A coulter assembly for an agricultural implement. The coulter assembly includes a support structure and a disc blade rotatably mounted to the support structure. The coulter assembly also includes a spring assembly coupled to the support structure and configured to urge the disc blade into soil. The spring assembly includes a variable rate spring.

A cleanup device having a first board having a first edge, a second board having a first edge, a first hinge attached to the first edge of the first board and the first edge of the second board, an aperture defined by a portion of the first edge of the first board and a portion of the first edge of the second board, a first plate slidably attached to the first board, wherein the first plate is movable from a first, open position where the aperture is open to a second, closed position where the first plate extends over at least a portion of the aperture, and wherein a top surface of the first board is movable towards a top surface of the second board to form a V-shaped surface for directing dirt or soil off of the first board and the second board.

A cultivator may include at least one rechargeable battery for an electrical power tool as a power source. The at least one rechargeable battery may include a plurality of rechargeable batteries. Further, the plurality of rechargeable batteries may be switched in sequence, so as to be used as the power source.

An agricultural machine (101; 201; 301) comprising two mainly parallel, in the direction of travel, cross-running disc implement rows (102a, 102c; 202a, 202b; 304a, 304b), wherein the orientation of the disc implements (102b, 102d; 203a, 203b; 302a, 302b) contained in the mentioned disc implement rows is arranged so that the fore row (102a; 202a; 304a) has disc implements that are mounted on a frame beam (110; 211; 303) and that are angled outwards and backwards towards the sides of the machine and in a dividing line mainly parallel to the direction of travel of the machine form a first point of change (208a, 304c), and the rear row (102c, 202b; 304b) has disc implements (102d; 203b; 302b) that are mounted on a frame beam (110; 211; 303) and that are angled inwards and backwards from the sides of the machine and in the dividing line form a second point of change (208b, 304a), wherein the fore row is adapted to throw soil from the first point of change outwards towards the sides of the machine and the other row is adapted to throw soil from the sides of the machine inwards towards the second point of change. The dividing line with the first point of change (208a, 304c), and with the second point of change (208b, 304) is arranged at a predetermined distance from the centre line of the machine (101; 201; 301) across the direction of travel.

A front loader (10) for a tractor with a parking stand unit (28) including a parking support (30) pivotably mounted on the front loader arm (12). A locking brace (32) is pivotably seated at one end on the parking support (30) and is movably guided at the other end by a guidance means (50) formed on the locking brace (32) and at least one guide groove (48, 49) formed in the parking support (30). The guidance means (50) can be brought by pivoting the parking support (30) into the parking position (P3) into a locking position in which it comes to rest at a stop (66) formed in the guide groove (48, 49). The guidance means (50) can be pressed against the stop (66) and fixed in the locking position by a support force of the front loader arm (12) acting in the parking position (P3) on the locking brace (32).

A hand held material moving tool is disclosed. The material engaging implement has a material engaging portion adapted for movement of material. A handle is connected to a top surface of the tool. The handle is positioned low and in close proximity to the material engaging portion of the implement. The handle is connected to the tool by a swivel mechanism permitting a predetermined amount of pivot of the implement in relation to the handle about an axis.

A trailer includes a chassis having a hitch, an axle having a pair of tractive elements rotatably coupled to the chassis, an actuator coupled to the chassis and positioned to steer the pair of tractive elements, and a processing circuit. The processing circuit has an input for receiving a transmission gear of a tractor vehicle and a variable output for engaging the actuator. The processing circuit is configured to control the steering of the pair of tractive elements according to a control strategy that varies based on the transmission gear of the tractor vehicle.

A swing control apparatus and a swing control method for a construction machine are provided. The swing control apparatus includes a start position estimation unit, a stop target position calculation unit, and a swing motor position control unit. Even if an operator releases a lever or commands a stop at different times, an upper swing structure of the construction machine (for example, excavator) can be stopped within a predetermined range, and thus the inconvenience caused by an additional driving operation, which is required as the stop position differs according to the time point where the stop command starts, can be solved.

A turf cutter device, an infill extractor/collector device, and a turf wind-up device are used to facilitate the cost-effective removal of an infilled synthetic turf and the subsequent installation of a new turf at the same site, with minimal subsurface disruption. An infill extractor/collector device mounted on a motorized vehicle moves a relatively narrow strip of filled artificial turf from the surface, in front of the vehicle, and directs the strip to an infill removal station. The infill removal station inverts the strip and redirects the strip back toward the front of the vehicle, after agitating the strip to extract the infill. After redirecting the strip toward the front of the vehicle, the vehicle drives over the unfilled strip. Meanwhile, the extractor/collector device moves the extracted infill rearwardly to a bag located in a trailer. The turf cutter device is used prior to infill extraction, while the turf wind up device may be used before or after infill extraction, depending on whether infill extraction takes place at the field or at a remote site, respectively.

