An upper electrode for a plasma processing apparatus includes a body portion having a plurality of through-holes, a showerhead disposed below the body portion and having a plurality of jet holes connected to the plurality of through-holes, and a buffer layer interposed between the body portion and the showerhead.

A dry etching apparatus plasma processes a wafer held by a carrier having a frame and an holding sheet. The carrier is placed on an electrode unit of a stage provided in a chamber. The electrode unit is cooled by a cooling section configured to cool the electrode unit. An upper face of the electrode unit is at least as large as the back side of the carrier. The holding sheet and the frame are cooled effectively by the heat transfer to the stage.

A surface machining method for a single crystal SiC substrate, including: a step of mounting a grinding plate which includes a soft pad and a hard pad sequentially attached onto a base metal having a flat surface, a step of generating an oxidation product by using the grinding plate, and a step of grinding the surface while removing the oxidation product, wherein abrasive grains made of at least one metallic oxide that is softer than single crystal SiC and has a bandgap are fixed to the surface of the hard pad.

Provided are a substrate chuck and a substrate bonding system including the substrate chuck. The substrate bonding system includes a lower substrate chuck and an upper substrate chuck disposed on the lower substrate chuck. The lower substrate chuck has a non-flat lower substrate contact surface, and the upper substrate chuck has a flat upper substrate contact surface.

There are provided an adhesive for a solar-cell back sheet having an excellent curing rate and being capable of exhibiting excellent adhesive performance by short-term aging, and also a polyol composition used for the adhesive, a solar-cell back sheet using the adhesive, and a solar-cell module using the sheet. The adhesive for a solar-cell back sheet contains, as essential components, at least one hydroxyl group-containing resin (A) selected from a polyester polyurethane polyol (A1), a polyester polyol (A2), a hydroxyl group-containing (meth)acrylic resin (A3), and a hydroxyl group-containing fluorocarbon resin (A4), a polyisocyanate (B), and a cyclic amide compound (C).

A pattern-forming method includes providing a first ion beam at a first incidence angle and a second ion beam at a second incidence angle to a surface of an etch target layer formed on a substrate. Patterns are formed by patterning the etch target layer using the first and second ion beams. The first ion beam and the second ion beam are substantially symmetrical to each other with respect to a normal line that is perpendicular to a top surface of the substrate. Each of the first and second incidence angles is greater than 0 degrees and smaller than an angle obtained by subtracting a predetermined angle from 90 degrees.

A transfer system includes an expander roll for removing a wrinkle in a separator original sheet, and (i) the expander roll and (ii) a transfer roller immediately followed by or following the expander roll are spaced from each other at a distance of not less than 1 m and not more than 10 m.

An electrically conductive surfacing material capable of providing sufficient conductivity for lightning strike protection (LSP) and/or electromagnetic interference (EMI) shielding is disclosed. The conductive surfacing material is a multi-layered structure having a very thin conductive layer (e.g. solid metal foil) and a resin film formed on at least one surface of the conductive layer. The resin film is formed from a curable resin composition containing an epoxy novolac resin, a tri-functional or tetra-functional epoxy resin, ceramic microspheres, a latent amine-based curing agent, particulate inorganic fillers; and a toughening component. Optionally, the resin film further includes conductive additives to increase electrical conductivity of the surfacing material. The resin film exhibits high Tg as well as high resistance to paint stripper solutions. Furthermore, the conductive surfacing material is suitable for co-curing with fiber-reinforced resin composite substrates.

A prepreg provided with a first resin layer and a second resin layer which is formed on this first resin layer, wherein the first resin layer is formed by a first resin composition, the second resin layer is a layer which comprises a resin layer which is formed by a second resin composition which is different from the first resin composition and in which a fiber base material is contained, the second resin layer is provided with a fiber base material-containing layer which contains the fiber base material, an A layer which is positioned at an opposite side of the first resin layer side of the fiber base material-containing layer and which does not contain the fiber base material, and a B layer which is positioned at the first resin layer side of the fiber base material-containing layer and which does not contain the fiber base material, and said B layer has a thickness which is smaller than the thickness of the first resin layer, is provided.

