitter that generates a first electromagnetic wave to convey data. A coupler couples the first electromagnetic wave to a single wire transmission medium having an outer surface, to forming a second electromagnetic wave that is guided to propagate along the outer surface of the single wire transmission medium via at least one guided wave mode that includes an asymmetric or non-fundamental mode having a lower cutoff frequency. A carrier frequency of the second electromagnetic wave is selected to be within a limited range of the lower cutoff frequency, so that a majority of the electric field is concentrated within a distance from the outer surface that is less than half the largest cross sectional dimension of the single wire transmission medium, and/or to reduce propagation loss. Other embodiments are disclosed.

A 2×2 MIMO array antenna is provided which includes two separate radiating elements mounted to an antenna reflector. Each element is linear polarized with two orthogonal polarizations, one polarization excited by a transmit port and the other polarization receiving radiated signals destined for a receive port. The two elements are aligned that the polarizations excited by the transmit ports of the two elements are along a common axis, or the polarizations received by the receive ports of the two elements are along a common axis.

Embodiments described herein generally relate to phased array antenna systems or packages and techniques of making and using the systems and packages. A phased array antenna package may include a distributed phased array antenna comprising (1) a plurality of antenna sub-arrays, which may each include a plurality of antennas, (2) a plurality of Radio Frequency Dies (RFDs), each of the RFDs located proximate and electrically coupled by a trace of a plurality of traces to a corresponding antenna sub-array of the plurality of antenna sub-arrays, and (3) wherein each trace of the plurality of traces configured to electrically couple an antenna of the plurality of antennas to the RFD located proximate the antenna, wherein each trace of the plurality of traces is configured to transmit millimeter wave (mm-wave) radio signals, and wherein the plurality of traces are each of a substantially uniform length.

Reconfigurable antennas in an ad-hoc network are provided where all nodes employ MIMO/SIMO/MISO communication techniques. Three types of reconfigurable antennas: Reconfigurable Printed Dipole Array (RPDA), Reconfigurable Circular Patch Antenna (RCPA) and Two-Port Reconfigurable CRLH Leaky Wave Antennas are used. The RPDA, RCPA and the CRLH Leaky Wave antennas have a different number of configurations as well as different degrees of pattern diversity between possible configurations. To effectively use these antennas in a network, the performance of centralized and decentralized antenna configuration selection schemes are quantified for reconfiguration at one or both link ends. The sum capacity of the network is used as a metric to quantify the performance of these antennas in measured and simulated network channels.

The present invention relates to an RF tag comprising a magnetic antenna for transmitting and receiving information using an electromagnetic induction method, and an IC mounted to the magnetic antenna, wherein the magnetic antenna comprises a magnetic core and a plurality of coils formed on the magnetic core; the coils each have an inductance L1 satisfying the specific relational formula, and are connected in parallel to each other in an electric circuit and disposed in series on the magnetic core; and a combined inductance L0 of the magnetic antenna satisfies the specific relational formula. The RF tag of the present invention is used as a magnetic antenna for information communication using a magnetic field component which is capable of satisfying both reduction in size and improvement in communication sensitivity.

An antenna having a passive antenna element that is integrated in a wireless communication chassis, is naturally in resonance, and is galvanically coupled to ground, and a passive indirect antenna element feed that is non-galvanically coupled to the antenna element. If the chassis is foldable, a parasitic element may be located opposite an antenna element feed when the foldable chassis is in at least one of a closed mode and a tablet mode.

A transmission apparatus includes a first metal plate including a first surface, a second surface opposite to the first surface, and a first through hole penetrating from the first surface to the second surface, the first metal plate; a first board being disposed on the first surface side of the first metal plate, the first board including a first patch antenna positioned inside the first through hole; and a second board being disposed on the second surface side of the first metal plate, the second board including a second patch antenna positioned inside the first through hole and opposed to the first patch antenna, wherein an interval between the first patch antenna and the second patch antenna is set in accordance with a distance for wireless communicating between the first patch antenna and the second patch antenna in a near field.

A broadband quadruple helical circularly-polarized antenna for receiving GNSS signals comprises an excitation circuit and a set of quadruple spiral elements. Each quadruple spiral element consists of four conductors. Each conductor is a one spiral turn of the quadruple spiral element. Said conductors have equal winding angle. The winding angle of all conductors does not change in the same quadruple spiral element. Conductors of neighboring (longitudinally) quadruple spiral elements have different winding angles. The antenna provides a sharp drop in AP at angles near the horizon and a small AP level in the lower hemisphere.

