According to one embodiment, a liquid crystal display device includes a liquid crystal display panel which includes a pixel electrode, a liquid crystal layer and an alignment film, and a driver. The driver drives the pixel electrode at a drive frequency of 1 to 20 Hz. The alignment film has a resistivity of 5×1014 Ω·cm or more.

An array substrate and a method of fabricating the same are disclosed. The method has the following steps of: fabricating a switch array layer on a substrate; forming a color resist layer having a red color filter, a green color filter and a blue color filter on the switch array layer, and a through hole in the color resist layer; forming a transparent conductive layer on the color resist layer; and forming a light shield layer on the transparent conductive layer.

A liquid display device is provided. The liquid crystal display device includes a first base substrate, a first signal line disposed on the first base substrate and extended in a first direction, a second signal line disposed on the first base substrate, extended in a second direction intersecting the first direction, and insulated from the first signal line, a thin film transistor disposed on the first base substrate and electrically connected to the first signal line and the second signal line, a pixel electrode electrically connected to the thin film transistor, and a shield pattern disposed on a same layer as but spaced apart from the pixel electrode, overlapped with the thin film transistor, and including a material same as a material of the pixel electrode.

A deskew display panel is disclosed in present invention. The deskew display panel includes a plurality of data lines arranged in a column direction, a plurality of scanning lines perpendicular to the column direction and intersecting the data lines; a sub-pixel array including a plurality of sub-pixels arranged in array, each sub-pixel including a transistor and disposed between any two neighboring scanning lines and any two neighboring data lines; the scanning lines disposed in the sub-pixel array and parallel to each other; sub-pixels in each row including a plurality of sub-pixel sets, each sub-pixel set including two sub-pixels, the sub-pixel including the transistor, gates of the transistors connected to two neighboring scanning lines respectively, sources of the transistors connected to the same data line, and drains of the transistors connected to a liquid crystal capacitor and a storage capacitor.

A display of an electric device includes a plurality of separated transparent electrode blocks, which are configured to provide one or more of supplemental features such as touch recognition. Signal paths between the transparent electrode blocks and the driver for the supplemental feature are implemented with a plurality of conductive lines placed under positioned under one or more planarization layers. The conductive lines implementing the signal paths are routed across the display area, directly toward a non-display area where drive-integrated circuits are located.

Carbon allotropes, a thin-film transistor array substrate comprising the same, and a display device comprising the same are disclosed. The thin-film transistor array substrate comprising a substrate, a gate electrode on the substrate, a gate insulating film on the gate electrode, an active layer positioned on the gate insulating film and comprising a semiconductor material and a plurality of carbon allotropes, and a source electrode and a drain electrode that make contact with the active layer.

An electronic device includes, a light source having a peak emission at a wavelength between about 440 nm to about 480 nm; and a photoconversion layer disposed on the light source, wherein the photoconversion layer includes a first quantum dot which emits red light and a second quantum dot which emits green light,wherein at least one of the first quantum dot and the second quantum dot has a perovskite crystal structure and includes a compound represented by Chemical Formula 1: AB'X3+α Chemical Formula 1 wherein A is a Group IA metal, NR4+, or a combination thereof, B' is a Group IVA metal, X is a halogen, BF4−, or a combination thereof, and α is 0 to 3.

A liquid-crystal display (LCD) device includes: an array substrate on which a sub-pixel is disposed; a color filter substrate on which a color filter corresponding to the sub-pixel is disposed; and a liquid-crystal layer between the array substrate and the color filter substrate. The array substrate comprises a lens hole, the color filter substrate comprises a lens hole guide, and a diameter of the lens hole is smaller than an inner diameter of the lens hole guide.

According to one embodiment, a laminated film includes a first adhesive layer, a first insulating layer which faces the first adhesive layer, a first metal layer which is located between the first adhesive layer and the first insulating layer, and a first porous layer which is located between the first adhesive layer and the first insulating layer and faces the first metal layer.

An analytical tool is provided for analysis of a sample by capillary electrophoresis. The analytical tool includes an inlet reservoir into which a sample is introduced, a capillary tube in communication with the inlet reservoir, a filter through which a liquid from the inlet reservoir passes, an enlarged portion undergoing a sudden increase in a cross-sectional area and being in communication with the inlet reservoir and the capillary tube, and a pressure fluctuation reducer for preventing pressure fluctuation at the enlarge portion from affecting a liquid in the capillary tube.