A toolbar transport system for extending and retracting a large agricultural toolbar. Forward and rearward folding segments of the toolbar allow the toolbar assembly to retract against the sides of the vehicle without interfering with the steering wheels. A forward-folding segment and rearward-folding segment of each lateral toolbar section connect to provide steering wheel clearance in the transfer position and an integrated lateral toolbar with regularly-spaced ground-engaging implements in the application position. Gauge wheel assemblies assist in the extension and deployment of the toolbar assembly.

An apparatus for servicing roadways includes a frame configured to be secured to a prime mover. The apparatus further includes a grinding drum rotatably supported upon the frame. The apparatus still further includes a driving system supported upon the frame and configured to rotationally drive the grinding drum.

A system for determining a cut location at a work surface includes a position sensor and a controller. The controller stores a desired operating parameter and a final design plane of the work surface and determines an actual profile of the work surface. The controller determines a plurality of target profiles corresponding to different cut locations. The target profiles are based at least in part upon the cut location, a loading profile, slot parameters, and the actual profile of the work surface. The controller further determines an optimized target profile relative to the desired operating parameter and the optimized target profile defines an optimized cut location.

The invention concerns a drill bit, intended to be used with a down-the-hole drill and comprising a drill head (2) with a front surface provided with drill pins (3) and a shaft (4), whereby the shaft is narrower than the drill head and intended to be inserted in a manner that allows axial sliding into the end of a drill chuck that is a component of a down-the-hole drill and which shaft has a rear end part (6) that is somewhat thickened with a plane striking surface (7) against which a hammer piston (8) that is a component of the down-the-hole hammer drill is arranged to impact, that the drill head when viewed along its axial direction has a cylinder-shaped forward part (20) provided with cuttings channels (22), a rear cylinder-shaped part (21) that is located for the reception of drill cuttings at the same level or somewhat below the bottom (25) of the cuttings channels, whereby the diameter (D1) of the forward part is greater than the diameter (D2) of the rear part. In a drill bit that has high performance and a long useful life, and that is furthermore well-suited to be used for directed drilling, the cylinder-shaped forward part (20) of the drill head (2) has an axial length (L3) from the main plane of the front surface to a shoulder plane (26) located between the drill head (2) and the shaft (4) that is greater than the axial length (L4) of the cylinder-shaped rear part (21) of the drill head.

A brake control system and method for motor vehicles is provided with an electronic control unit, by which, when the motor vehicle is stationary, a parking brake function can be activated manually or automatically. Its deactivation occurs upon reaching a predefined release condition. In the presence of a release condition the brake pressure, which was built up for the parking brake function, is released in a time offset manner at least in relation to the axles of the vehicle by way of the control unit.

The present invention extends to a stacking mechanism having electrical actuators for stacking slabs of sod on a sod harvesting machine. The electrical actuators allow the stacking head to be driven in three axes. The stacking mechanism also includes position feedback sensors for reporting the position of the stacking head to enable precision when operating the stacking head at a fast rate. The stacking mechanism of the present invention also provides temporary pallet support wings to enable the continued stacking of slabs of sod on one pallet even while another pallet is being dropped from the sod harvesting machine.

A hitch on a vehicle is raised and lowered by a hydraulic actuator controlled by an electrically operated valve. A control system receives a command that indicates a designated velocity and uses the command to operate the valve. Based on a reference external force exerted on the hitch, the control system is configured with relationships for converting a plurality of command values to corresponding electric current levels for operating the valve. The control system compensates for effects due to differences between the actual force acting on the hitch and the reference external force. Velocity feedback adjusts the electric current level applied to the valve. The passive load force control provides a predictor of the hitch load force to eliminate overshoot/undershoot of hitch motion. During hitch motion, the velocity feedback also compensates for effects due to load and hitch geometry changes that occur.

