Disclosed are apparatus and method for decontaminating and sterilizing chemical and biological agents, which can efficiently decontaminate and sterilize high precision electronic devices, communication devices, computers or inside of vehicles and air planes contaminated with chemical and biological agent by using mixture of non-thermal atmospheric pressure air plasma and oxidizing peroxide vapor. The apparatus according to the present invention comprises a decontamination and sterilization chamber 10; a first fluid supplying line L1 and a second fluid supplying line L2, which are installed in the form of closed circuit between the inlet 11 and outlet 12 of the decontamination and sterilization chamber 10; a peroxide vapor supplier which is installed on the first fluid supplying line; and a non-thermal atmospheric pressure air plasma reactor 70 which is installed on the second fluid supplying line L2.

An electro-catalytic honeycomb for controlling exhaust emissions, which adopts to purify a lean-burn exhaust, comprises a honeycomb structural body, a solid-oxide layer and a cathode layer. The honeycomb structural body includes an anode, a plurality of gas channels, and a shell. The anode is formed as a backbone, the gas channels are formed inside the backbone for passing the exhaust, and the shell covers an outer surface of the anode. The solid-oxide layer is adhered to an inner surface of the anode and connects the shell so as to encapsulate the anode. The cathode layer is adhered to a tube wall of the solid-oxide layer and has an oxidizing environment. The anode has a reducing environment. The reducing and the oxidizing environment facilitate an electromotive force to occur between the anode and the cathode layer to promote a decomposition of nitrogen oxides of the exhaust into nitrogen and oxygen.

An analyte sensor system including a substrate, a first electrode disposed on a first surface of the substrate, a second electrode disposed on a second surface of the substrate, a third electrode provided in electrical contact with at least one of the first or second electrodes, where at least a portion of the first electrode and the second electrode are subcutaneously positioned in a patient, and where the third electrode is substantially entirely positioned external to the patient, and corresponding methods are provided.

An alignment film forming apparatus and a method are provided to form an alignment film for a liquid crystal in a single process of simultaneously executing a film deposition process of ion beam sputtering and an alignment process. The method greatly restricts the size of a substrate. An alignment film forming apparatus includes a target disposed on a top surface side of a substrate and having a sputtering surface defining a sharp angle to the top surface of the substrate, a transfer table that transfers the substrate in a predetermined direction, and an ion source disposed on the top surface side of the substrate in such a way that an ion beam is irradiated on the sputtering surface of the target. An ion beam reflected at the sputtering surface is irradiated on a sputtering film formed on the substrate. The apparatus includes a mask disposed in such a way as to cover a part of the top surface of the substrate on an upstream side of a position where the sputtering film is formed, and a temperature regulator which regulates the temperature of the target.

A reactive sputtering apparatus includes a chamber, a substrate holder provided in the chamber, a target holder which is provided in the chamber and configured to hold a target, a deposition shield plate which is provided in the chamber so as to form a sputtering space between the target holder and the substrate holder, and prevents a sputter particle from adhering to an inner wall of the chamber, a reactive gas introduction pipe configured to introduce a reactive gas into the sputtering space, an inert gas introduction port which introduces an inert gas into a space that falls outside the sputtering space and within the chamber, and a shielding member which prevents a sputter particle from the target mounted on the target holder from adhering to an introduction port of the reactive gas introduction pipe upon sputtering.

Provided is a sputtering apparatus which deposits a metal catalyst on an amorphous silicon layer at an extremely low concentration in order to crystallize amorphous silicon, and particularly minimizes non-uniformity of the metal catalyst caused by a pre-sputtering process without reducing process efficiency. This sputtering apparatus improves the uniformity of the metal catalyst deposited on the amorphous silicon layer at an extremely low concentration. The sputtering apparatus includes a process chamber having first and second regions, a metal target located inside the process chamber, a target transfer unit moving the metal target and having a first shield for controlling a traveling direction of a metal catalyst discharged from the metal target, and a substrate holder disposed in the second region to be capable of facing the metal target. A distance difference between a linear distance, which is a distance between a substrate loaded on the substrate holder and the metal target, and a length of the first shield is less than 3 cm.

