A carbon dioxide capture and release method of forming a MOF matrix material including at least one metal-organic-framework crystal that includes at least one metal ion or metal ion cluster coordinated to polydentate organic ligands. The method includes forming a positive moisture swing CO2 host by application of at least a portion of the MOF matrix material to at least a portion of a good, and exposing the good to a feed gas. The method also includes altering the absorption and desorption of CO2 in the CO2 host through a swing absorption/desorption process of moisture content, where an equilibrium pressure of CO2 over the CO2 host is based at least in part on the moisture content. The metal-organic-framework crystal can be UIO-66 including Zr6O4(OH)4(CO2)12 clusters linked by terephthalate acid ligands, and/or Zr6O4(OH)4(CO2)12 clusters linked by amino-terephthalic acid ligands, and/or Zr6O4(OH)4(CO2)12 clusters linked by nitro-terephthalic acid ligands.

The present invention corresponds to a device for extracting water from the environment by means of a liquid desiccant. The device comprises a means for capturing water from the environment using a liquid desiccant, an extraction chamber, a first duct through which liquid desiccant with water flows from the capture means to the extraction chamber, a second duct through which liquid desiccant flows from the extraction chamber to the capture means, a reservoir for depositing water extracted from the liquid desiccant in the extraction chamber, a third duct through which water flows from the extraction chamber to the reservoir, a means to create a vacuum within the extraction chamber, and a control device that controls the heating element. The extraction chamber comprises a container located at the bottom of the extraction chamber, in which the water captured by the liquid desiccant is extracted and a heating element located within the container

A waste water insert has a wall surrounding a vertical bore. A horizontal flange extends outwardly from the upper end of the wall and has a lip formed on its outer periphery. The horizontal flange of the waste water insert is super-imposed over the horizontal flange of a waste water strainer located in a bathtub, sink or the like. The wall of the insert extends downwardly through the cylindrical wall of the waste water strainer with the two walls being spaced from each other by virtue of the cylindrical wall of the insert having a smaller diameter than that of the strainer.

A clamping device for mounting a sink to a counter, includes a clamp having a clamp body and a binding tab, a binding post for insertion through a first opening in the clamp body and into a hole in a surface of the sink adjacent to a clamped article, the clamp and binding tab connected to the post and extending away therefrom at least partially over an edge of the clamped article, and a clamp screw for insertion through a second opening in the clamp body and against a solid portion of the binding tab interposed between the clamp screw and the edge of the clamped article.

A waste water insert has a wall surrounding a vertical bore. A horizontal flange extends outwardly from the upper end of the wall and has a lip formed on its outer periphery. The horizontal flange of the waste water insert is super-imposed over the horizontal flange of a waste water strainer located in a bathtub, sink or the like. The wall of the insert extends downwardly through the cylindrical wall of the waste water strainer with the two walls being spaced from each other by virtue of the cylindrical wall of the insert having a smaller diameter than that of the strainer.

Methods and apparatus for controlling odors in an enclosed space, such as a pit latrine, include providing an oxidizer, such as a catalytic heater and an optional mechanical ventilation unit, such as an inline fan, both flow connected to a vault (pit) of the latrine. The heater is also connected to a source of fuel, for example, propane. Fresh air is drawn through vents in the latrine housing and thereafter through toilets in the latrine and through the vault, providing oxygen for the reaction. The fan and/or oxidation process draws both fresh air and accompanying odorous compounds directly from the latrine and into the oxidizer wherein the odorous components are substantially destroyed.

The device has a line arrangement (2), which possesses an inlet (3) connectable to a supply line and an outlet (4) connectable to a shower arm (5). A heating element (6) serves for the provision of warm water. An energy store (7, 8) is provided, with which the power range for the provision of shower water can be extended. The heating element (6) for the provision of warm water is, in particular, a continuous-flow heater. The energy store (7, 8) is, in particular, a thermal, electrical, electrochemical or chemical energy store. During the shower process, the energy store is available as an additional energy source for the preparation of shower water.

A pool cover for above ground swimming pools includes a cover with an elevated central area, a plurality of rods to support the cover, and a plurality of clip assemblies to couple the rods to the swimming pool. The cover is a waterproof textile having a plurality of sleeve members allowing for insertion of the support rods to secure and support the cover. Each clip assembly includes hook which removably attaches to an upper perimeter edge of the pool and a pocket to receive an end of the support rod. When assembled, the support rods form a dome-like structure circularly arranged about the edge of the pool.