An apparatus for extracting and collecting particulate infill from an infilled artificial turf field. A vehicle has a first forward end and a second rearward end. An infill extractor is located at the first end of the vehicle and adapted to extract infill from a strip of infilled athletic turf. Extracted infill falls into a bottom section of the infill extractor. An infill mover is secured to the vehicle and adapted to move the extracted infill from the bottom section of the infill extractor toward the second end of the vehicle. An infill collector is connected to the second end of the vehicle and operable to cooperate with the infill mover to collect the moved infill. The infill collector includes a frame that is laterally movable relative to the vehicle from an operative “in use” position to a stowed position.

A linkage arrangement (10) is provided for moveably connecting an attachment (6) to a work machine (8). The linkage arrangement (10) includes linkage group (12) having an upper arm (14) with a machine pivot point (20) for connecting to the work machine (8) and an attachment pivot point (22) for connecting to the attachment (6). The linkage group (12) further has a lower arm (16) with a machine pivot point (24) for connecting to the work machine (8) and an attachment pivot point (26) for connecting to the attachment (6). An actuator (30) extends between the upper and lower arms (14, 16), whereby during normal operation an increase in the length of the actuator (30) results in the attachment (6) being lowered relative to the work machine (8).

A method of making a tillage blade by obtaining a generally circular sheet metal steel disc having an outer peripheral edge. Waves are made in the outer peripheral edge of a circular steel disc in a predetermined pattern while the steel is cold. The outer peripheral edge is then sharpened at a predetermined acute angle with respect to a first plane by grinding. Then the disc is heat treated to make it harder so it will wear longer. If it is desired to have a concave/convex disc, instead of a coulter, then during the heat treating process the disc is deformed so that the sharpened portions of the peripheral edge remain generally in the first plane but a central portion of the disc is disposed at least partially in a second plane which is parallel to but spaced from the first plane.

A control system for a machine is disclosed. The system includes a ripper sensor associated with a ripper of the machine configured to generate a signal indicative of a position of the ripper. The system includes a steering command sensor associated with a steering control module of the machine. The steering command sensor is configured to generate a signal indicative of a steering command of the machine. The system further includes a controller configured to receive the signals indicative of the position of the ripper and the steering command of the machine. The controller is configured to execute an action based on the engaged state of the ripper and the steering command of the machine.

A vertical tilling implement to be pulled behind and agricultural vehicle having a number of gangs of fluted-concave disc blades, rolling baskets, and wheels connected to a main frame. As the vertical tilling implement is pulled, the fluted-concave disc blades move the soil in a direction lateral to the side of the blades as well as up. Meanwhile, the rolling bars aid in leveling the seedbed and crushing the remaining large pieces of soil. The vertical tilling implement reduces the amount of subsoil compaction and cuts through heavy residue making it ideal for use in the fall or in the spring.

Disclosed is a coupler comprising a first structure, a first shaft rotatably supported by the first structure, a second structure supporting the first structure, and a moving device configured to move the first structure relative to the second structure.

A drive system for a mobile machine is disclosed. The drive system may have a travel speed sensor, at least one traction device speed sensor, and a controller in communication with the travel speed sensor and the at least one traction device speed sensor. The controller may be configured to determine a slip value associated with a traction device of the mobile machine based on signals generated by the travel speed sensor and the at least one traction device speed sensor, and determine a torque output value of the mobile machine. The control may also be configured to make a comparison of the slip value and the torque output value with a pull-slip curve stored in memory, and selectively update the pull-slip curve based on the comparison.

According to embodiments of the invention, a TFT array substrate, a manufacturing method of the TFT array substrate and a display device are provided. The method comprises: depositing a metal film on a substrate, and forming a gate electrode and a gate line; forming a gate insulating layer and a passivation layer on the substrate; depositing a transparent conductive layer, a first source/drain metal layer and a first ohmic contact layer, and forming a drain electrode, a pixel electrode, a data line, and a first ohmic contact layer pattern provided on the drain electrode; and depositing a semiconductor layer, a second ohmic contact layer and a second source/drain metal layer, and forming a source electrode, a second ohmic contact layer pattern provided below the source electrode, and a semiconductor channel between the source electrode and the drain electrode.

Group III nitride based light emitting devices and methods of fabricating Group III nitride based light emitting devices are provided. The emitting devices include an n-type Group III nitride layer, a Group III nitride based active region on the n-type Group III nitride layer and comprising at least one quantum well structure, a Group III nitride layer including indium on the active region, a p-type Group III nitride layer including aluminum on the Group III nitride layer including indium, a first contact on the n-type Group III nitride layer and a second contact on the p-type Group III nitride layer. The Group III nitride layer including indium may also include aluminum.

