A method of forming oral orthotic systems includes providing an upper dental member adapted to be placed in connection with upper dentition of the patient, providing a lower dental member adapted to be placed in connection with lower dentition of the patient and providing a plurality of posterior mounting structures. Each of the posterior mounting structure is configured to be attached to one of the upper dental member or the lower dental member at a posterior, buccal position thereon. Force may be applied to the mandible of the patient via at least one of a plurality of different types mechanisms via attachment of a component of a selected type mechanism to at least one of the posterior mounting structures.

A system and method for creating a medicated atmosphere in an organ, or body cavity is disclosed. The system includes a flexible nebulization catheter that can be manipulated during use, a device for the introduction of the nebulization catheter, a medication delivery apparatus configured to control delivery of a medication to the catheter, a gas delivery apparatus in communication with the catheter, a gas pressure relief apparatus configured to relieve pressure in the organ or body cavity, and a central controller. The system may include a liquid source having a mixture of hyaluronic acid and heparin that, in conjunction with the nebulizing catheter, are designed to generate an aerosol with a particle size of 10-25 microns in a body cavity. The method includes providing an aerosol of anti-adhesive medication to an organ or body cavity while controlling overall pressure in the organ or cavity.

An intelligent bionic expectoration system and a three-way device thereof. The intelligent bionic expectoration system includes a negative pressure suction module, a central processing module, a patient interface unit and a respiratory muscle synchronous motion module. The central processing module controls two valves to open or close, closing one valve while opening another valve, and controls the respiratory muscle synchronous motion module. The patient interface unit is connected to the positive pressure ventilation module and the negative pressure suction module, allowing positive or negative pressure airflow to flow by, depending on which valve is open, so as to allow airflow to flow in or out of the lung. The respiratory muscle synchronous motion module can employ nerve stimulation and mechanical pushing, and acts synchronously as the airflow moves, thereby simulating human coughing and achieves bionic expectoration.

In certain example embodiments, a system and/or method of guiding transitions between therapy modes in connection with the treatment and/or diagnosis of a patient for a respiratory disorder is/are provided. Respiratory disorder treatment according to a first therapy mode is provided. Input indicating a second therapy mode to be transitioned to following provision of the first therapy mode is received, with the second therapy mode being different from the first therapy mode. At least one default treatment parameter suitable for the second therapy mode is assigned or calculated. Each default treatment parameter of the second therapy mode is presented, with each default treatment parameter being adjustable by an operator during the presenting. Transitioning from the first therapy mode to the second therapy mode is performed by providing respiratory disorder treatment in accordance with the second therapy mode and each default treatment parameter and any adjustments made thereto prior to the transitioning. Advantageously, the chances of a patient being disturbed by transitioning from mode-to-mode are reduced.

An inner cannula (20) for a tracheostomy tube assembly includes a thin, inner sheath (22) supported externally by a structural frame (23) having a longitudinal portion (25) and a plurality of ribs (26) extending circumferentially and spaced along the cannula. The inner cannula (20) is inserted within and is removable from an outer tracheostomy tube (1). The inner cannula (20) is made by coating a plastic layer on a core to form the sheath and then placing the sheath on a curved core. The structural frame (23) is then moulded about the sheath (22) in a mould 80.

A patient tube securement apparatus is disclosed that may be used for oral or nasal intubation of a patient. The apparatus may comprise an endotracheal tube securement apparatus for securing an endotracheal tube to a patient, the apparatus comprising a dermal patch arranged to be positioned on the skin of the patient, and at least one tube holder on the dermal patch.The apparatus may comprise a patient tube securement apparatus for securing a patient tube to a patient, the apparatus comprising a dermal patch arranged to be positioned on the skin of the patient, and at least one tube holder on the dermal patch.Examples are provided in which the tube holder is adjustably mounted on the dermal patch such that the position of the tube holder on the dermal patch can be adjusted without removing the dermal patch from the skin of the patient.

A patient interface assembly having an improved support for use in securing a patient interface device to the head of a patient overcomes the shortcomings of conventional headgear. The improved support provides a self-adjusting anchor point situated anterior to the ear of the patient that provides enhanced stability in mounting the patient interface device to the patient.

A system provides warm, humidified gas to a patient via a patient interface. Horizontal connections can be used between the humidification chamber and conduit. To reduce the likelihood of condensate flowing back to the humidification chamber, or dead space or gases recirculation regions occurring within the gases flow path, a raised portion is positioned inside of the flow path to improve flow characteristics and to provide a barrier for condensate back flow. The raised portion also reduces the amount of condensate that is formed in the system and provides better flow characteristics for sensing purposes.