A method of verifying removal of peel ply material from a composite structure is provided. The method includes doping a layer of peel ply fabric with an identifier. The method also includes curing the composite structure with the layer of peel ply fabric disposed on a surface of the composite structure. The method further includes removing the layer of peel ply fabric from the surface. The method yet further includes scanning the surface of the composite structure for the identifier.

An apparatus and related method of utilizing articulating vacuum plates to manipulate a film or polymeric sheet and form a three dimensional article is provided. The apparatus can be in the form of an articulating vacuum plate system which includes one or more plates or mold parts that are configured to support a sheet, constructed for example, from a polymeric film, in a two dimensional configuration or a three dimensional configuration in a first mode. The apparatus is constructed so that the plates and/or mold parts can articulate or move so as to reconfigure the sheet from a generally planar configuration into a second three dimensional configuration in a second mode for further forming, optionally while the plates and/or mold parts apply vacuum to the sheet while the plates and/or mold parts articulate, so that the plates and/or mold parts bend or otherwise manipulate the configuration and shape of the sheet.

The invention relates to compositions comprising composite materials comprised of discontinuous fibers and one or more polymers and/or oligomers. The invention relates to methods of making the same. The composite materials can be in the form of compositions, composite sheets, laminates, pellets, and/or shaped composite products.

A method and a device for heat sealing multiple plies of a laminate from which gable top packaging can be produced, wherein the laminate has a carrier layer made of electrically non-conductive material and a sealing layer made of thermoplastic material on at least one surface of the laminate. To heat seal multiple plies of a laminate in a high-frequency alternating electric field, the alternating electric field is generated by a first lead of an HF voltage supply in a first sub-region of the sealing region and is generated by a second lead of the HF voltage supply, differing from the first lead, in at least a second sub-region of the sealing region, so that a different heat distribution is obtained over the sub-regions of the sealing region.

Apparatuses and methods for applying a transfer material onto the surface of an article are disclosed, including apparatuses and methods of transfer printing on and/or decorating three-dimensional articles, as well as the articles printed and/or decorated thereby. In some cases, the apparatuses and methods involve providing a deposition device, such as a printing device; providing a transfer component; depositing a material onto a portion of the transfer component with the deposition device; modifying the portion of the transfer component with the transfer material thereon to conform the transfer component to at least a portion of the surface of the three-dimensional article; and transferring the transfer material onto the surface of the article.

Apparatuses and methods for applying a transfer material onto the surface of an article are disclosed, including apparatuses and methods of transfer printing on and/or decorating three-dimensional articles, as well as the articles printed and/or decorated thereby. In some cases, the apparatuses and methods involve providing a deposition device, such as a printing device; providing a transfer component; depositing a material onto a portion of the transfer component with the deposition device; modifying the portion of the transfer component with the transfer material thereon to conform the transfer component to at least a portion of the surface of the three-dimensional article; and transferring the transfer material onto the surface of the article.

A method for making a composite structure with a surfacing film thereon. The surfacing film is co-cured with fiber-reinforced resin composite materials. The surfacing film is formed from a curable resin composition containing an epoxy novolac resin, a tri-functional or tetra-functional epoxy resin, ceramic microspheres, an amine-based curing agent, particulate inorganic fillers; and a toughening component. The surfacing film exhibits high Tg and high cross-linked density after curing, as well as high resistance to paint stripper solutions.

The present invention generally relates to an improved winding apparatus useful in the production of filament wound products and particularly wound tubular products having high length to diameter ratios. The improved winding apparatus comprises a support means for supporting a rotatable mandrel during the manufacture of wound products, the support means comprising a plurality of axially spaced pins extending circumferentially around the mandrel, and a support assembly having a semicircular inner face and an opening, wherein a portion of the plurality of pins is brought into contact with the inner face of the support assembly when the mandrel is rotated.

A device for producing a strip-shaped composite sheet may comprise at least two outer metal cover sheets and at least one plastic layer disposed between the two outer metal cover sheets. The device may further comprise at least one first laminating device for laminating the metal cover sheets with the at least one plastic layer arranged between the metal cover sheets, with the first laminating device comprising at least two laminating rolls forming a laminating gap. One object of the present disclosure is to provide methods and devices for producing composite sheets, with which the economy, in particular the production speed, of the production method can be significantly increased and at the same time the risk of delamination of the composite sheets during the further processing can be reduced.”