A single molecule sensing or detecting device includes a first electrode and a second electrode separated from the first electrode by a gap. The first electrode and the second electrode have an opening formed therethrough. At least one of the first electrode and the second electrode is functionalized with a recognition molecule. The recognition molecule has an effective length L1 and is configured to selectively bind to a target molecule having an effective length L2. The size of the gap is configured to be greater than L2, but less than or equal to the sum of L1 and L2.

The purpose of the present invention is to provide an In—Cu alloy sputtering target member having high compositional homogeneity in the thickness direction. The present invention provides a sputtering target member having a composition containing from 1 to 70 at. % of Cu relative to a total number of atoms of In and Cu, the balance being In and inevitable impurities, wherein the target member fulfills 0.95≦A/B≦1, where A represents a Cu atomic concentration relative to the total number of atoms of In and Cu in one half of a thickness direction; B represents a Cu atomic concentration relative to the total number of atoms of In and Cu in the other half of the thickness direction; and B≧A; and wherein a number of pores having a size of 100 μm or more is less than 10/cm2 on average.

A process train for a floating production storage and offloading installation includes a crude oil storage tank that is equipped with at least one set of electrostatic internals arranged to provide a treatment flow path isolated from a surrounding volume of the electrostatic separator section of the tank. An oil-and-water stream or mixture entering the set of electrostatic internals travels along the treatment flow path and is subjected to an electric field. The treatment flow path is in an upwardly direction toward the oil outlet section and in a downwardly opposite direction toward the water outlet section of the tank. Employing electrostatic internals within the tank permits an allowable inlet water content into the tank of up to 80%, significantly reducing the required topside processing equipment.

Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, a method for treating an exhaust gas in an exhaust conduit of a substrate processing system includes: flowing an exhaust gas and a reagent gas into an exhaust conduit of a substrate processing system; injecting a non-reactive gas into the exhaust conduit to maintain a desired pressure in the exhaust conduit for conversion of the exhaust gas; and forming a plasma from the exhaust gas and reagent gas, subsequent to injecting the non-reactive gas, to convert the exhaust gas to abatable byproduct gases.

The present application discloses methods and apparatus for conversion of quantized vibrational energy. The present application discloses, by driving a medium that comprises arranged nuclei with one or more selected driving frequencies, the arranged nuclei in the medium are induced to oscillate coherently at one or more oscillating frequencies. The mechanical vibrational energy of the oscillating nuclei interacts with the oscillating medium. The interaction between the vibrational energy and the oscillating medium effectuates up-conversion or down-conversion of quantized vibrational energy.

The invention discloses a composite material used for catalyzing and degrading nitrogen oxide and its preparation method and application thereof. The invention of the hollow g-C3N4 nanospheres/reduced graphene oxide composite-polymer carbonized nanofiber material is prepared as follow: 1) the preparation of silica nanospheres; 2) the preparation of hollow g-C3N4 nanospheres; 3) the preparation of graphene oxide; 4) the preparation of surface modified hollow g-C3N4 nanoparticles preparation; 5) the preparation of composites; 6) the preparation of composite-polymer carbon nanofiber material. The raw materials used in the process is low cost and easy to get; the operation of the invention is simple and convenient without the use of expensive equipment in the whole process; the composite has high adsorption efficiency of ppb level nitrogen oxide with good repeatability.

Microfluidic devices having an electrowetting configuration and an optimized droplet actuation surface are provided. The devices include a conductive substrate having a dielectric layer, a hydrophobic layer covalently bonded to the dielectric layer, and a first electrode electrically coupled to the dielectric layer and configured to be connected to a voltage source. The microfluidic devices also include a second electrode, optionally included in a cover, configured to be connected to the voltage source. The hydrophobic layer features self-associating molecules covalently bonded to a surface of the dielectric layer in a manner that produces a densely-packed monolayer that resists intercalation and or penetration by polar molecules or species. Also provided are microfluidic devices having an electrowetting configuration that further include a section or module having a dielectrophoresis configuration; systems that include any of the microfluidic devices in combination with an aqueous droplet and a fluidic medium immiscible with the medium of the aqueous droplet; related kits; and methods of manipulating droplets, optionally containing micro-objects such as biological cells, within the microfluidic devices.

