m

HYDRAULIC DRIVE SYSTEM FOR OPERATION TABLE

A hydraulic drive system includes an oil supply device, an oil return device and a hydraulic cylinder circuit component. The circuit component includes a hydraulic cylinder, a first and a second two-position two-way electromagnetic directional valves. The cylinder includes a first chamber and a second chamber that has a piston rod. A first port of the first valve connects with the first chamber and a first port of the second valve connects with the second chamber. When the oil supply device connects to a second port of the first valve and a second port of the second valve connects to the oil return device, the piston rod is extended outwards. When the oil supply device connects to the second port of the second valve and the second port of the first valve connects to the oil return device, the piston rod is retracted.




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METHOD OF CONTROLLING VELOCITY OF A HYDRAULIC ACTUATOR IN OVER-CENTER LINKAGE SYSTEMS

An electro-hydraulic actuation system includes a regeneration valve in fluid communication with a first fluid chamber and a second fluid chamber of a hydraulic actuator, and a dump valve is in fluid communication with the second fluid chamber and a fluid reservoir. A pump provides a flow of fluid to the first and second fluid chambers, a displacement of the pump controlling a velocity of the actuator during motion in the retraction and extension directions. An electric motor drives the pump, and a controller controls a state of the regeneration valve and the dump valve. At least one feedback device senses a system condition and provides a respective feedback signal indicative of the sensed system condition to the controller, the controller responsive to the feedback signal to determine an occurrence of an over-center load condition and control a state of the regeneration valve and the dump valve in response to the occurrence to maintain the velocity of the actuator.




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COMBUSTOR PANELS HAVING ANGLED RAIL

A combustor of a gas turbine engine including a combustor shell having an interior surface defining a combustion chamber, a first panel mounted to the interior surface at a first position, the first panel having a first surface and a first rail extending from the first surface toward the combustor shell, the first rail configured at a first angle relative to the first surface, and a second panel mounted to the interior surface at a second position axially adjacent to the first panel, the second panel having a second surface and a second rail extending from the second surface toward the combustor shell, the second rail configured at a second angle relative to the second surface. The first and second rails are proximal to each other and define a circumferential gap there between and at least one of the first or second angles is an acute angle.




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Fuel Nozzle Assembly Having a Premix Fuel Stabilizer

A fuel nozzle assembly includes a premix chamber, an air flow divider extending radially and axially within the premix chamber between an inner wall and an outer wall and a plurality of guide vanes disposed within the premix chamber. One or more of the guide vanes includes a fuel port in fluid communication with the flow divider. The fuel nozzle assembly further includes a premix plate that extends radially between the inner and outer walls and circumferentially between first and second side walls downstream from the fuel ports. The premix plate includes an upstream side axially spaced from a downstream side and a plurality of passages that provide for fluid flow from the premix chamber through the premix plate.




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System for Injecting a Liquid Fuel into a Combustion Gas Flow Field

A system for injecting a liquid fuel into a combustion gas flow field includes an annular liner that defines a combustion gas flow path. The annular liner includes an inner wall, an outer wall and a fuel injector opening that extends through the inner wall and the outer wall. The system further includes a gas fuel injector that is coaxially aligned with the fuel injector opening. The gas fuel injector includes an upstream end and a downstream end. The downstream end terminates substantially adjacent to the inner wall. A dilution air passage is at least partially defined by the gas fuel injector. A liquid fuel injector extends partially through the dilution air passage. The liquid fuel injector includes an injection end that terminates upstream from the inner wall.




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LABEL MANUFACTURING METHOD AND LABEL

A label manufacturing method including: applying an adhesive to a base sheet to form an adhesive layer; applying an acrylate-based bonding adhesive to part of the adhesive layer to cure the adhesive layer so as to form a cured portion; and cutting the cured portion to define labels. A label having an adhesive layer 12 laminated on a base sheet 13. A part of the adhesive layer 12 is cured to form a cured portion 14, wherein the cured portion 14 is cured by an acrylate-based bonding adhesive for enabling cutting labels off the laminated base sheet.




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ADHESIVE SYSTEM AND USE OF THE SAME

An adhesive system which includes a layer of a first adhesive overlaid and joined to a layer of a second adhesive. The layer of first adhesive and the layer of second adhesive are preferably joined by being fixed to opposite surfaces of a planar carrier element. The carrier element is preferably a high heat resistant plastics film. In one form of the invention the plastics film is PET.