Methods and systems for measuring the oxidation-reduction potential of a fluid sample are provided. The system includes a test strip with a sample chamber adapted to receive a fluid sample. The sample chamber can be associated with a filter membrane. The test strip also includes a reference cell. The oxidation-reduction potential of a fluid sample placed in the sample chamber can be read by a readout device interconnected to a test lead that is in electrical contact with the sample chamber, and a reference lead that is in electrical contact with the reference cell. Electrical contact between a fluid sample placed in the sample chamber and the reference cell can be established by a bridge. The oxidation-reduction potential may be read as an electrical potential between the test lead and the reference lead of the test strip.

Methods and apparatus for applying pulsed DC power to a plasma processing chamber are disclosed. In some implementations, frequency of the applied power is varied to achieve desired processing effects such as deposition rate, arc rate, and film characteristics. In addition, a method and apparatus are disclosed that utilize a relatively high potential during a reverse-potential portion of a particular cycle to mitigate possible nodule formation on the target. The relative durations of the reverse-potential portion, a sputtering portion, and a recovery portion of the cycle are adjustable to effectuate desired processing effects.

The present invention provides a manufacturing apparatus which can realize so-called sequential substrate transfer and can improve throughput, even when one multi-layered thin film includes plural layers of the same film type. A manufacturing apparatus according to an embodiment of the present invention includes a transfer chamber, three sputtering deposition chambers each including one sputtering cathode, two sputtering deposition chambers each including two or more sputtering cathodes, and a process chamber for performing a process other than sputtering, and the three sputtering deposition chambers, the two sputtering deposition chambers, and the process chamber are arranged around the transfer chamber so that each is able to perform delivery and receipt of the substrate with the transfer chamber.

A metal material is provided with a bismuth coating which enables the subsequent coating to be accomplished at a high throwing power, and has excellent corrosion resistance, coating adhesion and is able to be produced with reduced damage to the environment. The metal material has a surface and a bismuth-containing layer deposited on at least a part of the surface of the metal material, wherein the percentage of bismuth atoms in the number of atoms in the surface layer of the metal material with a bismuth coating is at least 10%.

A well, in particular an open well (14) with an upper end having a vertical axis (101), for containing a liquid and particles contained within said liquid, characterized by comprising at least two manipulation electrodes (1, 2, 3, 31, 32, 36, 17, 40, 41) able to be powered by electrical voltages, in particular alternating electrical voltages, so as to manoeuvre particles within the well by means of the dielectrophoretic effect. A platform comprising a plurality of wells as described above and a method for using said well.

A method to collect soil cores from a green comprises the steps of providing a soil core collector, extracting soil cores from a green, allowing the cores to dry for at least fifteen minutes, and utilizing the core collector to gather the cores from the green.

A machine includes a plurality of ground engaging elements and an operator control station supported on a frame. A work tool is pivotably attached to the frame using a lift arm assembly and a tilt linkage. At least one device measures a quantity associated with at least one of the lift arm assembly, the tilt linkage, and the work tool. An electronic controller, in communication with an operator display and the at least one device. The electronic controller is configured to store an operator selected orientation of the work tool, calculate a current orientation of the work tool based on the quantity, and calculate a deviation of the current orientation from the operator selected orientation. A visual representation of the deviation is displayed on the operator display.

An agricultural system includes an agricultural row unit movable on a field between a first soil condition and a second soil condition, the first soil condition having a different soil hardness than the second soil condition. A down-pressure actuator applies an initial first pressure associated with the first soil condition. A soil-hardness sensing device is positioned at a distance D forward of the row unit and outputs a soil-hardness change signal when detecting a change from the first soil condition to the second soil condition. At least one memory device stores instructions that, when executed by at least one processor, cause the down-pressure actuator to change, in response to receiving the soil-hardness change signal, the initial first pressure to a different second pressure when the row unit encounters the second soil condition.