An organic EL device includes a first substrate including a cathode layer (a first electrode layer), an organic layer formed on the cathode layer, an anode layer (a second electrode layer) formed on the organic layer, and a second substrate joined to the anode layer by an adhesive layer. The anode layer is provided so as to extend to an outer peripheral side of a region where the organic layer is present, the second substrate and the adhesive layer are not present in a portion which faces a region at an outer peripheral side of the extended anode layer, and the cathode layer and the extended anode layer are exposed from the second substrate to constitute a cathode taking-out portion and an anode taking-out portion, respectively.

An object is to provide a semiconductor device using an oxide semiconductor having stable electric characteristics and high reliability. A transistor including the oxide semiconductor film in which a top surface portion of the oxide semiconductor film is provided with a metal oxide film containing a constituent similar to that of the oxide semiconductor film and functioning as a channel protective film is provided. In addition, the oxide semiconductor film used for an active layer of the transistor is an oxide semiconductor film highly purified to be electrically i-type (intrinsic) by heat treatment in which impurities such as hydrogen, moisture, a hydroxyl group, or a hydride are removed from the oxide semiconductor and oxygen which is a major constituent of the oxide semiconductor and is reduced concurrently with a step of removing impurities is supplied.

An organic light emitting display device includes a light shield layer formed on a substrate and a buffer layer formed on an entire surface of the substrate, an oxide semiconductor layer and first electrode formed on the buffer layer, a gate insulation film and gate electrode formed on the oxide semiconductor layer while being deposited to expose both edges of the oxide semiconductor layer, an interlayer insulation film formed to expose both the exposed edges of the oxide semiconductor layer and the first electrode, source and drain electrodes connected with one edge and the other edge of the oxide semiconductor layer, respectively, and a protective film formed to cover the source and drain electrodes while exposing a region of the first electrode so as to define a luminescent region and a non-luminescent region.

A display device includes a pixel portion including a plurality of pixels each including a first transistor, a second transistor, and a light-emitting element, in which a gate of the first transistor is electrically connected to a scan line, one of a source and a drain of the first transistor is electrically connected to a signal line, and the other of them is electrically connected to a gate of the second transistor; one of a source and a drain of the second transistor is electrically connected to a power supply line and the other of them is electrically connected to the light-emitting element, and the first transistor includes an oxide semiconductor layer. A period when the display device displays a still image includes a period in which output of a signal to all the scan lines in the pixel portion is stopped.

A semiconductor light-emitting device includes a lamination of semiconductor layers including a first layer of a first conductivity type, an active layer, and a second layer of a second conductivity type; a transparent conductive film formed on a principal surface of the lamination and having an opening; a pad electrode formed on part the opening; and a wiring electrode connected with the pad electrode, formed on another part of the opening while partially overlapping the transparent conductive film; wherein contact resistance between the transparent conductive film and the lamination is larger than contact resistance between the wiring electrode and the lamination. Field concentration at the wiring electrode upon application of high voltage is mitigated by the overlapping transparent conductive film.

An organic light emitting diode (OLED) display a includes: a substrate; an organic light emitting element on the substrate and including a first electrode, a light emission layer, and a second electrode; and an encapsulation layer on the substrate while covering the organic light emitting element. The encapsulation layer includes an organic layer and an inorganic layer. A mixed area, where organic materials forming the organic layer and inorganic materials forming the inorganic layer co-exist along a plane direction of the encapsulation layer, is formed at the boundary between the organic layer and the inorganic layer.

The present invention relates to a film for flip chip type semiconductor back surface to be formed on a back surface of a semiconductor element flip chip-connected to an adherend, the film for flip chip type semiconductor back surface containing an inorganic filler in an amount within a range of 70% by weight to 95% by weight based on the whole of the film for flip chip type semiconductor back surface.

There is provided a substrate for light-emitting element, including a mounting surface on which a light-emitting element is to be mounted, the mounting surface being one of two opposed main surfaces of the substrate. The substrate of the present invention is provided with a protection element for the light-emitting element, the protection element comprising a voltage-dependent resistive layer embedded in a body of the substrate, and comprising a first electrode and a second electrode each of which is in connection with the voltage-dependent resistive layer wherein the light-emitting element is to be mounted such that it is positioned in an overlapping relation with the voltage-dependent resistive layer.