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BUILDING MEMBRANE WITH POROUS PRESSURE SENSITIVE ADHESIVE

A breatheable multilayer spun bonded polypropylene membrane having a coated pressure sensitive adhesive capable of allowing air and moisture vapor to pass through it. The adhesive is formed of a copolymer comprising a backbone of n-butyl acrylate, 2-ethylhexyl acrylate, and vinyl acetate which is mixed with a surfactant and emulsified to produce bubbles which form pores when the copolymer is set with about 80% to about 90% of the pore sizes ranging from about 200 microns to about 300 microns and a pore density in the cured pressure sensitive adhesive ranging from about 4200 per inch2 to about 4600 per inch2, said pores being uniformly distributed to form a flow path through adhesive.




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FLUID ACTIVATABLE ADHESIVES FOR GLUE-FREE, LINER-FREE, LABELS FOR GLASS AND PLASTIC SUBSTRATES AND METHODS OF USE THEREOF

A fluid activatable adhesive for a liner-free label and methods of using are described. Preferably, the adhesive composition includes a polymer, such as an emulsion polymer formed from monomers selected from the group consisting of butyl acrylate, 2-ethylhexyl acrylate, methyl acrylate, 2-acrylamido-2-methylpropane sulfonic acid (AMPS), a salt of AMPS, such as its sodium salt, styrene, and combinations thereof. The adhesive composition adheres to the liner-free label to the surface of a substrate that is at room temperature, at room temperature and wet, cold, or cold and wet. In preferred embodiments, the substrate is glass or plastic, such as polyethylene terephthalate.




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Acrylate-Terminated Urethane Polybutadienes From Low-Monomer 1:1 Monoadducts From Reactive Olefinic Compounds and Diisocyanates and Hydroxy-Terminated Polybutadienes for Liquid Optically Clear Adhesives (LOCAs)

The present invention relates to an optical clear resin and a method for producing a liquid optical clear photo-curable adhesive.




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ACCELERATE CURE OF MOISTURE CURABLE POLYURETHANE ADHESIVE COMPOSITIONS USEFUL FOR BONDING GLASS

The adhesive system of the invention is especially useful in bonding replacement windows into vehicles. They allow for sufficient working time while still realizing a fast drive away time. The adhesive system is comprised of a moisture curable adhesive and a cure accelerator that may be applied using a simple single caulk gun and may be applied at ambient temperatures such as −10° C. and about 45° C. The cure accelerator is comprised of a polyol having a backbone that has at least one amine in the backbone. The moisture curable adhesive typically is comprised of an isocyanate terminated prepolymer.




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USE OF A BITUMINOUS COMPOSITION AS AN ADHESIVE BINDER

A bituminous composition is used as an adhesive binder. The bituminous composition has at least one acidic additive of general formula (I): R—(COOH)z in which R is a linear or branched, saturated or unsaturated hydrocarbon-based chain having from 4 to 68 carbon atoms, preferably from 4 to 54 carbon atoms, more preferentially from 4 to 36 carbon atoms and z is an integer ranging from 1 to 4, preferably from 2 to 4.




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Methods and Apparatuses for Selective Chemical Etching

Methods, apparatuses and systems are disclosed for chemically etching parts by generating an enclosed chemical etching chamber in contact with a part surface and directing a flow of chemical etchant solution in contact with a part region to be etched.




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METHOD OF PRODUCING SCENTED TISSUE PAPER PRODUCT

To provide a method of producing scented tissue paper. The problem is solved by performing shrink wrapping in which a tissue paper housing obtained by carrying fragrance-containing microcapsules on an inner surface of a housing box using a binder is covered with a shrink film and the shrink film is exposed to hot air W so as to be attached to the tissue paper housing, causing the fragrance-containing microcapsules to be detached from the binder by heating the tissue paper housing at the time of the shrink wrapping, and providing the scent for plural sheets of tissue papers.




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METHOD FOR LINING A PIPE

A pipe lining material impregnated with a thermosetting resin is inserted into a pipe and the thermosetting resin impregnated therein is cured to line the pipe with the pipe lining material. A circulation pump is used to circulate water in a water tank to a boiler to heat the water into hot water. The hot water is pumped using a spraying pump and sprayed on the pipe lining material to cure the thermosetting resin impregnated therein. After the thermosetting resin has been cured, the hot water pumped using the circulation pump is circulated to a cooler to cool the hot water into cool water, which is sprayed on the cured thermosetting resin to cool it. The sprayed hot or cool water that remains inside the lined pipe is returned to the water tank for circulation to the boiler or the cooler.