A cleanup device having a first board having a first edge, a second board having a first edge, a first hinge attached to the first edge of the first board and the first edge of the second board, an aperture defined by a portion of the first edge of the first board and a portion of the first edge of the second board, a first plate slidably attached to the first board, wherein the first plate is movable from a first, open position where the aperture is open to a second, closed position where the first plate extends over at least a portion of the aperture, and wherein a top surface of the first board is movable towards a top surface of the second board to form a V-shaped surface for directing dirt or soil off of the first board and the second board.

A swing control apparatus and a swing control method for a construction machine are provided. The swing control apparatus includes a start position estimation unit, a stop target position calculation unit, and a swing motor position control unit. Even if an operator releases a lever or commands a stop at different times, an upper swing structure of the construction machine (for example, excavator) can be stopped within a predetermined range, and thus the inconvenience caused by an additional driving operation, which is required as the stop position differs according to the time point where the stop command starts, can be solved.

A turf cutter device, an infill extractor/collector device, and a turf wind-up device are used to facilitate the cost-effective removal of an infilled synthetic turf and the subsequent installation of a new turf at the same site, with minimal subsurface disruption. An infill extractor/collector device mounted on a motorized vehicle moves a relatively narrow strip of filled artificial turf from the surface, in front of the vehicle, and directs the strip to an infill removal station. The infill removal station inverts the strip and redirects the strip back toward the front of the vehicle, after agitating the strip to extract the infill. After redirecting the strip toward the front of the vehicle, the vehicle drives over the unfilled strip. Meanwhile, the extractor/collector device moves the extracted infill rearwardly to a bag located in a trailer. The turf cutter device is used prior to infill extraction, while the turf wind up device may be used before or after infill extraction, depending on whether infill extraction takes place at the field or at a remote site, respectively.

An apparatus for servicing roadways includes a frame configured to be secured to a prime mover. The apparatus further includes a grinding drum rotatably supported upon the frame. The apparatus still further includes a driving system supported upon the frame and configured to rotationally drive the grinding drum.

An apparatus for extracting and collecting particulate infill from an infilled artificial turf field. A vehicle has a first forward end and a second rearward end. An infill extractor is located at the first end of the vehicle and adapted to extract infill from a strip of infilled athletic turf. Extracted infill falls into a bottom section of the infill extractor. An infill mover is secured to the vehicle and adapted to move the extracted infill from the bottom section of the infill extractor toward the second end of the vehicle. An infill collector is connected to the second end of the vehicle and operable to cooperate with the infill mover to collect the moved infill. The infill collector includes a frame that is laterally movable relative to the vehicle from an operative “in use” position to a stowed position.

A display device includes a pixel portion including a plurality of pixels each including a first transistor, a second transistor, and a light-emitting element, in which a gate of the first transistor is electrically connected to a scan line, one of a source and a drain of the first transistor is electrically connected to a signal line, and the other of them is electrically connected to a gate of the second transistor; one of a source and a drain of the second transistor is electrically connected to a power supply line and the other of them is electrically connected to the light-emitting element, and the first transistor includes an oxide semiconductor layer. A period when the display device displays a still image includes a period in which output of a signal to all the scan lines in the pixel portion is stopped.

The band tail state and defects in the band gap are reduced as much as possible, whereby optical absorption of energy which is in the vicinity of the band gap or less than or equal to the band gap is reduced. In that case, not by merely optimizing conditions of manufacturing an oxide semiconductor film, but by making an oxide semiconductor to be a substantially intrinsic semiconductor or extremely close to an intrinsic semiconductor, defects on which irradiation light acts are reduced and the effect of light irradiation is reduced essentially. That is, even in the case where light with a wavelength of 350 nm is delivered at 1×1013 photons/cm2·sec, a channel region of a transistor is formed using an oxide semiconductor, in which the absolute value of the amount of the variation in the threshold voltage is less than or equal to 0.65 V.