An antenna system including: a metal base plate; an antenna element arranged on and extending away from the front side of the base plate; a circuit board including a ground plane, adjacent to, and in thermal contact with the base plate; a plurality of electrical components on the circuit board including a power amplifier and an I/O connector; a metal support plate separated from, parallel to, and facing the base plate, with the circuit board located between the base and support plates; a plurality of thermally conductive standoffs thermally connecting the base plate to the support plate; and a master board including an I/O connector mating with the I/O connector on the circuit board and electrically connecting the circuit board to the master board, the master board located between the circuit board and the support plate and including signal paths for routing signals to the circuit board.

Disclosed herein is a method and system for using ferrite cores to suppress harmonic radiation with microstrip patch antennas. In certain embodiments, the ferrites cores exemplified herein significantly suppressed second and third harmonic radiation generated by RF components coupled to the microstrip patch antenna.

A waveguide device includes a first electrically conductive member having a first electrically conductive surface; a second electrically conductive member having a second electrically conductive surface which opposes the first electrically conductive surface; and a ridge-shaped waveguide member on the second electrically conductive member. The second electrically conductive member has a throughhole which splits the waveguide member into first and second ridges. The first and second ridges each have an electrically conductive end face, the end faces opposing each other via the throughhole. The opposing end faces and the throughhole together define a hollow waveguide. The hollow waveguide is connected to a first waveguide extending between the waveguide face of the first ridge and the first electrically conductive surface, and to a second waveguide extending between the waveguide face of the second ridge and the second electrically conductive surface.

A slot array antenna includes: a first conductive member having a first conductive surface and a plurality of slots therein, the slots being arrayed in a first direction and in a second direction which intersects the first direction; a second conductive member having a second conductive surface which opposes the first conductive surface; a plurality of waveguide members arrayed between the first and second conductive members along a direction which intersects the first direction, each waveguide member having an conductive waveguide face which extends along the first direction so as to oppose at least one of the slots; and an artificial magnetic conductor in a subregion which is within a region between the first and second conductive members but outside of a subregion containing the waveguide members. Neither an electric wall nor an artificial magnetic conductor exists in a space between two adjacent waveguide faces among the waveguide members.

A multiplexer structure includes a passive substrate. The multiplexer structure may also include a high band filter on the passive substrate. The high band filter may include a 2D planar spiral inductor(s) on the passive substrate. The multiplexer structure may further include a low band filter on the passive substrate. The low band filter may include a 3D through-substrate inductor and a first capacitor(s) on the passive substrate. The multiplexer structure may also include a through substrate via(s) coupling the high band filter and the low band filter.

An optical system (110) includes a lens unit (112) with a plurality of lenses. An out-of-focus point spread function of the lens unit (112) includes an annular intensity distribution with at least one ring-shaped side peak at a radial distance to a center point. A birefringent device (115) in an optical path of the optical system (110) is adapted to selectively attenuate the ring-shaped side peak in the out-of-focus point spread function of the lens unit (112).

An LCD with switchable viewing angle includes a first substrate, second substrate, and a liquid crystal layer. The first substrate is provided with a first electrode and a second electrode. In an embodiment, the first electrode is a pixel electrode, and the second electrode is a common electrode. The second substrate is provided with a third electrode. Liquid crystal molecules in the liquid crystal layer are positive liquid crystal molecules. When a first bias voltage is applied to the third electrode, the LCD is displayed with a wide viewing angle; and when a second bias voltage greater than the first bias voltage is applied to the third electrode, the LCD is displayed with a narrow viewing angle.

A deskew display panel is disclosed in present invention. The deskew display panel includes a plurality of data lines arranged in a column direction, a plurality of scanning lines perpendicular to the column direction and intersecting the data lines; a sub-pixel array including a plurality of sub-pixels arranged in array, each sub-pixel including a transistor and disposed between any two neighboring scanning lines and any two neighboring data lines; the scanning lines disposed in the sub-pixel array and parallel to each other; sub-pixels in each row including a plurality of sub-pixel sets, each sub-pixel set including two sub-pixels, the sub-pixel including the transistor, gates of the transistors connected to two neighboring scanning lines respectively, sources of the transistors connected to the same data line, and drains of the transistors connected to a liquid crystal capacitor and a storage capacitor.