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UPPER ELECTRODE FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS HAVING THE SAME

An upper electrode for a plasma processing apparatus includes a body portion having a plurality of through-holes, a showerhead disposed below the body portion and having a plurality of jet holes connected to the plurality of through-holes, and a buffer layer interposed between the body portion and the showerhead.




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PLASMA PROCESSING APPARATUS AND METHOD THEREFOR

A dry etching apparatus plasma processes a wafer held by a carrier having a frame and an holding sheet. The carrier is placed on an electrode unit of a stage provided in a chamber. The electrode unit is cooled by a cooling section configured to cool the electrode unit. An upper face of the electrode unit is at least as large as the back side of the carrier. The holding sheet and the frame are cooled effectively by the heat transfer to the stage.




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SURFACE MACHINING METHOD FOR SINGLE CRYSTAL SIC SUBSTRATE, MANUFACTURING METHOD THEREOF, AND GRINDING PLATE FOR SURFACE MACHINING SINGLE CRYSTAL SIC SUBSTRATE

A surface machining method for a single crystal SiC substrate, including: a step of mounting a grinding plate which includes a soft pad and a hard pad sequentially attached onto a base metal having a flat surface, a step of generating an oxidation product by using the grinding plate, and a step of grinding the surface while removing the oxidation product, wherein abrasive grains made of at least one metallic oxide that is softer than single crystal SiC and has a bandgap are fixed to the surface of the hard pad.




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Substrate Chuck and Substrate Bonding System Including the Same

Provided are a substrate chuck and a substrate bonding system including the substrate chuck. The substrate bonding system includes a lower substrate chuck and an upper substrate chuck disposed on the lower substrate chuck. The lower substrate chuck has a non-flat lower substrate contact surface, and the upper substrate chuck has a flat upper substrate contact surface.




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ADHESIVE FOR SOLAR-CELL BACK SHEET, POLYOL COMPOSITION FOR SOLAR-CELL BACK SHEET ADHESIVE, SOLAR-CELL BACK SHEET, AND SOLAR CELL MODULE

There are provided an adhesive for a solar-cell back sheet having an excellent curing rate and being capable of exhibiting excellent adhesive performance by short-term aging, and also a polyol composition used for the adhesive, a solar-cell back sheet using the adhesive, and a solar-cell module using the sheet. The adhesive for a solar-cell back sheet contains, as essential components, at least one hydroxyl group-containing resin (A) selected from a polyester polyurethane polyol (A1), a polyester polyol (A2), a hydroxyl group-containing (meth)acrylic resin (A3), and a hydroxyl group-containing fluorocarbon resin (A4), a polyisocyanate (B), and a cyclic amide compound (C).




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METHOD OF FORMING A PATTERN USING ION BEAMS OF BILATERAL SYMMETRY, A METHOD OF FORMING A MAGNETIC MEMORY DEVICE USING THE SAME, AND AN ION BEAM APPARATUS GENERATING ION BEAMS OF BILATERAL SYMMETRY

A pattern-forming method includes providing a first ion beam at a first incidence angle and a second ion beam at a second incidence angle to a surface of an etch target layer formed on a substrate. Patterns are formed by patterning the etch target layer using the first and second ion beams. The first ion beam and the second ion beam are substantially symmetrical to each other with respect to a normal line that is perpendicular to a top surface of the substrate. Each of the first and second incidence angles is greater than 0 degrees and smaller than an angle obtained by subtracting a predetermined angle from 90 degrees.




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BATTERY SEPARATOR PRODUCING METHOD AND BATTERY SEPARATOR PRODUCING APPARATUS

A transfer system includes an expander roll for removing a wrinkle in a separator original sheet, and (i) the expander roll and (ii) a transfer roller immediately followed by or following the expander roll are spaced from each other at a distance of not less than 1 m and not more than 10 m.