A seat cushion airbag apparatus is applied to a vehicle seat including a seat unit having a seat cushion supported, from a lower side thereof, by a supporting portion of a seat frame, and an air blowing duct having a blow-out port below the seat cushion, wherein a conditioning air flowing through the air blowing duct is blown out upward from the blow-out port. An inflator is disposed at a location, which is spaced from the blow-out port in a front and rear direction of a vehicle, and an airbag is inflated between the supporting portion and the seat cushion by an inflation gas supplied from the inflator so that a seat face of the seat unit is raised to prevent a subject to be restrained on the seat unit from being moved forward.

A deployment guiding cloth is wound from an outside in the vehicle width direction, on an outer peripheral portion of a folded side airbag. This deployment guiding cloth extends toward a vehicle front side and is interposed between the side airbag that is partially deployed and a vehicle cabin side portion (a center pillar garnish and a door trim) before the side airbag is fully deployed.

A device for use in a vehicle steering system, said device comprising at least one actuator affixed to a wheel linkage of at least one wheel of said vehicle steering system. The actuator comprises a rotation assembly engagable with a first wheel linkage segment, an electric motor for actuating movement of the rotation assembly via a gear box and one or more sensors integrally contained in the actuator for sensing one or more parameters selected from the group consisting of force, speed, turns and rotation. Rotation of the rotation assembly actuates linear movement of said first wheel linkage segment into and out of said actuator to thereby adjust one or more wheel parameters of said at least one wheel, and wherein said one or more sensors provide real time data to an actuator control unit integral to said actuator to self-adjust rotational parameters of said rotation assembly.

A four-wheel independent suspension system for an electric wheelchair includes a chassis, two front wheels each fixed to a front rod respectively, and two rear wheels each fixed to a rear rod respectively. The chassis includes a rail extending in a width direction of the chassis, each of the front and rear rods has one end connected to a square first connecting sleeve, in the first connecting sleeve is disposed a first shock absorber which includes a rectangular outer pipe, and a rectangular inner pipe disposed in and rotated degrees with respect to the outer pipe, the edges of the inner pipe are abutted against the inner surface of the outer pipe, between each of the edges of the inner pipe and the inner space of the outer pipe is disposed an elastic rubber, the inner pipe of each of the first shock absorbers is sleeved on the rail.

A control arrangement for a hydropneumatic suspension system and a hydropneumatic suspension system are provided. The control arrangement has a pressure supply connection, a return connection, a piston chamber connection adapted to be connected to the piston chamber of a suspension cylinder of the hydropneumatic suspension system, an annular chamber connection adapted to be connected to the annular chamber of the suspension cylinder, and at least one controllable valve arrangement comprising a plurality of switch positions via which the pressure supply connection and the return connection are connectable to the piston chamber connection and the annular chamber connection. The annular chamber connection is in flow connection with the return connection via a pressure-limiting line having a hydraulically controllable pressure-limiting element. The pressure-limiting element has a control input adapted to be acted upon via a control line by a control pressure which is limitable to a predefinable pressure limit.

A reconfigurable fixed position suspension and support structure attached to the trailer body using a locking device consisting of pins, bolts and/or other fastening devices. The support structure has a removable locking device that when attached to the support structure locks the support structure and suspension into a fixed position relative to the trailer body. When the trailer is not in operation, the locking device can be removed allowing the suspension group to be reconfigured, and each suspension to be repositioned relative to the trailer body. The removable locking device is then reattached to the suspension support structure locking the support structure and suspension into a new fixed position relative to the trailer body.

An embodiment of the invention includes a three-component rear-wheel suspension system for interconnecting to a bicycle frame and a shock absorbing device. The three components are an upper stay pivotally attached to the frame, a lower stay having a rear wheel mount and pivotally connected to the upper stay at a location generally above the rear wheel mount, and a link pivotally connected to the frame at a location below where the upper stay is attached to the frame and pivotally coupled to the lower stay. The general arrangement of the linkages between the three components permit compression of the suspension system (i.e. relative upward movement of the rear wheel) with limited chainstay lengthening.