An umbilical system for sourcing and delivering within a flexible protective covering, a plurality of different breathing gasses, safety tether, a plurality of ancillary lines for remotely distributable, documentable, multidirectional, multi-format data/communications acquisition and delivery, personal/situational awareness and ancillary power sources for tool, accessory or device enervation, to a plurality of Users in an adverse environment.

An oral-nasal cannula receives exhaled gases from the nose and mouth of a patient. The exhaled gases are transported to variable flow valves that can variably restrict the flow of the gases through the valves upon software generated signals. The exhaled gases pass through the variable flow valves and mix so that they can be measured by a single sensor such as a sensor of a capnometer. Based upon information gathered by the capnometer, the variable valves can be adjusted in real-time according to a software method in order to identify a variable valve flow configuration that maximizes the amount of CO2 received and measured by the capnometer. In this manner, the software can adapt a single capnometer to measure exhaled gases regardless of whether a patient breathes primarily through their nose or mouth or some proportion of the two.

An example method for detecting respiratory disturbances experienced by a subject can include receiving an airflow signal and at least one of an acoustic or vibration signal, where the airflow, acoustic, and/or vibration signals are associated with the subjects breathing. At least one feature can be extracted from the airflow signal and at least one feature can be extracted from at least one of the acoustic or vibration signal. Based on the extracted features, at least one respiratory disturbance can be detected. The respiratory disturbance can be flow limited breath or inspiratory flow limitation (“IFL”).

Certain embodiments are directed to a specimen retrieval device having a high friction inner lining for reducing specimen deformation during removal. Certain embodiments are directed to a device that facilitates isolation and removal of specimens during minimally invasive surgery. In certain aspects the device is configured to disperse pulling tension over a larger area reducing the likelihood of specimen tearing during removal. The device enables quicker removal through a smaller hole or opening in the body wall.

Systems and methods for effecting posture of a subject who is to be positioned on a support surface having an inclinable portion such that the subject's thorax is inclinable relative to the subject's legs, are provided. An example system includes a detachedly coupleable thoracic harness having at least an inner surface and an outer surface. The inner surface being contoured to fit over shoulders of the subject. The outer surface having a fastening surface that releasable attaches to a corresponding fastening surface disposed on the inclinable portion of the support surface.

The invention pertains to positioning a patient in prone position, comprising: positioning a patient in a supine position,attaching a chest body contact sheet to the chest of the patient with an attached inflatable chest cushion in the deflated state,attaching a pelvic body contact sheet to the pelvic region of the patient with an attached inflatable pelvis cushion in the deflated state,transferring the patient from the supine position to a prone position,with the chest body contact sheet attached to the chest of the patient and the pelvic body contact sheet attached to the pelvic region of the patient and the patient in the prone position, inflating the chest cushion and the pelvis cushion, thereby making that the chest cushion and the pelvis cushion together bear the weight of the torso of the patient with the abdominal region of the patient being decompressed. The invention is based on a combination of anatomy and physiology that is used for a reliable positioning the patient, which is safe for the patient and safe, hygienic and user friendly for the medical team.

An assembly for a counter mechanism for a drug delivery device is described comprising a drive member, wherein the drive member is adapted and arranged to be rotated in a first rotational direction and to be prevented from rotation in a second rotational direction which direction is opposite to the first rotational direction, an advancing member adapted and arranged to be axially moved and rotated with respect to the drive member, wherein the advancing member is adapted and arranged to mechanically cooperate with the drive member such that the drive member is rotated in the first rotational direction, and a display member which is configured to count a number of doses and to display the counted number of doses, wherein the assembly is adapted and arranged such that rotation of the drive member in the first rotational direction is converted into a counting movement of the display member. Furthermore, a drug delivery device comprising the assembly is described.

This disclosure describes systems and methods for controlling pressure and/or flow during exhalation. The disclosure describes novel exhalation modes for ventilating a patient.

A method and a control program for operating an anesthesia apparatus, as well as an anesthesia apparatus (12), which operates according to the method are provided. The anesthesia apparatus includes a breathing gas feed unit (22) intended for displacing a breathing gas volume in a breathing circuit (10). A piston (23) brings about the displacement of the breathing gas. Switching over between a first mode of operation and a second mode of operation during the return of the piston (23) allows for a presetting of a corresponding piston return velocity. The piston return velocity depends on a volume flow in an exhalation branch (34) of the breathing circuit (10) in the first mode of operation. The piston return velocity depends on a minimally necessary piston return velocity in the second mode of operation.