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CONDUCTIVE SURFACING MATERIAL FOR COMPOSITE STRUCTURES

An electrically conductive surfacing material capable of providing sufficient conductivity for lightning strike protection (LSP) and/or electromagnetic interference (EMI) shielding is disclosed. The conductive surfacing material is a multi-layered structure having a very thin conductive layer (e.g. solid metal foil) and a resin film formed on at least one surface of the conductive layer. The resin film is formed from a curable resin composition containing an epoxy novolac resin, a tri-functional or tetra-functional epoxy resin, ceramic microspheres, a latent amine-based curing agent, particulate inorganic fillers; and a toughening component. Optionally, the resin film further includes conductive additives to increase electrical conductivity of the surfacing material. The resin film exhibits high Tg as well as high resistance to paint stripper solutions. Furthermore, the conductive surfacing material is suitable for co-curing with fiber-reinforced resin composite substrates.




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PREPREG, LAMINATE, AND METHOD OF PRODUCTION OF PREPREG

A prepreg provided with a first resin layer and a second resin layer which is formed on this first resin layer, wherein the first resin layer is formed by a first resin composition, the second resin layer is a layer which comprises a resin layer which is formed by a second resin composition which is different from the first resin composition and in which a fiber base material is contained, the second resin layer is provided with a fiber base material-containing layer which contains the fiber base material, an A layer which is positioned at an opposite side of the first resin layer side of the fiber base material-containing layer and which does not contain the fiber base material, and a B layer which is positioned at the first resin layer side of the fiber base material-containing layer and which does not contain the fiber base material, and said B layer has a thickness which is smaller than the thickness of the first resin layer, is provided.




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METHOD OF VERIFYING REMOVAL OF A PEEL PLY MATERIAL FROM A COMPOSITE STRUCTURE AND DOPED PEEL PLY ASSEMBLY

A method of verifying removal of peel ply material from a composite structure is provided. The method includes doping a layer of peel ply fabric with an identifier. The method also includes curing the composite structure with the layer of peel ply fabric disposed on a surface of the composite structure. The method further includes removing the layer of peel ply fabric from the surface. The method yet further includes scanning the surface of the composite structure for the identifier.




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ARTICULATING VACUUM PLATE SYSTEM AND RELATED METHOD

An apparatus and related method of utilizing articulating vacuum plates to manipulate a film or polymeric sheet and form a three dimensional article is provided. The apparatus can be in the form of an articulating vacuum plate system which includes one or more plates or mold parts that are configured to support a sheet, constructed for example, from a polymeric film, in a two dimensional configuration or a three dimensional configuration in a first mode. The apparatus is constructed so that the plates and/or mold parts can articulate or move so as to reconfigure the sheet from a generally planar configuration into a second three dimensional configuration in a second mode for further forming, optionally while the plates and/or mold parts apply vacuum to the sheet while the plates and/or mold parts articulate, so that the plates and/or mold parts bend or otherwise manipulate the configuration and shape of the sheet.




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DISCONTINUOUS-FIBER COMPOSITES AND METHODS OF MAKING THE SAME

The invention relates to compositions comprising composite materials comprised of discontinuous fibers and one or more polymers and/or oligomers. The invention relates to methods of making the same. The composite materials can be in the form of compositions, composite sheets, laminates, pellets, and/or shaped composite products.




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METHOD AND DEVICE FOR HEAT SEALING MULTIPLE PLIES OF A LAMINATE

A method and a device for heat sealing multiple plies of a laminate from which gable top packaging can be produced, wherein the laminate has a carrier layer made of electrically non-conductive material and a sealing layer made of thermoplastic material on at least one surface of the laminate. To heat seal multiple plies of a laminate in a high-frequency alternating electric field, the alternating electric field is generated by a first lead of an HF voltage supply in a first sub-region of the sealing region and is generated by a second lead of the HF voltage supply, differing from the first lead, in at least a second sub-region of the sealing region, so that a different heat distribution is obtained over the sub-regions of the sealing region.




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METHOD AND APPARATUS FOR APPLYING A MATERIAL ONTO ARTICLES USING A TRANSFER COMPONENT THAT DEFLECTS ON BOTH SIDES

Apparatuses and methods for applying a transfer material onto the surface of an article are disclosed, including apparatuses and methods of transfer printing on and/or decorating three-dimensional articles, as well as the articles printed and/or decorated thereby. In some cases, the apparatuses and methods involve providing a deposition device, such as a printing device; providing a transfer component; depositing a material onto a portion of the transfer component with the deposition device; modifying the portion of the transfer component with the transfer material thereon to conform the transfer component to at least a portion of the surface of the three-dimensional article; and transferring the transfer material onto the surface of the article.