A system and method for adjusting the arms of an over-sized trailer is described herein. In one embodiment, the system can comprise a center support, a plurality of swing arms, and a plurality of stabilizer rods. The swing arms can be mounted to the left side and the right side of the center support. The swing arms can each comprise an arm and an arm hinge. The swing arms can be capable of rotating about the arm hinge. Furthermore, a dolly can be capable of being mounted to each swing arms. Each of the stabilizer rods can comprise a first rod portion and a second rod portion. The first rod portion can be connected to the center support and the second rod portion connected to one of the swing arms.

A suspension system for a vehicle includes a frame mounting bracket for mounting to the vehicle. The suspension includes front and rear rubber torsion axle assemblies. Front and rear lever assemblies are respectively pivotally attached to the vehicle at front and rear lever pivot points. Outer housings of the rubber torsion axle assemblies are each respectively rigidly mounted to the front and rear lever assemblies. A rigid control arm is pivotally connected at one end to the front lever assembly at a front control arm pivot point and its other end is pivotally connected to the rear lever assembly at a rear control arm pivot point. When the suspension assembly encounters a force causing the front lever assembly to rotate in one direction about the front lever pivot point the rigid control arm causes the rear lever assembly to rotate about the rear lever pivot in an opposite direction.

An airbag apparatus for vehicle includes: an airbag body formed by joining outer peripheral portions of two base cloths, the two base cloths being superimposed on each other; an inflator introducing gas to an inside of the airbag body; and a vent hole formed on the airbag body and configured of a slit, the vent hole communicating between the inside and an outside of the airbag body, the slit being formed so as to be directed from the outer peripheral portions toward central portions of the two base cloths over the two base cloths.

Construction is achieved that is capable of maintaining the holding force by which a support bracket 12a holds an outer column 13a. One pivoting friction plate 25 for telescopic mechanism is held between the inside surface of a support plate section 20a of the support bracket 12a and the outside surface of a displacement bracket 18a that is fastened to the outer column 13a. When adjusting the forward-backward position of a steering wheel, the pivoting friction plate 25 for telescopic mechanism pivots around a support pin 33 as an adjustment rod 22a displaces along a long hole 19a for telescopic mechanism and a long guide hole 32.

A pre-weakened cover of an airbag module is provided including a layer having an outer show surface and an opposing inner surface. A plurality of first cuts is arranged at a first angle on the inner surface. A plurality of second cuts is arranged at a second angle on the inner surface. Each of the second cuts intersects two adjacent first cuts to form a generally V-shaped pattern.

A drilling control system monitors and compares drilling and completion operation sensor values and autonomously acts in response to conditions such as a kick or surge. Sensors in various combinations may monitor return fluid flow rate, fluid inflow rate, wellhead bore pressure, temperature of returning fluid, torque, rate of penetration and string weight change. The control system has corresponding control logic to monitor, warn and act based on the sensor inputs. The actions may include the warning of support personnel, closing an annular blowout preventer, shearing drill pipe using a ram shear, pumping heavier fluid down choke and kill lines, disconnecting the riser or various other actions.

A drilling apparatus for drilling boreholes in an underground formation includes a tool body that can be positioned in a borehole where drilling is to take place. The apparatus further includes a gas cutting torch having a nozzle, a supply of a cutting gas connected to the gas cutting torch. In some embodiments, the gas cutting torch and supply of cutting gas may be connected by an umbilical link. The tool body may be advanced through the borehole as drilling takes place. In some embodiments, the tool body may be advanced via a tractor device that forms part of the tool body or attached to the tool body.