Certain exemplary aspects of the present disclosure are directed towards an apparatus for electrostatic fluid filtration. The apparatus utilizing alternating positive and negative electrodes in conjunction with filter media there between to filter contaminants from a fluid flow.

Electrolytic liquid generating device (1) includes laminated body (41) in which conductive film (46) is laminated to be interposed between mutually adjacent electrodes (44, 45), and electrolytic part (40) which electrolyzes liquid. Furthermore, electrolytic liquid generating device (1) includes a passage having inflow port (71) in which liquid to be provided to electrolytic part (40) flows and outflow port (72) from which electrolytic liquid generated in electrolytic part (40) flows out. The passage is formed such that liquid flowing direction (X) crosses laminated direction (Z) of laminated body (41).

A process train for a floating production storage and offloading installation includes a crude oil storage tank equipped with at least one set of electrostatic internals. The set of electrostatic internals are arranged to provide a treatment flow path within the crude oil storage tank oblique to a longitudinal centerline of the crude oil storage tank and through an electric field provided by the set of electrostatic internals. Employing these electrostatic internals within the tank permits an allowable inlet water content into the tank of up to 80%, significantly reducing the required topside processing equipment. The process and system also includes, upstream of the tank, two separator vessels arranged in parallel so each receives a portion of an incoming oil-and-water stream, a flash vessel arranged downstream of the two separator vessels, and a degasser vessel. Downstream of the crude oil storage tank is an electrostatic treater.

A system and method for dehydrating crude oil on a floating production storage and offloading installation include a separator vessel to receive an incoming produced water stream, followed by a flash vessel, a treatment block, a crude oil storage tank, and an electrostatic treater. The treatment block includes a low pressure degasser followed by a compact electrostatic separator pre-treater or a compact electrostatic separator pre-treater followed by a low pressure degasser. The flash vessel and/or the low pressure degasser may employ an inlet cyclonic distributor and demisting cyclones, while the electrostatic treater may employ DUAL FREQUENCY® technology. The separator vessel may be a single horizontal two-phase separator/degasser or two vertical two-phase separator/degassers that operate in parallel with each receiving approximately 50 percent of the incoming produced water stream. The final outlet stream preferably contains no more than 0.5 BS&W and 285 milligrams per liter salt.

Methods are provided for production of a composite layer comprising a plastic foil and a layer deposited directly thereon. A method for production of a composite layer comprising a plastic foil and at least one layer deposited directly onto the plastic foil by means of chemical gas-phase deposition within a vacuum chamber may be provided, wherein the plastic foil has a proportion of at least 20 percent by mass of a metal element or of a semiconductor element, wherein during the layer deposition, at least one monomer is supplied into the vacuum chamber and a plasma is formed within the vacuum chamber. After completed deposition of the layer, at least one surface region of the layer is exposed to accelerated electrons.

For coating substrates (S) having along their surfaces to be coated high aspect ratio vias, a sputtering system has a sputtering source arrangement, which includes a first DC pulse operated magnetron sub-source (1203) and a second frame-shaped magnetron sub-source (1213) which latter is arranged, in the system, between the substrate (S) and the first magnetron sub-source (1203). The second magnetron sub-source (1213) may be operated in DC, pulsed DC, thereby also HIPIMS mode. The first magnetron sub-source (1203) is advantageously also operated in HIPIMS mode. The substrate (S) is biased by an Rf power source (1253).

A magnetically enhanced low temperature high density plasma chemical vapor deposition (LT-HDP-CVD) source has a hollow cathode target and an anode, which form a gap. A cathode target magnet assembly forms magnetic field lines substantially perpendicular to the cathode surface. A gap magnet assembly forms a magnetic field in the gap that is coupled with the cathode target magnetic field. The magnetic field lines cross the pole piece electrode positioned in the gap. The pole piece is isolated from ground and can be connected to a voltage power supply. The pole piece can have negative, positive, floating, or RF electrical potentials. By controlling the duration, value, and sign of the electric potential on the pole piece, plasma ionization can be controlled. Feed gas flows through the gap between the hollow cathode and anode. The cathode can be connected to a pulse power or RF power supply, or cathode can be connected to both power supplies. The cathode target and substrate can be inductively grounded.