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METHOD FOR TRANSFERRING MATERIAL WITH ADHESIVE ONTO ARTICLES WITH A DIFFERENCE IN DEGREE OF CURING BETWEEN THE MATERIAL AND ADHESIVE

Apparatuses and methods for applying a transfer material onto the surface of an article are disclosed, including apparatuses and methods of transfer printing on and/or decorating three-dimensional articles, as well as the articles printed and/or decorated thereby. In some cases, the apparatuses and methods involve providing a deposition device, such as a printing device; providing a transfer component; depositing a material onto a portion of the transfer component with the deposition device; modifying the portion of the transfer component with the transfer material thereon to conform the transfer component to at least a portion of the surface of the three-dimensional article; and transferring the transfer material onto the surface of the article.




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METHOD FOR MAKING COMPOSITE STRUCTURE WITH A SURFACING FILM THEREON

A method for making a composite structure with a surfacing film thereon. The surfacing film is co-cured with fiber-reinforced resin composite materials. The surfacing film is formed from a curable resin composition containing an epoxy novolac resin, a tri-functional or tetra-functional epoxy resin, ceramic microspheres, an amine-based curing agent, particulate inorganic fillers; and a toughening component. The surfacing film exhibits high Tg and high cross-linked density after curing, as well as high resistance to paint stripper solutions.




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FILAMENT WINDING APPARATUS

The present invention generally relates to an improved winding apparatus useful in the production of filament wound products and particularly wound tubular products having high length to diameter ratios. The improved winding apparatus comprises a support means for supporting a rotatable mandrel during the manufacture of wound products, the support means comprising a plurality of axially spaced pins extending circumferentially around the mandrel, and a support assembly having a semicircular inner face and an opening, wherein a portion of the plurality of pins is brought into contact with the inner face of the support assembly when the mandrel is rotated.




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DEVICE AND METHOD FOR PRODUCING COMPOSITE SHEETS USING MULTIPLE LAMINATION

A device for producing a strip-shaped composite sheet may comprise at least two outer metal cover sheets and at least one plastic layer disposed between the two outer metal cover sheets. The device may further comprise at least one first laminating device for laminating the metal cover sheets with the at least one plastic layer arranged between the metal cover sheets, with the first laminating device comprising at least two laminating rolls forming a laminating gap. One object of the present disclosure is to provide methods and devices for producing composite sheets, with which the economy, in particular the production speed, of the production method can be significantly increased and at the same time the risk of delamination of the composite sheets during the further processing can be reduced.”




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METHOD AND MACHINE FOR BONDING A FLEXIBLE COATING TO A SUPPORT USING ELECTROMAGNETIC WAVES AND LINING PRODUCED IN THIS WAY

A machine (1) and a method for thermobonding using an emission of electromagnetic waves (13), for example microwaves, to activate one or a plurality of adhesive layers located between a support and one or a plurality of layers of flexible covering, through a bed of particles (4) fluidized by a humidified gas. A multi-layer upholstery item including at least one non-permeable layer and produced in a single operation is also described.




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METHODS AND APPARATUS FOR LAMINATION OF RIGID SUBSTRATES BY SEQUENTIAL APPLICATION OF VACUUM AND MECHANICAL FORCE

Method and apparatus for lamination of substrates, e.g. rigid plastic layers, to manufacture laminated products. The methods include the sequential application of vacuum and mechanical force through a two-stroke process performed by a lamination apparatus having one or more force-producing stroke cylinders. Actuation of a cylinder to produce a first stroke creates a sealed chamber within the apparatus, enclosing a stack of substrates to be laminated. The sealed chamber may be evacuated of air by application of a vacuum. Subsequent actuation of a cylinder to produce a second stroke applies mechanical force to the sealed chamber, which compresses the substrates into a laminated product substantially free of air bubbles or voids.




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Coordinated Composite Tape Laying

A method and apparatus for laying composite tape. The method may comprise driving a plurality of robots, each having a respective movement system across a movement surface, in which the movement surface faces a workpiece, and laying composite tape from the plurality of robots in a coordinated manner on the workpiece.