Methods and systems are described for improved drilling operations through the use of real-time drilling data to predict bit wear, lithology, pore pressure, a rotating friction coefficient, permeability, and cost in real-time and to adjust drilling parameters in real-time based on the predictions. The real-time lithology prediction is made by processing the real-time drilling data through a multilayer neural network. The real-time bit wear prediction is made by using the real-time drilling data to predict a bit efficiency factor and to detect changes in the bit efficiency factor over time. These predictions may be used to adjust drilling parameters in the drilling operation in real-time, subject to override by the operator. The methods and systems may also include determining various downhole hydraulics parameters and a rotary friction factor. Historical data may be used in combination with real-time data to provide expert system assistance and to identify safety concerns.

The invention relates to a method and apparatus for opening threaded joints of drilling equipment (6) by striking the drilling equipment (6) with the percussion device of a rock drilling rig (1) and by measuring vibration originating from the drilling equipment (6) during striking. In addition to vibration, measuring means (9) measure a parameter defining at least one additional condition, on the basis of which the decision to stop striking is made.

In one aspect, an apparatus for drilling a wellbore into an earth formation is disclosed, which apparatus, according to one embodiment, may include a drill string configured to be conveyed into a wellbore, wherein an annulus is formed between the drill string and a wellbore wall, a first flow device configured to circulate a first fluid from an annulus to a bore of the drill string, and a second flow device positioned downhole of the first flow device, the second flow device configured to circulate a second fluid from the bore of the drill string to the annulus.

It is an object of the invention to provide a technique that contributes to rationalization of dust collection, in a dust collecting attachment for use on a power tool. Dust collecting attachments 250, 350 are used on a power tool 201 having a tool body 203, a tool bit 209 which can be coupled to a front end region of the tool body 203, and an auxiliary handle 208 attached to the tool body 203. The dust collecting attachments 250, 350 include dust collecting members 251, 351, respectively, which can be attached to the auxiliary handle 208 in such a manner as to surround the front end region of the tool body 203 around a longitudinal axis of the front end region in order to collect dust generated during operation by the power tool 201, and a connecting hose 273 for connecting the dust collecting members 251, 351 to a dust collector.

Apparatus and method for automated drilling of a borehole in a subsurface formation. In one embodiment, a method includes selecting at least one control variable. A drilling performance objective having a value that is influenced by drilling of the borehole using the at least one control variable is defined. A first interval of the borehole is drilled maintaining the at least one control variable at a first value. A second interval of the borehole is drilled maintaining the at least one control variable at a second value. A third interval of the borehole is drilled maintaining the at least one control variable at a third value. The third value is selected based on a comparison of the values of the drilling performance objective while drilling the first interval and second interval to a predetermined optimal value of the drilling performance objective.

A method for reducing the friction forces between tubulars, for example coiled tubing in casing includes mixing a selected suspending agent and surfactant and polymer particles in oil, then adding the mixture to water and pumping the mixture down the tubing. The mixture is particularly useful in coiled tubular drilling inside casing of an oil or gas well. The formulation has also been found to reduce corrosion on metal surfaces.

Method and apparatus for controlling rock drilling with a percussion device belonging to a rock drill to deliver stress waves to rock through a tool by pushing the tool against the rock by means of a feed motor and rotating simultaneously the tool by means of a rotation motor, whereby the maximum feed force is determined, pressure medium is supplied to the feed motor and to the rotation motor and the feed force is controlled according to the drilling conditions. The feed force is controlled on the basis of the feed speed and the rotation torque. The apparatus has a load control valve which controls the feed.

An adjustable bent drilling tool capable of changing in situ drilling direction to facilitate horizontal drilling. The drilling tool may be controlled from the surface and eliminates the need to bring the tool to the surface for reconfiguration. In one embodiment, the drilling tool utilizes a communications module to communicate with upstream sections of the tool. The communications module is connected to a programmable electronic control module which controls an electric motor. A hydraulic valve assembly follows the control module, which receives input signals and controls a pilot piston between two fixed points of a mid-assembly typically located adjacent to and downstream of the hydraulic valve assembly on the drill tool. A lower assembly is attached to the drill tool immediately following the mid-assembly, and provides both a safety release sub-assembly as well as a bendable sub-assembly which directs the adjustable drill tool to change drilling angle and direction.