A sputtering cathode includes a magnet having a body of length L1 defining a north magnetic pole at a first end of the body and a south magnetic pole at a second, opposite end of the body. A sputtering target of length L2 surrounds the body of the magnet, but not ends of the magnet.

An Al—Te—Cu—Zr alloy sputtering target, comprising 20 at % to 40 at % of Te, 5 at % to 20 at % of Cu, 5 at % to 15 at % of Zr and the remainder of Al, wherein a Te phase, a Cu phase and a CuTe phase are not present in a structure of the target. An object of the present invention is to provide an Al—Te—Cu—Zr alloy sputtering target capable of effectively reducing particle generation, nodule formation and the like upon sputtering and further capable of reducing oxygen contained in the target.

A magnetically enhanced HDP-CVD plasma source includes a hollow cathode target and an anode. The anode and cathode form a gap. A cathode target magnet assembly forms magnetic field lines that are substantially perpendicular to a cathode target surface. The gap magnet assembly forms a cusp magnetic field in the gap that is coupled with the cathode target magnetic field. The magnetic field lines cross a pole piece electrode positioned in the gap. This pole piece is isolated from ground and can be connected with a voltage power supply. The pole piece can have a negative, positive, or floating electric potential. The plasma source can be configured to generate volume discharge. The gap size prohibits generation of plasma discharge in the gap. By controlling the duration, value and a sign of the electric potential on the pole piece, the plasma ionization can be controlled. The magnetically enhanced HDP-CVD source can also be used for chemically enhanced ionized physical vapor deposition (CE-IPVD). Gas flows through the gap between hollow cathode and anode. The cathode target is inductively grounded, and the substrate is periodically inductively grounded.

A film is sputter-deposited on an essentially plane, extended surface of a substrate which has recesses therein, namely at least one of grooves, of holes, of bores, of vias, of trenches. So as to establish on one hand a homogeneous thickness distribution of the film along the addressed surface of the substrate and, on the other hand, a thick film deposition within the recesses, sputter deposition is performed first at a large distance between a sputter surface of a target and the addressed surface of the substrate and then at a reduced distance between the addressed surfaces.

A plating apparatus is described. The apparatus includes: a substrate holder configured to hold a substrate in a vertical position; at least one processing bath configured to process the substrate held by the substrate holder; a transporter configured to grip and horizontally transport the substrate holder; at least one lifter configured to receive the substrate holder from the transporter, lower the substrate holder to place the substrate holder in the processing bath, elevate the substrate holder from the processing bath after processing of the substrate, and transfer the substrate holder to the transporter; and a controller configured to control operations of the transporter and the lifter.

An electrochemical polishing apparatus is provided for polishing a workpiece having at least one sharp object. According to the present invention, the electrolyte is driven to flow to the sharp object and the electrochemical processing is performed for polishing the sharp object.

Self-propelling, programmable nanoscopic motors capable of harvesting energy from absorbed photons and undergoing subsequent photoeletrochemical (PEC) reactions are provided. A nanomotor can have a three-dimensional Janus configuration and can sense the direction of a light source. By controlling the zeta potential of different parts of the nanomotor with chemical modifications, the nanomotor can be programmed to show either positive phototaxis or negative phototaxis.

The present document describes an electrophoretic tissue clearing chamber comprising an electrophoresis channel, configured to receive a clarification fluid therethrough; a first clarification fluid inlet, in fluid communication with the electrophoresis channel, configured to be connected to a source of the clarification fluid; a tissue sample holder in fluid communication with the electrophoresis channel, configured to receive a tissue sample to be clarified, and pressurize and homogenously apply the clarification fluid onto the tissue sample; a clarification fluid outlet, in fluid communication with the tissue sample holder, for exit of the clarification fluid from the electrophoretic tissue clearing chamber; and first and a second electrode, opposite one another in the electrophoresis channel, for transmission of an electric field therethrough.

The present disclosure relates to a method for producing a reference electrode, wherein an internal space of the reference electrode is delimited by an outer wall and wherein the internal space contains a reference electrolyte up to a specified height, wherein the reference electrode is introduced into a pressurization chamber, wherein a defined overpressure is applied to the pressurization chamber and, via an opening that is located above the specified height in the outer wall of the reference electrode to the internal space of the reference electrode, and wherein the opening in the outer wall of the reference electrode is closed at the defined overpressure . The present disclosure further relates to a device for carrying out the method.