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BREATHABLE AND CROSSLINKABLE THERMOPLASTIC POLYURETHANE

The present invention relates to novel thermoplastic polyurethane (TPU) compositions that contain linear monohydric alcohols. The present invention provides for TPU compositions which may be applied at relatively low temperatures, but upon activation (e.g., activation by ultraviolet light), exhibits higher temperature and melt resistance.




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Process and Apparatus for Detaching a Display Module Bonded by a Liquid Optically Clear Adhesive

The present invention relates to a process for detaching a component from an electronic assembly. In particular, the present invention relates to a process for detaching a component bonded with a liquid optically clear adhesive (LOCA) in a display module by using electromagnetic radiation (EMR).




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COMPOSITE WOOD PARTICULATE PRODUCTS WITH ALDEHYDE-FREE ADHESIVES AND METHODS FOR MAKING SAME

The disclosed composite wood particulate products, adhesives contained in such wood particulate products, and methods of making the adhesive and the wood particulate products employ an aldehyde-free adhesive, and more specifically a formaldehyde-free adhesive. The aldehyde-free adhesive includes an inert additive that extends a resin, such as an isocyanate resin, and forms an evenly dispersed, less expensive polymeric adhesive admixture. The extender-filler of the resin is mixed with water to form a slurry. The slurry can then be mixed with a resin, like the isocyanate resin, to form the adhesive. Various rheology modifiers can be added, if desired, to the extender-filler or the slurry. The adhesive can be blended with wood particles to form a mat that is then pressed into a composite wood particulate product.




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Fiberboard Surface Protection System

A paperboard or fiberboard sheet is provided with at least one preapplied adhesive strip used to connect together and an adjacently positioned surface protector to form a dust-proof and/or liquid-proof seal between the two surface protectors.




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MULTI-LAYER GAS BARRIER MATERIALS FOR VACUUM INSULATED STRUCTURE

A method of forming a vacuum insulated refrigerator cabinet structure includes providing a multi-layer sheet of material comprising at least one layer of barrier material that is disposed between first and second outer structural layers. The barrier material and the first and second outer layers comprise thermoplastic polymers. The multi-layer sheet of material is thermoformed to form a non-planar first component having a central portion and four sidewalls extending transversely from the central portion. The method further includes securing a second component having a central portion and four sidewalls extending transversely from the central portion to the first component to form an interior space therebetween. Porous filler material is positioned in the interior space, and a vacuum is formed in the interior space. The first and second components are sealed together to form a vacuum insulated refrigerator cabinet structure.




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SELF MASKING LABEL AND METHOD

A self-masking label and method of use for wrapping about elongate articles. The label includes a series of label sections positioned end-to-end along the length of the label and supported on a carrier strip during printing. A first label section is configured to be marked or printed with indicia; a second label section may be transparent; a third label section is arranged to overlap the first and second sections and to cover and protect the indicia, during for example, an over-coating procedure; and a fourth label section includes a non-sticky tab section.




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PLASMA SYSTEM, PLASMA PROCESSING METHOD, AND PLASMA ETCHING METHOD

A plasma system includes a source electrode, an RF source power generation unit, an RF source power output unit, and a source power output managing unit. The source power output managing unit determines an amplitude and a duty cycle of a pulse RF source power based on information on an amplitude of a continuous wave RF source power.




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PLASMA PROCESSOR

A plasma processor, including a first gas supplier to supply first gas to the inside of a vacuum vessel, a stage on which a wafer is placed, an electromagnetic wave supplier to supply electromagnetic waves for generating first plasma, a susceptor provided to an outer peripheral portion of the stage, a second high frequency power source connected to the susceptor, and a second gas supplier to supply second gas to the inside of the susceptor. The inside of the susceptor is provided with a high frequency electrode connected to the second high frequency power source and a first earth electrode disposed opposite to the high frequency electrode. The second high frequency power source supplies high frequency power while the second gas supplier supplies the second gas, thereby generating second plasma inside the susceptor.




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TEMPERATURE ADJUSTING APPARATUS AND METHOD FOR A FOCUS RING

The present invention provides a temperature adjusting apparatus for a focus ring, wherein heat radiated from the plasma onto the focus ring is transferred downward to a base through the first heat conducting pad contacting a lower surface of the focus ring, an insulating ring contacting a lower surface of the first heat conducting pad, and the second heat conducting pad contacting a lower surface of the insulating ring, so as to be cooled by a cooling system provided at the base; turning on a heater disposed in a grounded shielding ring to generate a controllable external heating source, heat from the heater being transferred to the focus ring through the shielding ring, a third heat conducting pad contacting the shielding ring, the insulating ring contacting the third heat conducting pad, and the first heat conducting pad, so as to perform controllable warming to the focus ring. By providing a good heat conduction path in conjunction with controllable heating power, the present invention achieves a fine control of the working temperature of the focus ring such that it is tunable in processing such as etching, thereby satisfying processing demands.