Expandable apparatus for use in subterranean boreholes include at least one member configured to move between a retracted position and an extended position. A latching member disposed in the tubular body may selectively retain the at least one member in the retracted position. Methods of operating an expandable apparatus include securing at least one member of the expandable apparatus in a retracted position by engaging an inner wall of a tubular body with at least one latch member disposed in at least one aperture formed in a latch sleeve.

Expandable apparatus for use in subterranean boreholes include at least one member configured to move between a retracted position and an extended position. Components of the expandable apparatus may include at least one surface for removing debris proximate to the tubular body. Components of the expandable apparatus may be configured to enable the expandable apparatus to increase a diameter of a subterranean borehole by greater than twenty percent. Components of the expandable apparatus may be configured to restrict fluid flow to nozzle assemblies. The expandable apparatus may include a protect sleeve having a push sleeve disposed therein. Methods of operating an expandable apparatus may include removing debris with a surface of the expandable apparatus. Methods of operating an expandable apparatus may also include selectively flowing fluid to nozzle assemblies.

A radiation detection apparatus according to an embodiment includes: a scintillator including a fluorescent material to convert radiation to visible radiation photon; a photon detection device array having a plurality of cells each of which includes a photon detection device to detect visible radiation photon emitted from a fluorescent material in the scintillator and convert the visible radiation photon to an electric signal; and a plurality of lenses provided on cells respectively in association with the cells to cause the visible radiation photon to be incident on the photon detection device in an associated cell.

A sensor includes a collector, an emitter and a base-region barrier formed as an inverted bipolar junction transistor having a base substrate forming a base electrode to activate the inverted bipolar junction transistor. A level surface is formed by the collector, the emitter and the base-region barrier opposite the base substrate such that when the level surface is exposed to charge, the charge is measured during operation of the bipolar junction transistor.

Method for identifying CVD diamond comprises (1) placing a clean diamond on a fixed platform; (2) illuminating the diamond with light having various wavelengths; (3) receiving reflected light from the diamond; (4) calculating a reflectance value at each wavelength based on a light intensity at each wavelength of the reflected light, generating a spectral reflectance curve; (5) determining whether the spectral reflectance curve has a sharp trough, then storing the diamond if the spectral reflectance curve thereof does not have the sharp trough, while selecting the diamond for a further identification if the spectral reflectance curve thereof has the sharp trough; and (6) determining whether the sharp trough of the diamond selected from the step (5) is at a wavelength between 227 nm and 233 nm, and identifying the diamond to be the CVD diamond if the sharp trough is at the wavelength between 227 nm and 233 nm.

The present invention provides a blanking apparatus comprising a plurality of blankers configured to respectively blank a plurality of beams with respect to a target position on an object, and a driving device configured to drive the plurality of blankers, wherein the driving device includes a change device configured to change relation between a combination of beams of the plurality of beams, and a target dose.

In a pattern inspection of a semiconductor circuit, to specify a cause of a process defect, not only a distribution on and across wafer of the number of defects but also more detailed, that is, the fact that how many defects occurred where on the semiconductor pattern is needed to be specified in some cases. Accordingly, the present invention aims to provide an apparatus capable of easily specifying a cause of a process defect based upon a positional relationship of a distribution of defect occurrence frequency and a pattern. The apparatus includes: a charged particle beam optical system for detecting secondary charged particles by irradiating the charged particle beam to the sample; an image processing unit for, based upon a plurality of images to be inspected that are obtained by the secondary charged particles, obtaining an occurrence frequency of defect candidates for each of predetermined regions inside the detected image; and a display unit for displaying the distribution of the occurrence frequency of the defect candidates so that a positional relationship to the pattern is recognized.