A machine (1) and a method for thermobonding using an emission of electromagnetic waves (13), for example microwaves, to activate one or a plurality of adhesive layers located between a support and one or a plurality of layers of flexible covering, through a bed of particles (4) fluidized by a humidified gas. A multi-layer upholstery item including at least one non-permeable layer and produced in a single operation is also described.

Method and apparatus for lamination of substrates, e.g. rigid plastic layers, to manufacture laminated products. The methods include the sequential application of vacuum and mechanical force through a two-stroke process performed by a lamination apparatus having one or more force-producing stroke cylinders. Actuation of a cylinder to produce a first stroke creates a sealed chamber within the apparatus, enclosing a stack of substrates to be laminated. The sealed chamber may be evacuated of air by application of a vacuum. Subsequent actuation of a cylinder to produce a second stroke applies mechanical force to the sealed chamber, which compresses the substrates into a laminated product substantially free of air bubbles or voids.

A method and apparatus for laying composite tape. The method may comprise driving a plurality of robots, each having a respective movement system across a movement surface, in which the movement surface faces a workpiece, and laying composite tape from the plurality of robots in a coordinated manner on the workpiece.

The present invention relates to novel thermoplastic polyurethane (TPU) compositions that contain linear monohydric alcohols. The present invention provides for TPU compositions which may be applied at relatively low temperatures, but upon activation (e.g., activation by ultraviolet light), exhibits higher temperature and melt resistance.

The present invention relates to a process for detaching a component from an electronic assembly. In particular, the present invention relates to a process for detaching a component bonded with a liquid optically clear adhesive (LOCA) in a display module by using electromagnetic radiation (EMR).

The disclosed composite wood particulate products, adhesives contained in such wood particulate products, and methods of making the adhesive and the wood particulate products employ an aldehyde-free adhesive, and more specifically a formaldehyde-free adhesive. The aldehyde-free adhesive includes an inert additive that extends a resin, such as an isocyanate resin, and forms an evenly dispersed, less expensive polymeric adhesive admixture. The extender-filler of the resin is mixed with water to form a slurry. The slurry can then be mixed with a resin, like the isocyanate resin, to form the adhesive. Various rheology modifiers can be added, if desired, to the extender-filler or the slurry. The adhesive can be blended with wood particles to form a mat that is then pressed into a composite wood particulate product.

The present disclosure provides a substrate processing apparatus capable of preventing a heating process from having adverse effects on an operation of supplying gas, even though a shower head is used to supply gas onto a substrate. The substrate processing apparatus includes: a process module having a process chamber where a substrate is processed; a substrate loading/unloading port; a cooling mechanism; a substrate support; a heating unit; a shower head including a dispersion plate made of a material having a first thermal expansion rate; a dispersion plate supporting unit made of a material having a second thermal expansion rate different from the first thermal expansion rate; a first position regulating part configured to regulate positions of the dispersion plate and the dispersion plate supporting unit; and a second position regulating part configured to regulate the positions of the dispersion plate and the dispersion plate supporting unit.

A paperboard or fiberboard sheet is provided with at least one preapplied adhesive strip used to connect together and an adjacently positioned surface protector to form a dust-proof and/or liquid-proof seal between the two surface protectors.

A method of forming a vacuum insulated refrigerator cabinet structure includes providing a multi-layer sheet of material comprising at least one layer of barrier material that is disposed between first and second outer structural layers. The barrier material and the first and second outer layers comprise thermoplastic polymers. The multi-layer sheet of material is thermoformed to form a non-planar first component having a central portion and four sidewalls extending transversely from the central portion. The method further includes securing a second component having a central portion and four sidewalls extending transversely from the central portion to the first component to form an interior space therebetween. Porous filler material is positioned in the interior space, and a vacuum is formed in the interior space. The first and second components are sealed together to form a vacuum insulated refrigerator cabinet structure.

A self-masking label and method of use for wrapping about elongate articles. The label includes a series of label sections positioned end-to-end along the length of the label and supported on a carrier strip during printing. A first label section is configured to be marked or printed with indicia; a second label section may be transparent; a third label section is arranged to overlap the first and second sections and to cover and protect the indicia, during for example, an over-coating procedure; and a fourth label section includes a non-sticky tab section.