Provided is a device for use in a shower system and a related method. The device may include an appliance for adding a medium to shower water. The appliance may be designed such that it works according to the principle of a water jet pump. Advantageously, the medium added to the shower water may contain one or more fragrance media.

Provided is an automatic head care system and an automatic hair washing system for caring a person's head in a safe and effective manner without applying a straining force on the person's neck. In order to achieve the object, the following steps are performed in turn: a head receiving step in which a pair of arms 114L, 114R are placed at positions for receiving a person's head 10 on a suppotring body 112; a water washing step in which water ejected from a plurality of nozzles 110 is poured to the head 10 while the pair of arms 114L, 114R are swung; a shampoo step in which washing liquid ejected from the plurality of nozzles 110 is poured to the head 10 while the pair of arms 114L, 114R are swung; and a head care step in which the head 10 is cared by performing the push-rotating of the pair of arms 114L, 114R in the direction of approaching the head 10 so as to bring the plurality of contacts 109 into contact with the head 10 and by swinging the pair of arms 114L, 114R while moving the plurality of contacts 109.

A lever control mechanism of a drain valve of a toilet tank has a lever assembly assembled in the wall of the toilet tank and a lever linked to the revolving shaft of the lever assembly. The lever assembly is connected to a deviator, which is disposed with a drive arm; the drive arm is connected to the revolving shaft. The deviator is disposed with a joint portion and at least a leading hole to limit the lever revolving vertically. One end of the lever is run through the leading hole to rotationally connect to the joint portion; the drive arm is revolved by the driving of the revolving shaft to drive the lever revolved in the fan shaped vertical surface limited formed by the joint portion and the leading hole.

There are provided a valve control system, a bidet using the same, and a valve control method. The valve control system includes a latch valve controlling a stream of water in a pipe; a flow rate sensor measuring a flow rate in the pipe; and a valve control device controlling the operation of the latch valve. The valve control device determines whether or not the latch valve is malfunctioning upon analyzing a flow rate measured by the flow rate sensor. When the latch valve is malfunctioning, the valve control device controls the latch valve to re-operate.

Apparatus and method for automatically receiving and treating excreta. The apparatus for treating excreta according to the present invention includes: a port with an excreta-receiving portion for receiving the excreta of patients; an excreta storage unit which suctions and stores excreta from the excreta-receiving portion; an excreta suctioning unit which is connected to the excreta storage unit; a wash water supply unit which supplies wash water to the port, wherein the port has an air spray nozzle and an air intake port connected to an air intake line; and a flow channel switching unit, one side of which is selectively connected either to the excreta suctioning line or to the air intake line which are connected through the excreta storage unit, and the other side of which is connected to the excreta suctioning unit.

A faucet assembly includes a base for mounting adjacent a basin of a sink and a spout projecting upward and outward away from the base and terminating at a water outlet. A light emitter is mounted to one section of the spout and emits a beam of light directed toward another section of the spout, wherein the beam of light does not intersect a region beneath the outlet. A light sensor, mounted to the spout, produces a signal indicating whether the beam of light is striking the light sensor. A control circuit responds to the signal by opening a valve that thereby conveys water to the spout.

A swimming pool with a circulating water flow includes a plurality of side walls adjacent a swimming compartment, one of the side walls including an outlet, at least one inlet positioned at each lateral side of the outlet, and a plenum arrangement on a side of the one wall opposite the swimming compartment. The plenum arrangement is in communication with each inlet and the outlet. A water propulsion device is positioned within the plenum arrangement and effects a pair of circuitous water flow paths within the swimming compartment.

A shower curtain is provided with two pockets adapted to receive spaced apart stereo speakers and a third pocket adapted to receive a personal entertainment system. The third pocket is provided with a clear inside window pane facing the inside of the shower and adapted for finger-touch control through the window pane. A closure system integral with the shower curtain is provided for external access to the pockets. In one embodiment, the closure system for access to the pockets is a tongue-in-groove fastening arrangement that provides external access to a personal entertainment system as well as a channel through which wires run to couple the entertainment system to the speakers.