A respiratory mask or other sealing interface can be used in combination with a nasal cannula or other unsealing interface in providing respiratory therapies for the treatment of COPD or OSA. The mask can act as a pressure vessel over the top of a nasal cannula, with the intention of increasing expiratory pressure whilst allowing the nasal cannula to provide a user with breathing gases of a high humidity and temperature. The ability to selectively apply increased expiratory pressure may be effective in reducing a user's breathing rate and thus beneficial in the treatment of respiratory distress.

A patient monitoring system is configured to monitor oxygen saturation and/or oxygenation of a patient's blood. The system is configured to re-oxygenate the patient in response to a determination that the patient's oxygen saturation and/or oxygenation has fallen below a threshold (e.g., if the patient is experiencing hypoxemia). A re-oxygenation routine may include an initial step of rapidly oxygenating the patient, followed by a reduction of oxygenation to make the oxygenation process more gradual. For instance, after the initial step of rapid oxygenation, the patient may be oxygenated with oxygen at an atmospheric level. The system may dynamically adjust the ratio of delivered oxygen versus delivered air, the duration of oxygenation, and the incidence of oxygenation. The system may also adjust the automated delivery of one or more drugs to the patient based on the patient's condition and/or the state of re-oxygenation.

Methods, systems, and apparatuses are described that indicate an amount at which various gas flow rates should be manually adjusted in order to achieve targeted total flow rates and concentration levels.

A supplemental oxygen delivery system is described in which Aerosol is delivered into a housing 10, 20, which sits in the circuit from the supplemental oxygen supply and optional humidifier. The supplemental oxygen passes through this chamber 10, 20 in which the aerosol is located, and collects the aerosol transporting it to a patient via a nasal cannula 3 or a face mask 4. An aerosol generator 9 is mounted to the housing 10, 20 and delivers aerosol into an oxygen stream 13 flowing between an inlet 14 and an outlet 15 of the housing 10. The housing 10 also has a removable plug 16 in the base 17 thereof for draining any liquid that accumulates in the housing 10. There is no disruption of oxygen delivery to patients using nasal cannulas who currently have to use a separate face-mask when receiving nebulized medication.

A device comprising: a receive antenna configured to receive a first radio-frequency (RF) signal having a first center frequency; a first transmit antenna configured to transmit a second RF signal having a second center frequency that is a harmonic of the first center frequency; a second transmit antenna configured to transmit a third RF signal having a third center frequency that is a harmonic of the first center frequency and is different from the second center frequency; first circuitry, coupled to the receive antenna and to the first transmit antenna, configured to generate the second RF signal using the first RF signal and provide it to the first transmit antenna for transmission; and second circuitry, coupled to the receive antenna and to the second transmit antenna, configured to generate the third RF signal using the first RF signal and provide it to the second transmit antenna for transmission.

A multi-use antenna system that can be used in, for example, integrated communications and navigation capability is provided. In an embodiment, an antenna system is provided. The antenna system includes a first antenna having a plurality of radiating elements substantially wrapped around an axis and a second antenna located within the first antenna. The first and second antennas are coupled to the same ground plane and are configured to operate in different frequency bands.

Antenna system for a georadar, comprising two plate like antenna devices, where said two antenna devices comprise at least one sender antenna (1) and at least one receiver antenna (2), respectively, as the antennas (1,2) in each antenna device comprise monopoles formed by applying to metal surfaces an electrically insulating plate base (3) located on the underside of a layer of radar absorbing material (4), where the top side of the material layer is covered by a metallic ground plane (5). The antenna device is also arranged to lay against the ground (10). A layer of radar absorbent material (4) is arranged on the top side of the ground planes (5), and the ground planes (5) are not connected electrically to each other.

Various integrated high quality electronic components and systems, and methods of their manufacture, are presented. In one example, a device includes a glass substrate or interposer including one or more metalized through-glass vias (TGVs). The one or more metalized TGVs can be used to form a substrate integrated waveguide, a complementary split ring resonator, a disc loaded monopole antenna or other device. An array of metalized TGVs can define side walls of the integrated waveguide. A disc coupled to a tip of a metalized TGV can provide capacitive disc loading of the monopole antenna.