An object is to manufacture a semiconductor device with high reliability by providing the semiconductor device including an oxide semiconductor with stable electric characteristics. In a transistor including an oxide semiconductor layer, a gallium oxide film is used for a gate insulating layer and made in contact with an oxide semiconductor layer. Further, gallium oxide films are provided so as to sandwich the oxide semiconductor layer, whereby reliability is increased. Furthermore, the gate insulating layer may have a stacked structure of a gallium oxide film and a hafnium oxide film.

A package includes a first die and a second die underlying the first die and in a same first die stack as the first die. The second die includes a first portion overlapped by the first die, and a second portion not overlapped by the first die. A first Thermal Interface Material (TIM) is over and contacting a top surface of the first die. A heat dissipating lid has a first bottom surface contacting the first TIM. A second TIM is over and contacting the second portion of the second die. A heat dissipating ring is over and contacting the second TIM.

The band tail state and defects in the band gap are reduced as much as possible, whereby optical absorption of energy which is in the vicinity of the band gap or less than or equal to the band gap is reduced. In that case, not by merely optimizing conditions of manufacturing an oxide semiconductor film, but by making an oxide semiconductor to be a substantially intrinsic semiconductor or extremely close to an intrinsic semiconductor, defects on which irradiation light acts are reduced and the effect of light irradiation is reduced essentially. That is, even in the case where light with a wavelength of 350 nm is delivered at 1×1013 photons/cm2·sec, a channel region of a transistor is formed using an oxide semiconductor, in which the absolute value of the amount of the variation in the threshold voltage is less than or equal to 0.65 V.

According to one embodiment, a semiconductor light emitting device includes a stacked structure body, a first electrode, a second electrode, and a dielectric body part. The stacked structure body includes a first semiconductor layer, having a first portion and a second portion juxtaposed with the first portion, a light emitting layer provided on the second portion, a second semiconductor layer provided on the light emitting layer. The first electrode includes a contact part provided on the first portion and contacting the first layer. The second electrode includes a first part provided on the second semiconductor layer and contacting the second layer, and a second part electrically connected with the first part and including a portion overlapping with the contact part when viewed from the first layer toward the second layer. The dielectric body part is provided between the contact part and the second part.

A semiconductor device includes wiring layers formed over a semiconductor wafer, a via-layer between the wiring layers, conductive films in the wiring layers, and a via-plug in the via-layer connecting the conductive films of the wiring layers above and below, a scribe region at an outer periphery of a chip region along an edge of the semiconductor substrate and including a pad region in the vicinity of the edge, the pad region overlapping the conductive films of the plurality of wiring layers in the plan view, the plurality of wiring layers including first second wiring layers, the conductive film of the first wiring layer includes a first conductive pattern formed over an entire surface of said pad region in a plan view, and the conductive film of the second wiring layer includes a second conductive pattern formed in a part of the pad region in a plan view.

It is an object to provide a transistor having a new multigate structure in which operating characteristics and reliability are improved. In a transistor having a multigate structure, which includes two gate electrodes electrically connected to each other and a semiconductor layer including two channel regions connected in series formed between a source region and a drain region, and a high concentration impurity region is formed between the two channel regions; the channel length of the channel region adjacent to the source region is longer than the channel length of the channel region adjacent to the drain region.

A method and a semiconductor device for incorporating defect mitigation structures are provided. The semiconductor device comprises a substrate, a defect mitigation structure comprising a combination of layers of doped or undoped group IV alloys and metal or non-metal nitrides disposed over the substrate, and a device active layer disposed over the defect mitigation structure. The defect mitigation structure is fabricated by depositing one or more defect mitigation layers comprising a substrate nucleation layer disposed over the substrate, a substrate intermediate layer disposed over the substrate nucleation layer, a substrate top layer disposed over the substrate intermediate layer, a device nucleation layer disposed over the substrate top layer, a device intermediate layer disposed over the device nucleation layer, and a device top layer disposed over the device intermediate layer. The substrate intermediate layer and the device intermediate layer comprise a distribution in their compositions along a thickness coordinate.

A display device comprising TFT elements having satisfactory characteristics and being easy to assemble. In the display device, a pixel emitting red light comprises a red color filter. The red color filter forms a light shielding film for the TFT elements in a driver circuit portion or in a pixel portion.