This integrally formed water and space saving lavatory-toilet fixture enables hand washing with potable water from an existing toilet, recycles effluent completely, and provides sanitary, seamless, one-piece, full perimeter tank closure. A flexible hose re-directs supply away from the overflow through an interior fixture cavity and top cast opening toward a basin, that drains back into the reservoir as effluent; supplementing the required volume of water to complete one flush cycle. A cast sidewall basin opening is formed allowing potential drainage to flow through an internal hollow cavity directly into the tank reservoir below. The integrally formed fixture also includes a sloped front wall allowing additional hand washing space, vertically aligned space saving side and rear walls, and, an integrally formed perimeter rim conforming to the shape of the toilet tank edging below, providing hygienic, continuous tank containment and secure, detachable mounting.

A trimmer head for use with a plurality of lengths of flexible cutting line in a flexible line rotary trimmer having a plurality of line holders rotatably mounted thereon. Each line holder defines a pair of laterally spaced apertures in an upper surface thereof, a passageway extending longitudinally therethrough, terminating in an extended end thereof and communicating with the laterally spaced apertures. An interior guide surface extends along a curvilinear path from the spaced apertures to the passageway and a web extends between the apertures whereby end portions of lengths of cutting line can be extended into and through the spaced openings, along the guide surfaces into and through the passageway and outwardly therefrom, whereupon lengths of line extend about and are held against the web with portions of the line projecting from the passageways in the line holders for the cutting of vegetation.

A system and method for controlling a load on an agricultural harvester (100) comprising a first sensor (124, 126, 128, 130) to sense a first load, a second sensor (132, 134, 136, 138) to sense a second load, an electronic control unit (200) coupled to the first sensor and the second sensor, the electronic control unit (200) being configured to determine a difference between the first load and the second load, and to either (a) raise a harvesting head (102) or (b) stop the agricultural harvester (100), or (c) both, when the difference exceeds a threshold load.

A trimmer assembly for attachment onto the mower deck of a riding mower. The assembly comprises an L-shaped attachment and a height adjustment assembly. The L-shaped attachment is connected to the trim blade spindle of a riding mower, and comprises a pulley surface and a downwardly extending trim shaft holding surface. A series of pulleys within the L-shaped attachment are connected together by a trimmer drive belt that facilitates the movement of the trimmer shaft when the trim blade spindle rotates. The height adjustment comprises an upstanding shaft with a lever attached thereon. The lever is pivotally attached onto the top of the upstanding shaft, and comprises a foot actuatable handle, whereby the movement of the handle alters the height of the L-shaped attachment. The device further includes a pair of wheels that enable side-to-side movement, and a spring loaded mount that provides protection against damages from impacts.

A bale turning apparatus for attachment to a baler to generally align the cylindrical of the bales in each row as the bales are released from the baler. Using the disclosed invention, the bales are essentially turned ninety degrees from the orientation of bales from the position that they are typically released from a round baler. By accomplishing this general alignment of the cylindrical axis of each bale in each row, when baling corn stover or other row crops, the bale loading operation can later be done more efficiently by driving down the rows in the same direction as the combine and baler have traveled.

A harvesting system and method providing a row insensitive plant cutting and gathering capability, suitable for harvesting tall, stalky plants such as sweet sorghum, cane, and the like, in high volume, which also billet cuts the harvested plants. Multiple plants are cut simultaneously on a continuous basis at any locations across a header of the system, and the cut plants are gathered into a continuous overlapping flow having a vertical extent or thickness of several stalks or canes and their associated foliage. The flow is then vertically compacted into a mat of reduced thickness while being conveyed into a billet cutter, which cuts the stalks or canes into billets of a desired length and discharges the billets to a desired location, all while the harvester is moving through a field harvesting. The system can be incorporated into a conventional sugarcane harvester in place of conventional base cutters and row dividers.

A harvesting header includes a cutter bed having a plurality of cutting elements arranged transverse to the header and a crop chopping and conditioning region having a crop chopping device and a crop conditioning device. The crop chopping device is configured to chop crop cut by the cutter bed into smaller lengths and the crop conditioning device is configured to crimp the crop to aid in drying. The first chopping roller has a tubular, cylindrically-shaped body and a plurality of parallel knife-mounting lugs extending radially outward along substantially the full length of the body. A plurality of chopping knives are attached to the knife-mounting lugs and arranged around the body, each chopping knife having a length that is shorter than the length of the knife-mounting lug to which it is attached such that each chopping knife covers only a portion of the lateral length of the first chopping roller.