The invention relates to an electrode structure for ICP etcher, including: inductive coils, inductive coil connectors, connect rods and sleeve; in which, inductive coils are set on insulation window and insulation window is set on chamber lid; two ends of the connect rods respectively connect inductive coils and inductive coil connectors; the sleeve is made of conductive material and grounded; first end of the sleeve is covered by a cap while the second is opening; the cap has holes, and the connect rods are set pass through the holes and isolated from the cap; the opening of sleeve is set toward inductive coils, and the inductive coils are shielded inside the sleeve. This invention shields electromagnetic field generated by inductive coil connectors outside the sleeve to avoid influence of even electromagnetic field generated to inductive coils, and guarantee even etching.

A plasma system includes a source electrode, an RF source power generation unit, an RF source power output unit, and a source power output managing unit. The source power output managing unit determines an amplitude and a duty cycle of a pulse RF source power based on information on an amplitude of a continuous wave RF source power.

A dry etching apparatus includes a process chamber, a stage, a gas supply device and a plasma generating device. The stage is in the process chamber and is configured to support a wafer, wherein the wafer has a center region and a periphery region surrounding the center region. The gas supply device is configured to supply a first flow of an etching gas to the center region and supply a second flow of the etching gas to the periphery region. The plasma generating device is configured to generate plasma from the etching gas.

The present invention provides a temperature adjusting apparatus for a focus ring, wherein heat radiated from the plasma onto the focus ring is transferred downward to a base through the first heat conducting pad contacting a lower surface of the focus ring, an insulating ring contacting a lower surface of the first heat conducting pad, and the second heat conducting pad contacting a lower surface of the insulating ring, so as to be cooled by a cooling system provided at the base; turning on a heater disposed in a grounded shielding ring to generate a controllable external heating source, heat from the heater being transferred to the focus ring through the shielding ring, a third heat conducting pad contacting the shielding ring, the insulating ring contacting the third heat conducting pad, and the first heat conducting pad, so as to perform controllable warming to the focus ring. By providing a good heat conduction path in conjunction with controllable heating power, the present invention achieves a fine control of the working temperature of the focus ring such that it is tunable in processing such as etching, thereby satisfying processing demands.

The present invention discloses a multi-zone active-matrix temperature control system, the control system having a temperature control matrix and a gate driver; the temperature control matrix comprising: N*M temperature control modules forming a N-row M-column matrix, a power supply line, and a power return line; each temperature control module comprising: a temperature control unit adapts to be heated up by electrical power for temperature controlling; a semiconductor switch provided with a gate electrode connected with the gate driver, two ends of the gate, which turn on or off, being connected with the power supply line, and with the power return line through the temperature control unit, respectively. In the temperature control matrix, one ends, which are connected with a power return line, of the temperature control units of temperature control modules in a same row or same column are serially connected, and connected with the power supply line; one ends, which are connected with the power supply line, of the semiconductor switches of the temperature control modules at a same row or a same column are serially connected, and connected with the power supply line. The present invention may precisely perform temperature control to each zone of the electrostatic chuck and significantly reduces the number of electrostatic chuck lead-out lines.

Embodiments using immersion de-taping are described. A substrate having a substrate tape attached thereto is provided. The substrate includes electrically conductive connectors attached to the substrate tape. A fluid is provided between the substrate and the substrate tape. While the fluid is between the substrate and the substrate tape, the substrate tape is removed from the substrate. Another embodiment is an apparatus comprising an immersion tank, a substrate chuck, first and second fixed rollers, and a moveable roller. The substrate chuck is configured to secure a substrate and to place the substrate into the immersion tank. The first fixed roller is operable to dispense a clamp tape. The second fixed roller is operable to roll the clamp tape. The moveable roller is operable to extend into the immersion tank and to adhere the clamp tape to a substrate tape on the substrate.

A substrate processing apparatus, including: a process chamber configured to process a substrate, a transfer chamber adjoining the process chamber, a shaft installed in the transfer chamber, a substrate mounting stand connected to the shaft and including a heating part, a first thermal insulation part installed in a wall of the transfer chamber at a side of the process chamber, and a second thermal insulation part installed in the shaft at a side of the substrate mounting stand.