An antenna assembly includes a looped but open metallic antenna and a flat ceramic antenna within the loop of the metallic antenna. The metallic antenna includes a first end portion and a second end portion at two ends. The ceramic antenna is surrounded by the metallic antenna. The first end portion is connected to the ceramic antenna and the second end is a free end, and the output power of wireless signals thusly radiated is increased at given frequencies.

Various systems and methods for radiating RF transmissions outside of a portable electronic device with a conductive case. In an embodiment, this solution includes a conductive enclosure, a circuit board within the conductive enclosure, at least one non-conductive gap between the circuit board and the conductive enclosure, and a radio frequency (RF) connection between the circuit board and the conductive enclosure. The combination of enclosure and gaps can excite certain radiation modes at high frequency bands, such as a cavity-backed lambda-long slot radiation mode.

A transmission apparatus includes a first metal plate including a first surface, a second surface opposite to the first surface, and a first through hole penetrating from the first surface to the second surface, the first metal plate; a first board being disposed on the first surface side of the first metal plate, the first board including a first patch antenna positioned inside the first through hole; and a second board being disposed on the second surface side of the first metal plate, the second board including a second patch antenna positioned inside the first through hole and opposed to the first patch antenna, wherein an interval between the first patch antenna and the second patch antenna is set in accordance with a distance for wireless communicating between the first patch antenna and the second patch antenna in a near field.

Techniques and mechanisms to provide satellite communication functionality with an antenna assembly. In an embodiment, a communication device includes an antenna panel (comprising one or more holographic antenna elements), a housing and hardware interfaces which facilitate operation of the communication device has a module of the antenna display. A cross-sectional profile of the housing may conform to a polygon other than any rectangle. A configuration of the housing and hardware interfaces may facilitate the formation of an antenna assembly arrangement other than that of any rectilinear array. In another embodiment, communication devices of the antenna assembly each conform to a triangle or a hexagon.

Techniques and mechanisms to provide a motor vehicle with connectivity for satellite communications. In an embodiment, a communication device is disposed between an exterior surface of the motor vehicle and an interior surface of the motor vehicle. An antenna panel, disposed in a housing of the communication device, may be configured to participate in satellite communication via a first side of the communication device. A configuration of the antenna panel, the housing or one or more hardware interfaces of the communication device may facilitate low profile solution for such communication with the satellite. In another embodiment, the one or more hardware interfaces are each disposed on a respective side of the housing other than the first side, the one or more hardware interfaces to couple the communication device to a power supply of a motor vehicle.

An antenna arrangement is provided. The antenna arrangement includes a first antenna element and a second antenna element. An inductance coil is coupled to the first antenna element and the second antenna element.

A waveguide device includes a first electrically conductive member having a first electrically conductive surface; a second electrically conductive member having a second electrically conductive surface which opposes the first electrically conductive surface; and a ridge-shaped waveguide member on the second electrically conductive member. The second electrically conductive member has a throughhole which splits the waveguide member into first and second ridges. The first and second ridges each have an electrically conductive end face, the end faces opposing each other via the throughhole. The opposing end faces and the throughhole together define a hollow waveguide. The hollow waveguide is connected to a first waveguide extending between the waveguide face of the first ridge and the first electrically conductive surface, and to a second waveguide extending between the waveguide face of the second ridge and the second electrically conductive surface.

A tracking antenna system for discrete radio frequency spectrums includes a reflector, a pedestal supporting the reflector, a radome assembly enclosing both, a first feed for gathering radio waves within a first of discrete RF spectrums that is removably disposed in front of the reflector at the focal point, a first RF module operably connected to the first feed for converting the first gathered radio waves to first electronic signals, a feed mount for removably supporting the first feed and configured to removably support a second feed for gathering radio waves within a second of discrete RF spectrums, and a module mount for removably supporting the first RF module and configured to removably support a second RF module for converting the second radio waves to second electronic signals. A method of using the tracking antenna system adaptable for discrete radio frequency spectrums is also disclosed.

A slot array antenna includes: a first conductive member having a first conductive surface and a plurality of slots therein, the slots being arrayed in a first direction and in a second direction which intersects the first direction; a second conductive member having a second conductive surface which opposes the first conductive surface; a plurality of waveguide members arrayed between the first and second conductive members along a direction which intersects the first direction, each waveguide member having an conductive waveguide face which extends along the first direction so as to oppose at least one of the slots; and an artificial magnetic conductor in a subregion which is within a region between the first and second conductive members but outside of a subregion containing the waveguide members. Neither an electric wall nor an artificial magnetic conductor exists in a space between two adjacent waveguide faces among the waveguide members.