A shield apparatus is mounted on the header of an agricultural implement which includes a rotatable collecting member to direct collected material rearwardly towards a rear discharge opening. The shield apparatus includes a panel member and a mounting bracket assembly which supports the panel member above the rear discharge opening of the header spanning in a lateral direction transversely to the forward working direction such that the panel member extends from a rear edge rearward of the collecting member to a front edge which is spaced forward and upwardly in relation to the rear edge. The shield apparatus ensures that material thrown upwardly above the rear of the header frame is redirected downwardly into the rear discharge opening of the header for collection by the implement in the usual manner. The shield apparatus does not interfere with the visibility of the operator when the panel member is clear.

A grass cutting machine with two cutting units mounted on opposite sides of the chassis has an inclinometer monitoring the left/right inclination of the chassis. If the inclination value exceeds a defined threshold, the higher of the two cutting units is lifted to improve stability.

A mower carrying a rotary cutting deck has a height of cut system for adjusting the vertical position of the deck relative to the mower frame for changing or adjusting the height of cut. The height of cut system comprises a pair of parallel cross shafts that carry a plurality of pivotal suspension linkages that connect to the deck, the cross shafts and linkages pivoting jointly with one another and with a pivotal control lever. One of the cross shafts carries a torsion spring to counterbalance the weight of the deck. The control lever is maintained in a plurality of adjusted pivotal positions by a height selection bracket fixed to the frame with the height selection bracket being capable of having its position changed or adjusted relative to the frame by a single adjustment bolt. Each suspension linkage has its effective length adjusted by turning a threaded adjuster carried at the upper end of a connecting rod that is part of each linkage to allow the deck to be leveled relative to a reference plane. The adjustment of the height selection bracket is accomplished without affecting the length adjustments previously made to any of the suspension linkages.

The present invention provides a method for measuring reflective intensity of display surface, including: obtaining a luminance value of a first display and a luminance value of a second display when displaying, the first display and the second display having the same observed luminance, the peripheral of the surface of the first display being surrounded by light-shielding object, the first display and the second display being placed side by side; and obtaining the reflective intensity of the display surface in the ambient based on the luminance value of the first display and the luminance values of the second display when displaying. As such, the present invention provides convenient and accurate means to measure the reflective intensity of display surface.

The weed trimmer head is comprised of a sole plate having a diameter; a circumference; a plurality of pivot pins extending upwardly therefrom near the circumference. The sole plate also has a driving shaft extending upwardly therefrom from a center thereof. The driving shaft has a threaded segment thereon. A plurality of cutting blades are pivotally mounted to the plurality of pivot pins. A wingnut plate is also provided. This wingnut plate has a disc-like portion and wing blades extending on an upper side thereof. The wingnut plate has a threaded hole in its disc-like portion. The threaded hole is mounted to the threaded segment of the driving shaft and the wingnut plate is movable along the threaded segment, for selectively contacting or exposing the ends of the pivot pins.

A combine harvester is provided that separates grain material from material other than grain using multiple processing areas, including a harvesting area, a feederhouse area, a threshing area, a cleaning area, and a grain delivery area. In a location at or prior to entering one of the processing areas, the material may be collected and held until a collection threshold is reached. Once it is determined that the collection threshold is reached, the material forming a first group of material may be transported from the location to the processing area or a subsequent processing area. The first group of material is transported from the location to the processing area or the subsequent processing area substantially simultaneously and thus simulates the gathering of a large amount of crop material even when small plots are involved. In this way, reduced cycle times may be achieved, and the efficiency benefits of large-plot harvesting may be extended to small-plot applications.

A vehicle and a method of controlling a dynamometer mode operation of a vehicle that includes requesting the dynamometer mode; monitoring for at least one non-dynamometer vehicle operating condition; if at least one of the non-dynamometer vehicle operating conditions is detected, prohibiting dynamometer mode; and if none of the non-dynamometer vehicle operating conditions is detected, operating the vehicle in dynamometer mode.

A corn header has a row unit frame and an auger sweeping ears of corn toward a center of the corn header. A corn row divider assembly has a snout and gatherer hood hingeably coupled to, and aft of, the snout. An aft end of the gatherer hood is located beneath and to the rear of the fore end of the auger in an operational configuration of the divider assembly. The divider assembly further has a four-point hinge assembly coupling the aft end of the gatherer hood to the row unit frame. The four-point hinge assembly is configured to pivot the gatherer hood between the operational configuration and a non-operational configuration in which the gatherer hood is in a raised condition. The four-point hinge assembly moves the aft end of the gatherer hood forward so that the gatherer hood clears the auger when pivoting to the non-operational configuration.