A refrigeration system includes: a compressor arrangement for compressing gaseous refrigerant from a first pressure to a second pressure, wherein the second pressure comprises a condensing pressure; a plurality of condenser evaporator systems, wherein each condenser evaporator system comprises: (1) a condenser for receiving gaseous refrigerant at a condensing pressure and condensing the refrigerant to a liquid refrigerant; (2) a controlled pressure receiver for holding the liquid refrigerant from the condenser; and (3) an evaporator for evaporating liquid refrigerant from the controlled pressure receiver to form gaseous refrigerant; a first gaseous refrigerant feed line for feeding the gaseous refrigerant at the second pressure from the compressor arrangement to the plurality of condenser evaporator systems; and a second gaseous refrigerant feed line for feeding gaseous refrigerant from the plurality of condenser evaporator systems to the compressor arrangement.

This invention relates to oil lubricated helium compressor units for use in cryogenic refrigeration systems, operating on the Gifford McMahon (GM) or Brayton cycle. The objective of this invention is to provide redundancy by having a water cooled compressor manifolded to an air cooled compressor and sensors to detect faults so that an expander can be kept running if there is a failure in either the water or air supply.

A variable refrigerant package air conditioner is shown that is easy to install in new construction with a unique base that causes collected mixture that overflows to drain outside the building. A control system is shown that has motors and compressor that are pulse width modulated so the air conditioner is infinitely variable while maintaining the highest possible power factor. Dehumidification of outside air occurs as it is mixed with inside air. By gradually approaching a temperature set point and even reheating after dehumidification, moisture is removed from the room.

A heat exchange apparatus includes a first heat exchanger configured to transfer heat between a refrigerant and another medium, a plurality of second heat exchangers configured to transfer heat between the refrigerant and the liquid, a compressor configured to pressurize the refrigerant and a plurality of expansion devices for each of the plurality of second heat exchangers and configured to expand the refrigerant pressurized by the compressor, wherein the refrigerant flows through the plurality of second heat exchangers in parallel, and the liquid flows through the plurality of second heat exchangers in series.

An evaporator and methods of using the same are described herein. A vapor-compression refrigeration apparatus in accordance with an embodiment of the present technology utilizes a fluid refrigerant and can include a compressor, a condenser, an expansion device and an evaporator arranged in succession and in fluid communication within a closed loop in order to circulate the fluid refrigerant. The apparatus can include at least one line within the closed loop in operable communication with the condenser for reducing temperature of at least a portion of the fluid refrigerant coming from the condenser prior to the fluid refrigerant entering the expansion device.

Apparatus for and method of rapidly chilling a beverage in which a vessel having high thermal mass relative to the amount of beverage to be introduced into the vessel is cooled through contact with a cooling module to a temperature low enough that a volume of beverage introduced into the vessel is rapidly cooled.

The disclosed apparatus cools a drinking liquid utilizing the Peltier effect, and optionally includes a system of gasification for gasifying the drinking liquid, once cooled. The cooling system in turn includes: a first cooling circuit, in which an operating fluid circulates, associated with a hot side of a Peltier cell; and a second cooling circuit, in which the drinking liquid circulates, associated with a cold side of the Peltier cell. The Peltier cell is integrated in a cooling unit exhibiting a special sandwich structure which integrates, as well as the Peltier cell, a first and a second heat exchanger, apt respectively to exchange directly the heat between the operating fluid which circulates in the first cooling circuit and the hot side of the Peltier cell and between the drinking liquid which circulates in the second cooling circuit and the cold side of the Peltier cell to cool the drinking liquid.

Disclosed herein is a powered air cooling device contained within a single portable unit and a method of using said device. The portable solar powered cooling unit can include some or all of the following: solar panels, a rechargeable power source, a thermostat unit, a thermoelectric (TE) cooling unit, a heat dissipation unit, a cooling unit resembling a heat sink or an actual heat sink, an air distribution device, for example in one preferred embodiment, a low power high volume fan, and a structure that directs air intake and outflow. The unit features the ability to maintain a stable ambient air temperature via heating, cooling, humidity control, or all of the above. The unit may also feature a form factor which allows the dissipation of the desired cooling or heating to occur at a faster rate. The unit itself although portable, may be fixed in place for more permanent applications. The unit can be used to provide temperature and humidity control.