A non-linear element (e.g., a diode) with small reverse saturation current is provided. A non-linear element includes a first electrode provided over a substrate, an oxide semiconductor film provided on and in contact with the first electrode, a second electrode provided on and in contact with the oxide semiconductor film, a gate insulating film covering the first electrode, the oxide semiconductor film, and the second electrode, and a third electrode provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film with the gate insulating film interposed therebetween or a third electrode provided in contact with the gate insulating film and surrounding the second electrode. The third electrode is connected to the first electrode or the second electrode.

Provided are three-dimensional nonvolatile memory devices and methods of fabricating the same. The memory devices include semiconductor pillars penetrating interlayer insulating layers and conductive layers alternately stacked on a substrate and electrically connected to the substrate and floating gates selectively interposed between the semiconductor pillars and the conductive layers. The floating gates are formed in recesses in the conductive layers.

According to one embodiment, a semiconductor light emitting device includes a first semiconductor layer, a light emitting unit, a second semiconductor layer, a reflecting electrode, an oxide layer and a nitrogen-containing layer. The first semiconductor layer is of a first conductivity type. The light emitting unit is provided on the first semiconductor layer. The second semiconductor layer is provided on the light emitting unit and is of a second conductivity type. The reflecting electrode is provided on the second semiconductor layer and includes Ag. The oxide layer is provided on the reflecting electrode. The oxide layer is insulative and has a first opening. The nitrogen-containing layer is provided on the oxide layer. The nitrogen-containing layer is insulative and has a second opening communicating with the first opening.

An electronic device includes a silicon carbide layer including an n-type drift region therein, a contact forming a junction, such as a Schottky junction, with the drift region, and a p-type junction barrier region on the silicon carbide layer. The p-type junction barrier region includes a p-type polysilicon region forming a P-N heterojunction with the drift region, and the p-type junction barrier region is electrically connected to the contact. Related methods are also disclosed.

An object is to provide a semiconductor device including an oxide semiconductor film, which has stable electrical characteristics and high reliability. A stack of first and second material films is formed by forming the first material film (a film having a hexagonal crystal structure) having a thickness of 1 nm to 10 nm over an insulating surface and forming the second material film having a hexagonal crystal structure (a crystalline oxide semiconductor film) using the first material film as a nucleus. As the first material film, a material film having a wurtzite crystal structure (e.g., gallium nitride or aluminum nitride) or a material film having a corundum crystal structure (α-Al2O3, α-Ga2O3, In2O3, Ti2O3, V2O3, Cr2O3, or α-Fe2O3) is used.

A semiconductor device, includes a semiconductor substrate, a first interconnect layer formed over the semiconductor substrate, a gate electrode formed in the first interconnect layer, a gate insulating film formed over the gate electrode, a second interconnect layer formed over the gate insulating film, an oxide semiconductor layer formed in the second interconnect layer, and a via formed in the second interconnect layer and connected to the oxide semiconductor layer. The gate electrode, the gate insulating film and the oxide semiconductor layer overlap in a plan view.

Semiconductor devices including a stressor in a recess and methods of forming the semiconductor devices are provided. The methods may include forming a trench in an active region and the trench may include a notched portion of the active region. The methods may also include forming an embedded stressor in the trench. The embedded stressor may include a lower semiconductor layer and an upper semiconductor layer, which has a width narrower than a width of the lower semiconductor layer. A side of the upper semiconductor layer may not be aligned with a side of the lower semiconductor layer and an uppermost surface of the upper semiconductor layer may be higher than an uppermost surface of the active region.

It is an object to manufacture a highly reliable semiconductor device including a thin film transistor whose electric characteristics are stable. An insulating layer which covers an oxide semiconductor layer of the thin film transistor contains a boron element or an aluminum element. The insulating layer containing a boron element or an aluminum element is formed by a sputtering method using a silicon target or a silicon oxide target containing a boron element or an aluminum element. Alternatively, an insulating layer containing an antimony (Sb) element or a phosphorus (P) element instead of a boron element covers the oxide semiconductor layer of the thin film transistor.

A semiconductor device which includes a thin film transistor having an oxide semiconductor layer and excellent electrical characteristics is provided. Further, a method for manufacturing a semiconductor device in which plural kinds of thin film transistors of different structures are formed over one substrate to form plural kinds of circuits and in which the number of steps is not greatly increased is provided. After a metal thin film is formed over an insulating surface, an oxide semiconductor layer is formed thereover. Then, oxidation treatment such as heat treatment is performed to oxidize the metal thin film partly or entirely. Further, structures of thin film transistors are different between a circuit in which emphasis is placed on the speed of operation, such as a logic circuit, and a matrix circuit.