A windguard mechanism comprising a pair of arms attachable to an agricultural machine and a windguard plate extending between the pair of arms and positioned to hold down crop material processed by a pickup mechanism. The windguard plate comprises a first plate fixed between the pair of arms and a second plate positioned movably with respect to the first plate, wherein working surfaces of the first plate and of the second plate form a windguard working surface of an area independent on the position of the second plate.

A windrow merger includes at least one pickup head member and an internal drive assembly disposed within a longitudinal aperture defined internal to the at least one pickup head member, the drive assembly being for imparting a rotational motion to a plurality of tines by means of a drive shaft operably coupled thereto, the drive shaft extending in opposed directions from the drive assembly. A method of forming the windrow merger is further included.

A rotary implement includes a metallic body that is rotatable around an axis. The metallic body includes a tapered leading edge having an interface surface and an opposite, free surface. The metallic body has a first composition. A metallic layer has a first side surface that is attached to the interface surface and a free, second side surface opposite from the first side surface. The metallic layer has a second, different composition from the first composition. A rotary machine can include an actuator and the rotary implement operably coupled to the actuator. A method for making a rotary implement includes providing the metallic body that has the tapered leading edge having the interface surface and the opposite, free surface. The metallic layer is then attached to the interface surface of the metallic body.

Disclosed herein is a wafer processing method including a processed position measuring step of imaging an area including a beam plasma generated by applying a pulsed laser beam to a wafer, by using an imaging unit during the formation of a laser processed groove on the wafer, and next measuring the positional relation between the position of the beam plasma and a preset processing position. Accordingly, it is possible to check whether or not the laser processed groove is formed at a desired position, in real time during laser processing. If the position of the laser processed groove is deviated, the processed position can be immediately corrected.

A semiconductor device has a plurality of semiconductor die. A first prefabricated insulating film is disposed over the semiconductor die. A conductive layer is formed over the first prefabricated insulating film. An interconnect structure is formed over the semiconductor die and first prefabricated insulating film. The first prefabricated insulating film is laminated over the semiconductor die. The first prefabricated insulating film includes glass cloth, glass fiber, or glass fillers. The semiconductor die is embedded within the first prefabricated insulating film with the first prefabricated insulating film covering first and side surfaces of the semiconductor die. The interconnect structure is formed over a second surface of the semiconductor die opposite the first surface. A portion of the first prefabricated insulating film is removed after disposing the first prefabricated insulating film over the semiconductor die. A second prefabricated insulating film is disposed over the first prefabricated insulating film.

A method of making a semiconductor device can include providing a wafer comprising a plurality of semiconductor die, wherein each semiconductor die comprises an active surface and a backside opposite the active surface. A photosensitive layer can be formed over the wafer and on a backside of each of the plurality of semiconductor die within the wafer with a coating machine. An identifying mark can be formed within the photosensitive layer for each of the plurality of semiconductor die with a digital exposure machine and a developer, wherein a thickness of the identifying mark is less than or equal to 50 percent of a thickness of the photosensitive layer. The photosensitive layer can be cured. The wafer can be singulated into a plurality of semiconductor devices.

A semiconductor package is provided, including: an insulating base body having a first surface with an opening and a second surface opposite to the first surface; an insulating extending body extending outward from an edge of the first surface of the insulating base body, wherein the insulating extending body is less in thickness than the insulating base body; an electronic element having opposite active and inactive surfaces and disposed in the opening with its inactive surface facing the insulating base body; a dielectric layer formed in the opening of the insulating base body and on the first surface of the insulating base body, the insulating extending body and the active surface of the electronic element; and a circuit layer formed on the dielectric layer and electrically connected to the electronic element. The configuration of the insulating layer of the invention facilitates to enhance the overall structural rigidity of the package.

A semiconductor device includes a first moisture-resistant ring disposed in a peripheral region surrounding a circuit region on a semiconductor substrate in such a way as to surround the circuit region and a second moisture-resistant ring disposed in the peripheral region in such a way as to surround the first moisture-resistant ring.

A manufacturing method of a package substrate is provided. The method includes forming a first circuit layer on a carrier. A passive component is disposed on the first circuit layer and the carrier. A dielectric layer is formed on the carrier to embed the passive component and the first circuit layer in the dielectric layer. A second circuit layer is formed on the dielectric layer. The carrier is removed from the dielectric layer. A manufacturing method of a chip package is also provided.