The concentration measurement method includes: introducing a predetermined amount of the biological sample into the capillary; measuring a temperature of the biological sample by applying a first voltage to the electrode unit when the temperature of the biological sample is measured, the first voltage allowing the temperature measurement to be less affected by increase and reduction in an amount of the analyte contained in the biological sample; measuring the concentration of the analyte contained in the biological sample by applying a second voltage to the electrode unit; measuring an environmental temperature in a surrounding of the biological sample; and correcting the concentration of the measured analyte based on the measured temperature of the biological sample and the measured environmental temperature.

Light-addressable potentiometric sensing units are provided. A light-addressable potentiometric sensing unit comprises a conductive substrate, a metal oxide semiconductor layer, and a sensing layer. The metal oxide semiconductor layer is made of indium gallium zinc oxide, indium gallium oxide, indium zinc oxide, indium oxide co-doped with tin and zinc, tin oxide, or zinc oxide. The wide-band gap characteristic of the metal oxide semiconductor layer enables the light-addressable potentiometric sensing unit to resist the interference from visible light. The light-addressable potentiometric sensing unit therefore exhibits a more stable performance.

A capillary electrophoresis device including a capillary tube, a suction pump for taking liquid, an intake tube whose end is formed vertically downward, a connection block in which there is an intake flow path that holds the end of the capillary tube and connecting the suction pump to the intake tube, a sample storage unit which contains a sample and has an upward opening into which the tip of the intake tube may be inserted, an intake tube access mechanism to insert the tip of the intake tube into the sample storage unit, and a voltage application mechanism that applies an electric potential difference across the capillary tube.

The present invention generally relates to devices and methods for containing molecules. In some embodiments, the device comprises a nanopore, a pore, and a cavity capable of entropically containing (e.g., trapping) a molecule (e.g., a biomolecule), e.g., for minutes, hours, or days. In certain embodiments, the method comprises urging a molecule into a cavity of a device by application of an electric field, and/or by deposition of fluids having different ionic strengths. The molecule may comprise, in some cases, nucleic acids (e.g., DNA). The molecule, when present in the cavity and/or the nanopore, may be capable of being analyzed, determined, or chemically modified. In some instances, a second molecule (e.g., a second molecule which interacts the first molecule) may also be urged into the cavity. In some embodiments, the interaction of the second molecule with the first molecule (e.g., the second molecule binding to or chemically modifying the first molecule) may be determined by, for example, a change in voltage measured across the device.

In one aspect, a biological sequencing device comprising a cartridge configured to be removed from the instrument is disclosed. In various embodiments the cartridge can include one or more capillaries suitable for capillary electrophoresis, a reservoir and a pump. In various embodiments the reservoir can contain a separation matrix. In various embodiments the pump can load a capillary with separation matrix. In another aspect the biological sequencing device can include one or more capillaries and an integrated valve assembly. In various embodiments the integrated valve assembly can provide a polymer to the one or more capillaries.

The present disclosure relates, in some embodiments, to an apparatus for conducting a capillary electrophoresis assay. The apparatus can comprise a capillary array comprising an anode end and a cathode end, the capillary array provided in a housing further comprising a reservoir configured to house a separation medium and an anode buffer. The system can also comprise an injection mechanism configured to deliver sample to the cathode end of the capillary array, and a temperature control zone, wherein the temperature control zone is configured to control the temperature of the interior of the housing.

There is provided an insulator target which, when mounted on a sputtering apparatus and supplied with AC power, is capable of preventing the discharging from occurring in a clearance between a shield and the target. The insulator target for the sputtering apparatus according to this invention, around which is disposed a shield at the time of assembling the insulator target on the sputtering apparatus, is made up of: a plate-shaped target material to be enclosed by the shield; and, suppose that one surface of the target material is defined as a sputtering surface to be subjected to sputtering, an annular supporting material coupled to an outer peripheral portion of the opposite surface of the target material. The supporting material has an extended portion which is extended outward from a peripheral surface of the target material and which keeps a predetermined clearance to the shield.

A Cu—Ga alloy sputtering target includes, as a component composition, Ga: 0.1 to 40.0 at % and a balance including Cu and inevitable impurities, in which a porosity is 3.0% or lower, an average diameter of circumscribed circles of pores is 150 μm or less, and an average crystal grain size of Cu—Ga alloy particles is 50 μm or less.