A device includes a substrate, a micro-electro-mechanical system (MEMS) device disposed on the substrate, a controller disposed on the substrate, a heating element, and an enclosure. The heating element is configured to generate heat in response to a signal generated by the controller. The enclosure encloses the MEMS sensor device, the controller, and the heating element. The controller is configured to generate the signal responsive to temperature measurements within the enclosure. The signal causes the heating element to generate heat and maintain a predetermined temperature within the enclosure.

Embodiments of the present disclosure relate to a vapor compression system that includes a refrigerant loop, a compressor disposed along the refrigerant loop and configured to circulate refrigerant through the refrigerant loop, a condenser disposed downstream of the compressor along the refrigerant loop, where the condenser includes a plurality of tubes disposed in a shell and a diffusion area configured to enhance thermal energy transfer within the condenser, where the diffusion area is defined by a cavity of the condenser without a tube of the plurality of tubes, and an evaporator disposed downstream of the condenser along the refrigerant loop.

Embodiments of the present disclosure relate to a vapor compression system that includes a refrigerant loop, a compressor disposed along the refrigerant loop and configured to circulate refrigerant through the refrigerant loop, and a heat exchanger disposed along the refrigerant loop and configured to place the refrigerant in a heat exchange relationship with a cooling fluid. The heat exchanger includes a water box portion having a first length, a shell having a second length, a plurality of tubes disposed in the shell and configured to flow the cooling fluid, and a cooling fluid portion having a third length, where the water box portion and the cooling fluid portion are coupled to the shell, such that the first length, the second length, and the third length form a combined length of the heat exchanger that is substantially equal to a target length.

A heat exchange device has a plate stack unit obtained by continuous stacking of a plurality of plates. This plate stack unit includes a condenser unit, an evaporator unit, and an internal heat exchange unit. The condenser unit is configured such that a passage for allowing a high pressure refrigerant to flow, and a passage for a heat medium for absorbing heat from the high pressure refrigerant are stacked between a set of plates among the plurality of plates. The evaporator unit is configured such that a passage for allowing a low pressure refrigerant to flow, and a passage for a heat medium for applying heat to the low pressure refrigerant are stacked between a set of plates among the plurality of plates. The internal heat exchange unit is configured such that a passage for allowing the high pressure refrigerant to flow, and a passage for allowing the low pressure refrigerant to flow are stacked between a set of plates among the plurality of plates.

Embodiments of the present disclosure relate to a vapor compression system that includes a refrigerant loop, a compressor disposed along the refrigerant loop and configured to circulate refrigerant through the refrigerant loop, a condenser disposed downstream of the compressor along the refrigerant loop and configured to condense vapor refrigerant to liquid refrigerant, a subcooler coupled to the condenser, where the subcooler is external of a shell of the condenser, and where the subcooler is configured to receive the liquid refrigerant from the condenser and to cool the liquid refrigerant to sub cooled refrigerant, and an evaporator disposed downstream of the subcooler along the refrigerant loop and configured to evaporate the subcooled refrigerant to the vapor refrigerant.

A downstream-side passage of an expansion valve includes a small-diameter part to which a valve hole and an insertion hole are open, and a large-diameter part to which a pipe leading to an evaporator is connected. A plate has a shield part partially covering a downstream end of the small-diameter part. The shield part has a height of 2 mm or larger in a radial direction of the small-diameter part from a projected position of an opening of the insertion hole at the downstream end of the small-diameter part, and a width equal to or larger than a radius of the shaft within a range of the height. The plate is provided so that the shield part does not cover at least a range of projection of an opening of the valve hole at the downstream end of the small-diameter part.

An electronic expansion device includes a main body having inlet and outlet side faces; an inlet disposed on the inlet side face; an orifice formed in the main body between the inlet side face and the outlet side face; a flow path fluidly connecting an inlet side of the orifice and an outlet side of the orifice, the flow path configured to redirect an inlet flow and provide an outlet flow; an outlet disposed on the outlet side face, the outlet being in fluid communication with the inlet via the orifice and the flow path; and a flow control device including an electric motor and a sealing member, the sealing member extending through the main body between the inlet and the outlet, wherein the sealing member is movable into and out of the main body to control the outlet flow of a fluid.