Presented herein are an interconnect structure and method for forming the same. The interconnect structure includes a contact pad disposed over a substrate and a connector disposed over the substrate and spaced apart from the contact pad. A passivation layer is disposed over the contact pad and over connector, the passivation layer having a contact pad opening, a connector opening, and a mounting pad opening. A post passivation layer including a trace and a mounting pad is disposed over the passivation layer. The trace may be disposed in the contact pad opening and contacting the mounting pad, and further disposed in the connector opening and contacting the connector. The mounting pad may be disposed in the mounting pad opening and contacting the opening. The mounting pad may be separated from the trace by a trace gap, which may optionally be at least 10 μm.

A method for wafer-level packaging includes providing a substrate having a conductive metal pad formed on the surface of the substrate; forming a metal core on the top of the conductive metal pad with the metal core protruding from the surface of the substrate; then, forming an under bump metal layer on the top surface and the side surface of the metal core; and finally, forming a bump structure on the top of the under bump metal layer.

A semiconductor mounting apparatus includes a storing unit that stores a liquid or a gas, a contact unit that comes into contact with a semiconductor chip when the storing unit is filled with the liquid or the gas, and a sucking unit that sucks up the semiconductor chip to bring the semiconductor chip into close contact with the contact unit.

A system for determining thickness variation values of a semiconductor substrate comprises a substrate vacuumed to a pedestal that defines a reference plane for measuring the substrate. A measurement probe assembly determines substrate CTV and BTV values, and defines a substrate slope angle. A thermal bonding assembly attaches a die to the substrate at a bonding angle congruent with the substrate slope angle. A plurality of substrates are measured using the same reference plane on the pedestal. Associated methods and processes are disclosed.

A method of ultrasonically bonding semiconductor elements includes the steps of: (a) aligning surfaces of a plurality of first conductive structures of a first semiconductor element to respective surfaces of a plurality of second conductive structures of a second semiconductor element; (b) ultrasonically forming tack bonds between ones of the first conductive structures and respective ones of the second conductive structures; and (c) forming completed bonds between the first conductive structures and the second conductive structures.

A semiconductor device includes a substrate comprising a trench; a gate dielectric layer formed over a surface of the trench; a gate electrode positioned at a level lower than a top surface of the substrate, and comprising a lower buried portion embedded in a lower portion of the trench over the gate dielectric layer and an upper buried portion positioned over the lower buried portion; and a dielectric work function adjusting liner positioned between the lower buried portion and the gate dielectric layer; and a dipole formed between the dielectric work function adjusting liner and the gate dielectric layer.

A method of forming a ferroelectric memory cell. The method comprises forming an electrode material exhibiting a desired dominant crystallographic orientation. A hafnium-based material is formed over the electrode material and the hafnium-based material is crystallized to induce formation of a ferroelectric material having a desired crystallographic orientation. Additional methods are also described, as are semiconductor device structures including the ferroelectric material.

Embodiments of the inventive concepts provide a method for manufacturing a semiconductor device. The method includes forming a stack structure including insulating layers and sacrificial layers which are alternately and repeatedly stacked on a substrate. A first photoresist pattern is formed on the stack structure. A first part of the stack structure is etched to form a stepwise structure using the first photoresist pattern as an etch mask. The first photoresist pattern includes a copolymer including a plurality of units represented by at least one of the following chemical formulas 1 to 3, wherein “R1”, “R2”, “R3”, “p”, “q” and “r” are the same as defined in the description.

A performance of a semiconductor device is improved. A film, which is made of silicon, is formed in a resistance element formation region on a semiconductor substrate, and an impurity, which is at least one type of elements selected from a group including a group 14 element and a group 18 element, is ion-implanted into the film, and a film portion which is formed of the film of a portion into which the impurity is ion-implanted is formed. Next, an insulating film with a charge storage portion therein is formed in a memory formation region on the semiconductor substrate, and a conductive film is formed on the insulating film.

A method of manufacturing a semiconductor device according to one embodiment includes forming a first film including a first metal above a processing target member. The method includes forming a second film including two or more types of element out of a second metal, carbon, and boron above the first film. The method includes forming a third film including the first metal above the second film. The method includes forming a mask film by providing an opening part to a stacked film including the first film, the second film and the third film. The method includes processing the processing target member by performing etching using the mask film as a mask.