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MULTI-ZONE ACTIVE-MATRIX TEMPERATURE CONTROL SYSTEM AND TEMPERATURE CONTROL METHOD, AND ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS APPLY THEREOF

The present invention discloses a multi-zone active-matrix temperature control system, the control system having a temperature control matrix and a gate driver; the temperature control matrix comprising: N*M temperature control modules forming a N-row M-column matrix, a power supply line, and a power return line; each temperature control module comprising: a temperature control unit adapts to be heated up by electrical power for temperature controlling; a semiconductor switch provided with a gate electrode connected with the gate driver, two ends of the gate, which turn on or off, being connected with the power supply line, and with the power return line through the temperature control unit, respectively. In the temperature control matrix, one ends, which are connected with a power return line, of the temperature control units of temperature control modules in a same row or same column are serially connected, and connected with the power supply line; one ends, which are connected with the power supply line, of the semiconductor switches of the temperature control modules at a same row or a same column are serially connected, and connected with the power supply line. The present invention may precisely perform temperature control to each zone of the electrostatic chuck and significantly reduces the number of electrostatic chuck lead-out lines.




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IMMERSION DE-TAPING

Embodiments using immersion de-taping are described. A substrate having a substrate tape attached thereto is provided. The substrate includes electrically conductive connectors attached to the substrate tape. A fluid is provided between the substrate and the substrate tape. While the fluid is between the substrate and the substrate tape, the substrate tape is removed from the substrate. Another embodiment is an apparatus comprising an immersion tank, a substrate chuck, first and second fixed rollers, and a moveable roller. The substrate chuck is configured to secure a substrate and to place the substrate into the immersion tank. The first fixed roller is operable to dispense a clamp tape. The second fixed roller is operable to roll the clamp tape. The moveable roller is operable to extend into the immersion tank and to adhere the clamp tape to a substrate tape on the substrate.




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Hot Gas Bypass for Two-Stage Compressor

A vapor compression system comprising a centrifugal compressor (22) having: an inlet (24); an outlet (26); a first impeller stage (28); a second impeller stage (30); and a motor (34) coupled to the first impeller stage and second impeller stage. A first heat exchanger (38) is downstream of the outlet along a refrigerant flowpath. An expansion device (56) and a second heat exchanger (64) are upstream of the inlet along the refrigerant flowpath. A bypass flowpath (120; 320) is positioned to deliver refrigerant from the compressor bypassing the first heat exchanger. A valve (128) is positioned to control flow through the bypass flowpath, wherein: the bypass flowpath extends from a first location (140) intermediate the inlet and outlet to a second location (142; 342) downstream of the first heat exchanger along the refrigerant flowpath.




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Refrigeration System And Methods For Refrigeration

A refrigeration system includes: a compressor arrangement for compressing gaseous refrigerant from a first pressure to a second pressure, wherein the second pressure comprises a condensing pressure; a plurality of condenser evaporator systems, wherein each condenser evaporator system comprises: (1) a condenser for receiving gaseous refrigerant at a condensing pressure and condensing the refrigerant to a liquid refrigerant; (2) a controlled pressure receiver for holding the liquid refrigerant from the condenser; and (3) an evaporator for evaporating liquid refrigerant from the controlled pressure receiver to form gaseous refrigerant; a first gaseous refrigerant feed line for feeding the gaseous refrigerant at the second pressure from the compressor arrangement to the plurality of condenser evaporator systems; and a second gaseous refrigerant feed line for feeding gaseous refrigerant from the plurality of condenser evaporator systems to the compressor arrangement.




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DUAL HELIUM COMPRESSORS

This invention relates to oil lubricated helium compressor units for use in cryogenic refrigeration systems, operating on the Gifford McMahon (GM) or Brayton cycle. The objective of this invention is to provide redundancy by having a water cooled compressor manifolded to an air cooled compressor and sensors to detect faults so that an expander can be kept running if there is a failure in either the water or air supply.