Methods and apparatus for processing a substrate are disclosed herein. In some embodiments, a process chamber includes: a chamber body defining an interior volume; a substrate support to support a substrate within the interior volume; a plurality of cathodes coupled to the chamber body and having a corresponding plurality of targets to be sputtered onto the substrate; and a shield rotatably coupled to an upper portion of the chamber body and having at least one hole to expose at least one of the plurality of targets to be sputtered and at least one pocket disposed in a backside of the shield to accommodate and cover at least another one of the plurality of targets not to be sputtered, wherein the shield is configured to rotate about and linearly move along a central axis of the process chamber.

An electrically and magnetically enhanced ionized physical vapor deposition (I-PVD) magnetron apparatus and method is provided for sputtering material from a cathode target on a substrate, and in particular, for sputtering ceramic and diamond-like coatings. The electrically and magnetically enhanced magnetron sputtering source has unbalanced magnetic fields that couple the cathode target and additional electrode together. The additional electrode is electrically isolated from ground and connected to a power supply that can generate positive, negative, or bipolar high frequency voltages, and is preferably a radio frequency (RF) power supply. RF discharge near the additional electrode increases plasma density and a degree of ionization of sputtered material atoms.

A sputtering system that includes a sputtering chamber having a target material serving as a cathode, and an anode and a work piece. A direct current (DC) power supply supplies electrical power to the anode and the cathode sufficient to generate a plasma within the sputtering chamber. A detection module detects the occurrence of an arc in the sputtering chamber by monitoring an electrical characteristic of the plasma. In one embodiment the electrical characteristic monitored is the impedance of the plasma. In another embodiment the electrical characteristic is the conductance of the plasma.

Water is flowed inside main body section formed from an insulating material such that a specified space remains inside the main body section. Electrodes and are arranged along the outer walls of the main body section and voltage is applied to the electrodes. Processing gas present inside the main body section is plasmarized and plasma is emitted to the water flowing inside the main body section.

In an ozone generating system which performs intermittent operation, that is, an operation in an ozone generating operation period in which ozone is generated by discharging gas including oxygen at a discharge electrode part and an operation in an ozone generating operation standby period in which ozone is not generated by stopping discharge are alternately repeated, a gas circulating device which circulates gas in the ozone generating apparatus and removes at least nitric acid from the gas which is circulated is connected to the ozone generating apparatus.

Methods and apparatus for processing substrates are provided herein. In some embodiments, a physical vapor deposition chamber includes a first RF power supply having a first base frequency and coupled to one of a target or a substrate support; and a second RF power supply having a second base frequency and coupled to one of the target or the substrate support, wherein the first and second base frequencies are integral multiples of each other, wherein the second base frequency is modified to an offset second base frequency that is not an integral multiple of the first base frequency.

A film formation apparatus and a film-formed workpiece manufacturing method which are capable of forming a film with a uniform thickness on a workpiece like a three-dimensional object that includes a plurality of surfaces by a simple structure are provided. A film formation apparatus includes a target 21 that is a film formation material including a plane SU3, a power supply unit 3 applying power to the target 21, a rotating unit 4 rotating a workpiece W that is a film formation object around a rotation axis AX1, and a revolving unit 5 revolving the rotating unit 4 around a revolution axis AX2 separate from the rotation axis AX1 to repeatedly make the workpiece W to come close to and move apart from the target 21.

The present invention is to provide a photocatalyst electrode for water decomposition exhibiting a high photocurrent density and having reduced dark current. The photocatalyst electrode for water decomposition of the present invention has a photocatalyst layer and a current collector layer that is formed by a vapor deposition method and is disposed on the photocatalyst layer.

An electrode of an embodiment includes a base material, and a catalyst layer provided on the base material and having a porous structure. When a sum of heights of all peaks belonging to Ir oxide is I0, the height of a peak of IrO2 (110) is T1, and the height of a peak of IrO2 (211) is I2, a ratio of (I1+I2)/I0, which is a ratio of spectra obtained by X-ray diffraction measurements using Kα rays of Cu in the catalyst layer, is 50% or more and 100% or less in a range of a diffraction angle of 20 degrees or more and 70 degrees or less.