An antenna device includes: an antenna array configured to radiate or receive an electromagnetic wave signal; a feed network configured to connect the antenna array and a signal multiplexer; at least one signal multiplexer configured to divide one path of a signal from the feed network into at least two paths of a signal, or combine at least two paths of a signal to one path of a signal and transmit the one path of a signal to the feed network; and at least two interface modules connected to an active module and configured to receive a signal sent from the passive module or the active module, or send a signal to the active module. The antenna device can be used for sharing the antenna array and other parts in the active antenna systems.

A device comprising a plurality of metallic conical radiators, said conical radiators substantially hollow having a vertex end and a base end, a first cylindrical portion disposed annularly about the base end of the conical portion, a metallic second cylindrical portion coupled to the vertex of the conical portion, said cylindrical portion having a threaded aperture, and an antenna feed coupled to the threaded aperture. The device may have patches disposed on a substrate as a one or multi-dimensional array. An RF feed may be coupled to the radiators.

An optical system (110) includes a lens unit (112) with a plurality of lenses. An out-of-focus point spread function of the lens unit (112) includes an annular intensity distribution with at least one ring-shaped side peak at a radial distance to a center point. A birefringent device (115) in an optical path of the optical system (110) is adapted to selectively attenuate the ring-shaped side peak in the out-of-focus point spread function of the lens unit (112).

A semiconductor device includes a substrate, a first thin film transistor supported on the substrate and having a first active layer that primarily contains a first oxide semiconductor, and second thin film transistor supported on the substrate and having a second active layer that primarily contains a second oxide semiconductor with a higher mobility than the first oxide semiconductor. The first active layer and the second active layer are positioned on the same insulating layer and contact the same insulating layer.

A circuit board is provided and the circuit board is used for being attached to a matching board. The circuit board includes a first circuit pattern and an attaching state inspection area, and the attaching state inspection area further includes a third circuit pattern. A liquid crystal display device is further provided, including the circuit board and the matching board, the matching board includes a second circuit pattern matching the circuit board. It is more accurate to judge the attaching state between the circuit board and the matching board by detecting the deformation state of the conductive particles in vacant areas at different locations after the circuit board is attached to the matching board.

To provide a liquid crystal display device, in which the vertical alignment property of the liquid crystal is high, favorable transparency when no voltage is applied and favorable scattering property when a voltage is applied are achieved, and the adhesion between the liquid crystal layer and the vertical liquid crystal alignment film is high. A liquid crystal display device, which comprises a liquid crystal layer formed by disposing a liquid crystal composition containing a polymerizable compound which undergoes a polymerization reaction by ultraviolet rays, between a pair of substrates provided with an electrode, and irradiating the liquid crystal composition with ultraviolet rays and curing it in such a state that the liquid crystal composition partly or entirely shows liquid crystallinity, and at least one of the substrates being provided with a liquid crystal alignment film to vertically align a liquid crystal, wherein the liquid crystal alignment film is a liquid crystal alignment film obtained from a liquid crystal aligning agent containing a polymer having a first side chain structure and a second side chain structure.

According to one embodiment, a laminated film includes a first adhesive layer, a first insulating layer which faces the first adhesive layer, a first metal layer which is located between the first adhesive layer and the first insulating layer, and a first porous layer which is located between the first adhesive layer and the first insulating layer and faces the first metal layer.

An analytical tool is provided for analysis of a sample by capillary electrophoresis. The analytical tool includes an inlet reservoir into which a sample is introduced, a capillary tube in communication with the inlet reservoir, a filter through which a liquid from the inlet reservoir passes, an enlarged portion undergoing a sudden increase in a cross-sectional area and being in communication with the inlet reservoir and the capillary tube, and a pressure fluctuation reducer for preventing pressure fluctuation at the enlarge portion from affecting a liquid in the capillary tube.

A single molecule sensing or detecting device includes a first electrode and a second electrode separated from the first electrode by a gap. The first electrode and the second electrode have an opening formed therethrough. At least one of the first electrode and the second electrode is functionalized with a recognition molecule. The recognition molecule has an effective length L1 and is configured to selectively bind to a target molecule having an effective length L2. The size of the gap is configured to be greater than L2, but less than or equal to the sum of L1 and L2.

Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, a method for treating an exhaust gas in an exhaust conduit of a substrate processing system includes: flowing an exhaust gas and a reagent gas into an exhaust conduit of a substrate processing system; injecting a non-reactive gas into the exhaust conduit to maintain a desired pressure in the exhaust conduit for conversion of the exhaust gas; and forming a plasma from the exhaust gas and reagent gas, subsequent to injecting the non-reactive gas, to convert the exhaust gas to abatable byproduct gases.

Microfluidic devices having an electrowetting configuration and an optimized droplet actuation surface are provided. The devices include a conductive substrate having a dielectric layer, a hydrophobic layer covalently bonded to the dielectric layer, and a first electrode electrically coupled to the dielectric layer and configured to be connected to a voltage source. The microfluidic devices also include a second electrode, optionally included in a cover, configured to be connected to the voltage source. The hydrophobic layer features self-associating molecules covalently bonded to a surface of the dielectric layer in a manner that produces a densely-packed monolayer that resists intercalation and or penetration by polar molecules or species. Also provided are microfluidic devices having an electrowetting configuration that further include a section or module having a dielectrophoresis configuration; systems that include any of the microfluidic devices in combination with an aqueous droplet and a fluidic medium immiscible with the medium of the aqueous droplet; related kits; and methods of manipulating droplets, optionally containing micro-objects such as biological cells, within the microfluidic devices.

Certain exemplary aspects of the present disclosure are directed towards an apparatus for electrostatic fluid filtration. The apparatus utilizing alternating positive and negative electrodes in conjunction with filter media there between to filter contaminants from a fluid flow.

A process train for a floating production storage and offloading installation includes a crude oil storage tank equipped with at least one set of electrostatic internals. The set of electrostatic internals are arranged to provide a treatment flow path within the crude oil storage tank oblique to a longitudinal centerline of the crude oil storage tank and through an electric field provided by the set of electrostatic internals. Employing these electrostatic internals within the tank permits an allowable inlet water content into the tank of up to 80%, significantly reducing the required topside processing equipment. The process and system also includes, upstream of the tank, two separator vessels arranged in parallel so each receives a portion of an incoming oil-and-water stream, a flash vessel arranged downstream of the two separator vessels, and a degasser vessel. Downstream of the crude oil storage tank is an electrostatic treater.

A system and method for dehydrating crude oil on a floating production storage and offloading installation include a separator vessel to receive an incoming produced water stream, followed by a flash vessel, a treatment block, a crude oil storage tank, and an electrostatic treater. The treatment block includes a low pressure degasser followed by a compact electrostatic separator pre-treater or a compact electrostatic separator pre-treater followed by a low pressure degasser. The flash vessel and/or the low pressure degasser may employ an inlet cyclonic distributor and demisting cyclones, while the electrostatic treater may employ DUAL FREQUENCY® technology. The separator vessel may be a single horizontal two-phase separator/degasser or two vertical two-phase separator/degassers that operate in parallel with each receiving approximately 50 percent of the incoming produced water stream. The final outlet stream preferably contains no more than 0.5 BS&W and 285 milligrams per liter salt.

For coating substrates (S) having along their surfaces to be coated high aspect ratio vias, a sputtering system has a sputtering source arrangement, which includes a first DC pulse operated magnetron sub-source (1203) and a second frame-shaped magnetron sub-source (1213) which latter is arranged, in the system, between the substrate (S) and the first magnetron sub-source (1203). The second magnetron sub-source (1213) may be operated in DC, pulsed DC, thereby also HIPIMS mode. The first magnetron sub-source (1203) is advantageously also operated in HIPIMS mode. The substrate (S) is biased by an Rf power source (1253).

A magnetically enhanced low temperature high density plasma chemical vapor deposition (LT-HDP-CVD) source has a hollow cathode target and an anode, which form a gap. A cathode target magnet assembly forms magnetic field lines substantially perpendicular to the cathode surface. A gap magnet assembly forms a magnetic field in the gap that is coupled with the cathode target magnetic field. The magnetic field lines cross the pole piece electrode positioned in the gap. The pole piece is isolated from ground and can be connected to a voltage power supply. The pole piece can have negative, positive, floating, or RF electrical potentials. By controlling the duration, value, and sign of the electric potential on the pole piece, plasma ionization can be controlled. Feed gas flows through the gap between the hollow cathode and anode. The cathode can be connected to a pulse power or RF power supply, or cathode can be connected to both power supplies. The cathode target and substrate can be inductively grounded.