A display of an electric device includes a plurality of separated transparent electrode blocks, which are configured to provide one or more of supplemental features such as touch recognition. Signal paths between the transparent electrode blocks and the driver for the supplemental feature are implemented with a plurality of conductive lines placed under positioned under one or more planarization layers. The conductive lines implementing the signal paths are routed across the display area, directly toward a non-display area where drive-integrated circuits are located.

A process train for a floating production storage and offloading installation includes a crude oil storage tank that is equipped with at least one set of electrostatic internals arranged to provide a treatment flow path isolated from a surrounding volume of the electrostatic separator section of the tank. An oil-and-water stream or mixture entering the set of electrostatic internals travels along the treatment flow path and is subjected to an electric field. The treatment flow path is in an upwardly direction toward the oil outlet section and in a downwardly opposite direction toward the water outlet section of the tank. Employing electrostatic internals within the tank permits an allowable inlet water content into the tank of up to 80%, significantly reducing the required topside processing equipment.

Microfluidic devices having an electrowetting configuration and an optimized droplet actuation surface are provided. The devices include a conductive substrate having a dielectric layer, a hydrophobic layer covalently bonded to the dielectric layer, and a first electrode electrically coupled to the dielectric layer and configured to be connected to a voltage source. The microfluidic devices also include a second electrode, optionally included in a cover, configured to be connected to the voltage source. The hydrophobic layer features self-associating molecules covalently bonded to a surface of the dielectric layer in a manner that produces a densely-packed monolayer that resists intercalation and or penetration by polar molecules or species. Also provided are microfluidic devices having an electrowetting configuration that further include a section or module having a dielectrophoresis configuration; systems that include any of the microfluidic devices in combination with an aqueous droplet and a fluidic medium immiscible with the medium of the aqueous droplet; related kits; and methods of manipulating droplets, optionally containing micro-objects such as biological cells, within the microfluidic devices.

Electrolytic liquid generating device (1) includes laminated body (41) in which conductive film (46) is laminated to be interposed between mutually adjacent electrodes (44, 45), and electrolytic part (40) which electrolyzes liquid. Furthermore, electrolytic liquid generating device (1) includes a passage having inflow port (71) in which liquid to be provided to electrolytic part (40) flows and outflow port (72) from which electrolytic liquid generated in electrolytic part (40) flows out. The passage is formed such that liquid flowing direction (X) crosses laminated direction (Z) of laminated body (41).

A system and method for dehydrating crude oil on a floating production storage and offloading installation include a separator vessel to receive an incoming produced water stream, followed by a flash vessel, a treatment block, a crude oil storage tank, and an electrostatic treater. The treatment block includes a low pressure degasser followed by a compact electrostatic separator pre-treater or a compact electrostatic separator pre-treater followed by a low pressure degasser. The flash vessel and/or the low pressure degasser may employ an inlet cyclonic distributor and demisting cyclones, while the electrostatic treater may employ DUAL FREQUENCY® technology. The separator vessel may be a single horizontal two-phase separator/degasser or two vertical two-phase separator/degassers that operate in parallel with each receiving approximately 50 percent of the incoming produced water stream. The final outlet stream preferably contains no more than 0.5 BS&W and 285 milligrams per liter salt.

A magnetically enhanced low temperature high density plasma chemical vapor deposition (LT-HDP-CVD) source has a hollow cathode target and an anode, which form a gap. A cathode target magnet assembly forms magnetic field lines substantially perpendicular to the cathode surface. A gap magnet assembly forms a magnetic field in the gap that is coupled with the cathode target magnetic field. The magnetic field lines cross the pole piece electrode positioned in the gap. The pole piece is isolated from ground and can be connected to a voltage power supply. The pole piece can have negative, positive, floating, or RF electrical potentials. By controlling the duration, value, and sign of the electric potential on the pole piece, plasma ionization can be controlled. Feed gas flows through the gap between the hollow cathode and anode. The cathode can be connected to a pulse power or RF power supply, or cathode can be connected to both power supplies. The cathode target and substrate can be inductively grounded.

Methods and apparatus for processing substrates are provided herein. In some embodiments, a physical vapor deposition chamber includes a first RF power supply having a first base frequency and coupled to one of a target or a substrate support; and a second RF power supply having a second base frequency and coupled to one of the target or the substrate support, wherein the first and second base frequencies are integral multiples of each other, wherein the second base frequency is modified to an offset second base frequency that is not an integral multiple of the first base frequency.